长波长垂直腔面发射激光器研究

近年来,垂直腔面发射激光器(VCSEL)由于其较低的阈值电流和垂直衬底表面出光的特性受到研究人员的广泛关注.长波长VCSEL在光通信和光互联领域具有巨大的潜在研究意义,本文从应用、发展现状、存在的技术问题、解决方法等方面采用有限元仿真对长波长VCSEL进行了分析,并进行了展望.     

采煤机远程通信技术的优化改进研究

针对杜儿坪矿井下68310工作面采煤机自带的CAN总线通信无法满足长距离远程通信要求的问题,在分析CAN总线和串口总线通信方式原理的基础上,提出在CAN总线增设第三方转换模块实现远距离通信的方案。实践应用效果表明：优化改进后的远距离通信方案能保障对68310工作面井下采煤机与地面远程集中控制台之间的数据传输及工况监测,为实现工作面的智能化开采奠定基础。     

Cantilever with immobilized antibody for liver cancer biomarker detection

A novel cantilever array-based bio-sensor was batch-fabricated with IC compatible MEMS technology for precise liver cancer bio-marker detection. A micro-cavity was designed in the free end of the cantilever for local antibody-immobilization, thus the adsorption of the cancer biomarker takes place only in the local region of the cantilever instead of the whole lever, and the effect of adsorption-induced k variation can be dramatically reduced. These structural features offer several advantages: high sensitivity, high throughput, high mass detection accuracy, and a portable system. In addition, an analytical model has been established to eliminate the effect of the adsorption-induced lever stiffness change and has been applied to the precise mass detection of the cancer biomarker AFP; the experimentally detected AFP antigen mass by the sensor (7.6 pg/mL) is quite close to the calculated one (5.5 pg/mL), two orders of magnitude better than those of the fully antibody-immobilized cantilever sensor. These approaches can promote real applications of the cantilever sensors in cancer diagnosis.     

基于图像识别的轧辊表面破损检测系统

考虑到轧辊是轧机的重要组成部件,轧辊的质量直接影响轧机成形产品的质量,研究了基于图像识别的轧辊表面破损检测系统.利用高清摄像机采集轧辊图像;使用滤波去噪算法去除图像中的干扰因素;使用图像分割技术分割图像,以提高图像的识别效率;使用模板匹配的方法进行破损的识别;使用拉普拉斯方法对图像进行锐化处理,从而使得轧辊破损区域的边...     

应力和电阻率可控的适用于高品质因子MEMS器件的原位掺硼LPCVD多晶硅薄膜

The simultaneous control of residual stress and resistivity of polysilicon thin films by adjusting the deposition parameters and annealing conditions is studied. In situ boron doped polysilicon thin films deposited at 520 ℃ by low pressure chemical vapor deposition （LPCVD） are amorphous with relatively large compressive residual stress and high resistivity. Annealing the amorphous films in a temperature range of 600-800 ℃ gives polysilicon films nearly zero-stress and relatively low resistivity. The low residual stress and low resistivity make the polysilicon films attractive for potential applications in micro-electro-mechanical-systems （MEMS） devices, especially in high resonance frequency （high-f） and high quality factor （high-Q） MEMS resonators. In addition, polysilicon thin films deposited at 570 ℃ and those without the post annealing process have low resistivities of 2-5 mΩ·cm. These reported approaches avoid the high temperature annealing process （〉 1000 ℃）, and the promising properties of these films make them suitable for high-Q and high-f MEMS devices.     

RF-MEMS滤波器的高性能接口电路设计

提出了一种适用于射频-微机电系统(RF-MEMS)滤波器的高性能接口放大电路.利用微纳工艺制备了相对带宽为1.4％、中心频率为73.02 MHz的硅基MEMS滤波器,针对其高阻抗、高插入损耗特性,设计了基于运算放大器的低噪声、高增益的两级放大电路和阻抗匹配电路.仿真结果表明:接口电路对高频的MEMS滤波器微弱电流信号具...