Abnormal junction profile of silicided p+/n shallowjunctions: a leakage mechanism

The leakage mechanism in p⁺/n shallow junctions fabricated using Co silicidation and shallow trench isolation processes has been investigated using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and TSUPREM-4 simulation results show that dopant profiles bend upward near the edge of the active region. The formation of the abnormal profile is attributed to transient enhanced diffusion induced by source/drain implantation. Based on the TEM and simulation results, it is suggested that the shallower junctions formed near the active edge can serve as a source for leakage current in the silicided p+ /n shallow junctions     

Improved Yen-Joye's authenticated multiple-key agreement protocol

An authenticated multiple-key agreement protocol is proposed. The protocol is not only secure against the unknown-key attack but also more efficient than other protocols.     

Effects of contact shape on biological wet adhesion

Wet adhesion is widely adopted in biological adhesion systems in nature. Wet adhesion is studied in this paper with the focus on the effect of different contact shapes (flat, concave, convex, and ring-like) on the adhesion force. The evolution of the liquid bridge between a fiber tip and substrate during the detaching process shows two transition points. The first transition from the radius-controlled to the contact-angle controlled process is critical to influence the strength and robustness of adhesion. We show that a concave shape is more effective than a flat one, while a convex shape has no advantage. A ring-like contact shape has advantages in a hydrophobic environment and on a rough surface.     

Dielectric reliability of stacked Al2O3–HfO2 MIS capacitors with cylinder type for improving DRAM data retention characteristics

Dielectric reliability in Al₂O₃(2–3.1nm)–HfO₂(3nm) stack capacitor with Metal–Insulator–Si(MIS) structure is investigated in this paper. We propose an optimized capacitor process through the Time–Dependent Dielectric Breakdown (TDDB) data under various process conditions. Furthermore, due to asymmetric current at both negative and positive voltage stress polarities, we show different lifetime extrapolation by a fluence–driven model. As a result, the maximum allowed operating voltage is projected to be 1.7V (failure rate 10ppm during 10year @ 85°C) for Data “0” retention lifetime.     

2/spl times/4 optical add-drop module with no difference in propagation length

We developed a micromachined X-type 2/spl times/4 optical add-drop module (OADM) featuring no difference in propagation length. Four pairs of lensed fibers are aligned in "X" position, and four micromirrors are located between the pairs of optical fibers. The OADM was fabricated utilizing a silicon-on-insulator process. Electrostatic comb actuators can be driven up to 90 /spl mu/m to change the light path within 1 ms. The insertion loss and the on-off ratio were less than 3 and 70 dB, respectively. The loss uniformity in every channel was 1.5 dB.     

Mode Matching Analysis of a Tapered Coaxial Tip in a Parallel-Plate Waveguide

A tapered coaxial tip in a parallel plate waveguide is investigated. A boundary-value problem of electromagnetic scattering from a tapered coaxial monopole is solved rigorously based on the Fourier transform, eigenfunction expansion, and mode matching. Scattering parameters are represented in a series and computed to understand the behavior of the scattering in terms of the coaxial tip geometry.     

Optimal and reinforced robustness designs of fuzzy variable structure tracking control for a piezoelectric actuator system

In this paper, a piezoelectric actuator (PEA) system is approximated by N subsystems, which are described by pulse transfer functions. The approximation error between the PEA system and the fuzzy linear pulse transfer function system is represented by additive nonlinear time-varying uncertainties in every subsystem. First, a dead-beat to the switching surface for every ideal subsystem is designed. It is called the "variable structure tracking control". The output disturbance of the ith subsystem is caused by the approximation error of fuzzy-model and the interaction dynamics resulting from other subsystems. In general, it is not small. Then, the H/sup /spl infin//-norm of the sensitivity function between the switching surface and the output disturbance is minimized. It is the "optimal robustness". Although the effect of the output disturbance is attenuated, a better performance can be reinforced by a switching control which is based on the Lyapunov redesign. This is the final step for the robustness design of control, which is "reinforced robustness". The stability of the overall system is verified by Lyapunov stability theory. Experimental work of a PEA system was carried out to confirm the validity of the proposed control.