A nickel micromirror array was designed and successfully fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. It was composed of two address electrodes, two support posts and a nickel mirror plate. The mirror plate, which is supported by two nickel posts, is overhung about 10 μm from the silicon substrate. The nickel mirror plate is actuated by an electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. Optimized fabrication processes have been developed to reduce residual stress in mirror plate and prevent contact between the mirror plate and the substrate, which ensure a reasonable flat and smooth micromirror for operation at low actuation voltage.
针对当前磁盘阵列(redundantarray of independentdisks,RAID)商家众多,缺乏统一监控工具这一缺陷,引入了一种通用性解决方案。以简单网络管理协议为基础,使用NET-SNMP添加磁盘阵列状态的监控模块,同时使用CACTI对磁盘阵列进行实时监控,并在发生异常时通过邮件和短信报警。该方案选用应用最广泛的软、硬两种RAID5级别进行测试。测试结果表明,该方案可实现各种磁盘阵列的统一监控管理和异常报警。 相似文献