Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

Einfluß der Korngröße auf mechanische Eigenschaften und den ungeschmierten reversierenden Gleitverschleiß von Al2O3-Keramik

Influence of grain size on mechanical properties and dry oscillating sliding wear of Al₂O₃-ceramics Specimens with average grain sizes varying between about 0.8 μm and 12 μm were produced by cold isostatic pressing of high purity Al₂O₃-powder followed by sintering between 1300°C and 1700°C. Hardness, Young's modulus, bending strength and fracture toughness were measured as a function of average grain sizes. Tribological tests were carried out on the different microstructures at normal laboratory air and room temperature by using a ring-on-block tribometer. Experimental results showed the dependence of mechanical properties on grain size, hardness and bending strength obeying a Hall-Petch type relation, approximately. Coefficient of friction was relatively independent of grain size under the test conditions used. However, wear intensity increased substantially if a critical grain size was surpassed. This was due to a change in mechanisms of material removal which was confirmed by scanning electron microscopical studies of the worn surfaces.     

The design of experiments when there are errors in all the variables

The Error-in-Variables Model (EVM) applies to a large class of problems in parameter estimation in which there is error in all the variables. This property makes it of more general applicability than the widely used technique of ordinary Least Squares. While there is a voluminous literature on EVM there is nothing on a general method for designing experiments when EVM applies. In this paper we present an extension of the concept of D-optimality to provide such a general method. It is illustrated by applying it to the estimation of copolymer reactivity ratios and to fitting an ellipse.     

Possibility of sewage and combined sewer overflow reuse with biological aerated filters.

The secondary effluent from municipal plants in Korea generally represents higher BOD with lower SS. Therefore, more soluble forms of organics and NH4-N need to be removed to improve its effluent for reuse. In this study reuse possibility of secondary effluent and CSO (combined sewer overflow) using BAF (biological aerated filter) was evaluated. The tertiary application with 1.2 h EBCT, SS, BOD and COD showed stable concentrations less than 1.3, 1.3 and 6.2 mg/L, respectively. Nitrogen could be nitrified even at 7 degrees suggesting BAF can be used for a water reuse method as well as an effective add-on facility in cold regions. However, BAF was not stable with CSO application at increased flow rates suggesting CSO must be equalised prior to application. Disinfection was necessary even during normal weather conditions.     

Patterns of knowledge production: The case of information and telecommunication sector in Korea

In recent years, the topic of knowledge production has been widely investigated in the advanced countries. However, the process by which knowledge is produced in the developing countries has not been fully explored or characterized. In Korea, the science and engineering fields strongly reflect systems of knowledge production in the universities and demonstrate the dynamics of systems of innovation for knowledge production. Through using a case study including data for knowledge production, in the field of information and telecommunication, the following general trends were observed. Firstly, there has been a trend towards increasing the capabilities for knowledge production, via domestic and foreign collaboration. Secondly, there has been an increasing trend towards the diversification of knowledge sources such as university-industry, and university-public research institutes. Finally, the establishment of a nation's knowledge base is influenced by governmental research and development policies. This revised version was published online in August 2006 with corrections to the Cover Date.     

On-line dead-time compensation method using disturbance observer

A new on-line dead-time compensation method for a permanent magnet (PM) synchronous motor drive is proposed. Using a simple disturbance observer without any additional circuit and off-line experimental measurement, disturbance voltages in the rotor reference dq frame caused by the dead time and nonideal switching characteristics of power devices are estimated in an on-line manner and fed to voltage references in order to compensate the dead-time effects. The proposed method is applied to a PM synchronous motor drive system and implemented by using software of a digital signal processor (DSP) TMS320C31. Simulations and experiments are carried out for this system and the results well demonstrate the effectiveness of the proposed method.     

Semiconductor optical amplifier for CWDM operating over 1540-1620 nm

A semiconductor optical amplifier was developed for coarse wavelength-division-multiplexing (CWDM) operating over 1540-1620 nm (C-L band). A unique quantum-well structure was designed to meet the requirements for the CWDM operation such as wide bandwidth, low polarization-dependent gain, and high-saturation power at the short wavelength end of the band (1540 nm). Over the band, 24-dB maximum chip gain was obtained with less than 4.3-dB gain flatness and more than 14.6-dBm saturation power.     

Characteristics of nitrogen and phosphorus removal in SBR and SBBR with different ammonium loading rates

Laboratory scale experiments were conducted to study the deterioration of enhanced biological phosphorus removal (EBPR) due to influent ammonium concentration, and to compare the performance of two types of sequencing batch reactor (SBR) systems, a conventional SBR and sequencing batch biofilm reactor (SBBR). Both in SBR and SBBR, the total nitrogen removal efficiency decreased from 100% to 53% and from 87.5% to 54.4%, respectively, with the increase of influent ammonium concentration from 20 mg/l to 80 mg/l. When the influent ammonium concentration was as low as 20 mg/l (C: N: P=200: 20: 15), denitrifying glycogen-accumulating organisms (DGAOs) were successfully grown and activated by using glucose as a sole carbon source in a lab-scale anaerobic-oxic-anoxic (A₂O) SBR. In the SBR, due to the effect of incomplete denitrification and pH drop, the nitrogen and phosphorus removal efficiency decreased from 77% to 33.3% when the influent ammonium concentration increased from 20 mg/l to 80 mg/l. However, in the SBBR, simultaneous nitrification/denitrification (SND) occurred, and the nitrification rate in the aerobic phase did not change remarkably in spite of the increase in influent ammonium concentration. Phosphorus removal was not affected by the increase of influent ammonium concentration.     

Equilibrium and crystallographic measurements of the binary tetrahydrofuran and helium clathrate hydrates

Clathrate compounds are crystalline materials formed by a physical interaction between host and relatively light guest molecules. Various types of nano-sized cages surrounded by host frameworks exist in the highly unique crystalline structures and free guest molecules are entrapped in an open host-guest network. Recently, we reported two peculiar phenomena, swapping and tuning, naturally occurring in the hydrate cages. Helium, one of the smallest light guest molecules, must be the challengeable material in the sense of physics and moreover possesses versatile applications in the field of superconductivity technology and thermonuclear industry. In this regard, we attempted for the first time to synthesize helium hydrates at moderate temperature and pressure conditions. According to inclusion phenomena, helium itself normally cannot form clathrate hydrates due to being too small molecularly without the help of hydrate former molecules (sI, sII, and sH formers). In this study, the hydrate equilibria of the binary clathrate hydrate containing tetrahydrofuran, helium, and water were determined at 2, 3, 5.56 THF mol%. Direct volumetric measurements were also carried out to confirm the exact amount of helium captured in the hydrate cages. Finally, the crystalline structure of the formed mixed hydrates was identified by powder X-ray diffraction, resulting in structure II.