基于核函数PCA的齿轮箱状态监测研究

讨论核函数PCA(principal analysis component,主元分析)的算法原理,提出基于核函数PCA的齿轮箱状念监测方法。该方法借助于核函数计算得到原始特征的非线性主元,并根据非线性主元构建特征子空间,实现对齿轮箱运行状态的分类识别,并监测其状态变化。实例研究表明,核函数PCA分类效果比PCA好,能有效识别出齿轮箱的不同状念,并及时监测到齿轮箱工作状态的变化。     

小型非球面光学元件测量技术研究

非球面光学元件应用越来越广泛,其测量技术非常关键.本文研究了小型非球面光学元件的各种面形测量方法,针对其测量原理进行了分类和对比,对其优缺点和适用范围进行了讨论,同时分析了各种测量方法实现的关键技术和面临的挑战.     

晶片键合质量的红外检测系统设计

基于晶片的红外透射原理,设计并搭建了晶片直接键合质量红外检测装置,并利用图像处理技术开发了相应的软件模块,可以快速获取键合界面的特性参数,如空洞分布、大小及键合率等,从而实现晶片直接键合质量的快速评估.同时,将该红外检测装置与硅片键合装置结合一体,可以实时监测硅片直接键合工艺.通过分析不同工艺条件下所获得的键合片质量,包括键合率、缺陷分布以及键合强度等参数的比较,可以有助于理解晶片键合的机理,实现键合工艺的优化.     

面向圆片级气密封装的表面活化直接键合技术

通过封装实验和性能检测,成功验证了表面活化直接键合技术应用于圆片级气密封装的可行性.实验中使用刻蚀出方形槽的硅圆片,通过化学表面活化方法.与基板硅圆片在室温下成功预键合,形成气密腔体;经过350℃、5 h的大气环境退火后强化了键合强度及气密性能.利用红外透射方法检测了键合后的硅圆片,其界面完整无明显空洞;键合界面横截面SEM图像显示键合界面均匀平整无显著缺陷.键合而成的气密腔体依次经过氦质谱仪和氟油检漏仪检测其气密性,平均漏率达到了1.175×10-8Pa·m3/s.     

无压力辅助硅/玻璃激光局部键合

提出了一种新的无需外压力作用的硅/玻璃激光局部键合方法,通过对晶圆进行表面活化处理,选择合适的激光参数及加工环境,成功地实现了无压力辅助硅/玻璃激光键合.同时研究了该键合工艺参数如激光功率、激光扫描速度、底板材料等的影响.实验表明,激光功率越大,扫描速度越小,键合线的宽度就越大.实验结果显示,该方法能有效减少键合片的残余应力,控制键合线宽,并能得到较好的键合强度.该工艺可为MEMS器件的封装与制造提供简洁、快速、键合区可选择的新型键合方法.     

激光键合的有限元仿真及工艺参数优化

在硅/玻璃激光键合中,温度场的分布是影响晶片能否键合的关键因素.本文利用有限元法建立了移动高斯热源作用下硅/玻璃激光键合的三维温度场数值分析模型.运用该模型计算了不同的工艺参数条件下硅/玻璃的温度场分布,并由此得出键合线宽.然后通过漏选试验确定影响激光键合的主要工艺参数有激光功率、激光扫描速度及键合初始温度.最后通过对仿真结果进行回归分析,得到激光键合工艺的最优参数,为进一步研究激光键合工艺提供了理论依据.     

光刻结合热解制备高深宽比碳微结构的新方法

将以光刻胶作为有机前驱物的热解成碳工艺与厚胶光刻工艺结合后,形成一种新的用于制备碳微结构的"C-MEMS(carbon-MEMS)"工艺,它流程简单、成本低、可重复性强且结构设计灵活.该工艺制备出的碳微结构具有较高深宽比(约为101)、良好的导电、导热和机械性能、优良的生物兼容性及化学惰性.综述了其发展过程和研究近况,介绍了该工艺的流程、可重复制备的典型结构以及一些特殊结构如碳纳米纤维等,阐明了其在三维微电池和介电电泳生物芯片等多个领域的应用,预见了该工艺可作为连接纳米、微米级结构的桥梁,将碳纳米纤维用于制备高表面积MEMS结构的前景.     

Effects of heating rate on the process parameters of superplastic forming for Zr<Subscript>55</Subscript>Cu<Subscript>30</Subscript>Al<Subscript>10</Subscript>Ni<Subscript>5</Subscript>

We investigated the effects of heating rate on the process parameters of superplastic forming for Zr₅₅Cu₃₀Al₁₀Ni₅₅ by differential scanning calorimetry. The continuous heating and isothermal annealing analyses suggested that the temperatures of glass transition and onset crystallization are heating rate-dependent in the supercooled liquid region. Then, the time-temperature-transformation diagram under different heating rates indicates that increasing the heating rate can lead to an increase of the incubation time at the same anneal temperature in the supercooled liquid region. Based on the Arrhenius relationship, we discovered that the incubation time increases by 1.08–1.11 times with double increase of the heating rate at the same anneal temperature, and then verified it by the data of literatures and the experimental results. The obtained curve of the max available incubation time reveals that the incubation time at a certain anneal temperature in the supercooled liquid region is not infinite, and will increase with increasing heating rate until this temperature shifts out of the supercooled liquid region because of exceeding critical heating rate. It is concluded that heating rate must be an important processing parameter of superplastic forming for Zr₅₅Cu₃₀Al₁₀Ni₅.     

Effects of Heating Rate on the Process Parameters of Superplastic Forming for Zr_(55)Cu_(30)Al_(10)Ni_5

We investigated the effects of heating rate on the process parameters of superplastic forming for Zr55Cu30Al10Ni5 by differential scanning calorimetry. The continuous heating and isothermal annealing analyses suggested that the temperatures of glass transition and onset crystallization are heating rate-dependent in the supercooled liquid region. Then, the time-temperature-transformation diagram under different heating rates indicates that increasing the heating rate can lead to an increase of the incubation time at the same anneal temperature in the supercooled liquid region. Based on the Arrhenius relationship, we discovered that the incubation time increases by 1.08-1.11 times with double increase of the heating rate at the same anneal temperature, and then verified it by the data of literatures and the experimental results. The obtained curve of the max available incubation time reveals that the incubation time at a certain anneal temperature in the supercooled liquid region is not infinite, and will increase with increasing heating rate until this temperature shifts out of the supercooled liquid region because of exceeding critical heating rate. It is concluded that heating rate must be an important processing parameter of superplastic forming for Zr55Cu30Al10Ni5.     

自组织映射网络的可视化研究

提出了一种自组织映射网络训练结果的可视化方法—距离映射法,该方法根据输入向量与竞争层神经元权向量距离的大小来计算相似度,然后对所有相似度与对应神经元坐标之积求和,把输入向量映射到二维平面。对故障数据的试验分析表明,该方法能提供更加清晰的可视化表示。