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21.
Uraoka Y. Eriguchi K. Tamaki T. Tsuji K. 《Semiconductor Manufacturing, IEEE Transactions on》1994,7(3):293-297
Gate oxide damage by plasma processing was evaluated using structures with various antenna lengths. The gate oxide damage by plasma processing was found to be monitored quantitatively by measuring the charge to breakdown, QBD. From the QBD measurements, we have confirmed that the degradation occurs during overetching, not in main etching. Plasma current was calculated from the decrease of QBD during the etching. The breakdown spot in the gate oxide was detected by photon emission and TEM. The LOCOS structure plays an important role for the degradation by plasma damage. In this paper, it is demonstrated that the QBD method is effective for realizing a highly reliable process against plasma damage 相似文献
22.
Hiroyuki Miki Takanori Takeno Toshiyuki Takagi Alexei Bozhko Mikhail Shupegin Hideya Onodera Takao Komiyama Takashi Aoyama 《Diamond and Related Materials》2006,15(11-12):1898
Superconductivity in a tungsten-containing carbon-oxide film was reported. The film with 500 nm thickness was deposited onto polycrystalline silicon oxides using chemical vapor deposition and the co-sputtering of a tungsten metal target. The bonding state of the carbon atoms and the macroscopic and microscopic crystal structure of the film were investigated by Raman spectroscopy, X-ray diffraction and transmission electron microscopy measurements. From the experimental results, we determined that this film essentially had an amorphous structure. The temperature dependence on resistivity was measured in the temperature range of 2–300 K. Resistive superconducting transition was observed at 3.8 K. The dc magnetizations were measured in the temperature range of 1.8–6.5 K. The diamagnetism resulting from a superconductive state was observed below 3.75 K, which is consistent with a resistive superconducting transition. It is thought that the finite sized clusters of the different superconductive transition temperatures cooperatively produce a macroscopic superconducting phenomenon. 相似文献
23.
本文采用粒子追踪理论对水平管中粒子流动状态进行了数值模拟.文中提出了一种新的粒子碰撞模型,并忽略粒子的旋转和扬力,仅考虑气流阻力和重力对粒子的影响,在输送量为9.13×10~3kg/s,混合比约0.3的条件下,通过数值计算得知:由于粒子间的碰撞,使得异径粒子的速度趋向平均化;粒子间的碰撞是粒子悬浮的原因之一;粒子的浓度沿管轴向是随时间而发生变化的. 相似文献
24.
Optical frequency-shift-keying (FSK) signals are obtained from directly modulated distributed feedback (DFB) semiconductor lasers. Experimental studies of the direct frequency modulation (FM) characteristics of the DFB lasers show a nonuniform FM response due to the competing effects of thermal modulation of the laser active region and carrier density modulation. Equalization of the signal current to the laser is employed to produce a flat FM response from 30 kHz to 1 GHz. Optical FSK transmission and heterodyne detection experiments at 560-Mbit/s and 1-Gbit/s are conducted at a wavelength of 1497 nm. Receiver sensitivities of -39 dBm at 560 Mbit/s and -37 dBm at 1 Gbit/s are obtained. Transmission through 100 km of single-mode fiber at 1 Gbit/s is achieved with no degradation in receiver sensitivity. 相似文献
25.
Tsutomu Takeichi Yuki Saito Tarek Agag Hiroyuki Muto Takehiro Kawauchi 《Polymer》2008,49(5):1173-1179
Two series of high-performance polymer alloys were prepared by mixing typical benzoxine monomers, 3-phenyl-3,4-dihydro-2H-1,3-benzoxazine (P-a) or 6,6-(1-methylethyliden)-bis-(3,4-dihydro-3-phenyl-2H-1,3-benzoxazine) (B-a), with a typical bismaleimide, 4,4-bismaleimidodiphenyl methane by various ratios followed by thermal treatment up to 240 °C. DSC and IR of the alloys were examined to follow the curing reaction. These analyses showed that the obtained polymer alloys are AB co-cross-linked polymer networks through the formation of ether linkage between the hydroxyl group of polybenoxazine and the double bond of bismaleimide. Viscoelastic analysis and softening temperature measurement revealed that the polymer alloys have much higher glass transition temperatures than those of each homopolymer. The thermal stability also increased with the increase of bismaleimide content as evidenced by TGA. 相似文献
26.
An endo-beta-N-acetylglucosaminidase specific for plant glycoprotein oligosaccharides was purified from the culture fluid of a fungus. The Mr of the purified enzyme was 89,000. This enzyme was stable at pH 5.5-7.0, up to 30 degrees C, and showed the highest activity at pH 6.0. Among sugar chains tested, xylose-containing sugar chains (M3X, M3FX, and M2FX) were the most favored substrates. Oligomannose type (M3, M5, and M9) and hybrid type (GNM3) sugar chains were hydrolyzed much more slowly than xylose-containing sugar chains, and a complex type sugar chain (GN2M3) was not hydrolyzed at all by the enzyme. Moreover, the enzyme released sugar chains from native horseradish peroxidase and stem bromelain, which were not hydrolyzed by other endo-beta-N-acetylglucosaminidases (Endo H, D, and F). The enzyme could transfer the xylose-containing sugar chain from bromelain to DNS-Asn-GlcNAc-Fuc. 相似文献
27.
The critical conditions in which the classical Flory-Stockmayer gelation theory (F-S theory) is applicable to monovinyl-divinyl copolymerizations were pursued in detail. The resulting prepolymers or precursors of ideal crosslinked-polymers were characterized as standard polymers for the discussion of network formation in free-radical monovinyl-divinyl copolymerizations. Methyl methacrylate was copolymerized with a small amount of ethylene dimethacrylate, butylene dimethacrylate or nonapropyleneglycol dimethacrylate in the presence of lauryl mercaptan, a chain transfer agent to reduce the occurrence of a thermodynamic excluded volume effect and intramolecular crosslinking as the primary and secondary factors, respectively, for the greatly delayed gelation in the free-radical monovinyl-divinyl copolymerizations and, moreover, to keep the primary chain length constant by inhibiting a gel effect. The ratio of the actual gel point to the theoretical one reached 1.1, supporting the validity of F-S theory. The resulting prepolymers were subjected to SEC-MALLS analysis to determine the molecular weights, the molecular-weight distributions and the radii of gyration; the correlations of molecular weight vs. elution volume and radius of gyration vs. molecular weight were useful for the characterization of the precursors of ideal network-polymers. 相似文献
28.
Uraoka Y. Miyanaga I. Tsuji K. Akiyama S. 《Semiconductor Manufacturing, IEEE Transactions on》1993,6(4):324-331
A real-time failure analysis technique for ULSI circuits using photon emission is proposed. This technique utilizes a photon detection system combined with a circuit tester. Improved failure detection is achieved because the tester can bias arbitrary blocks in the ULSI chip. Detecting and correct process defects and design errors improves the reliability of the ULSI chip 相似文献
29.
Lampariello P. Frezza F. Shigesawa H. Tsuji M. Oliner A.A. 《Antennas and Propagation, IEEE Transactions on》1998,46(7):1032-1041
A new leaky-wave antenna is presented that possesses many desirable features and is suitable for application to both the millimeter-wave and microwave ranges. These desirable features, some of which are unusual, include a simple configuration, a wide flexibility in the range of available beamwidths, the ability to control the beamwidth and the direction of the beam essentially independently, and negligible cross polarization at all scan angles. The antenna structure consists of a parallel-plate stub guide of small height, less than a half wavelength, located off center on the top of rectangular waveguide. The beamwidth is easily controlled from very wide to very narrow by adjusting the stub width or location. The article presents the principle of operation and the theory, employing a new transverse equivalent network that is accurate, but also simple, so that it permits rapid and inexpensive numerical calculations 相似文献
30.
Complement activation generally does not occur on homologous cells. We observed C3 deposition on cultured human umbilical vein endothelial cells (HUVEC) when those which had died of apoptosis were treated with human serum. The C3 deposition on apoptotic HUVEC required Mg2+ but not Ca2+. In addition, the incubation of apoptotic HUVEC with purified C3, B, and D in the presence of Mg2+ resulted in C3 deposition. These results indicated that the C3 deposition on apoptotic HUVEC is mediated by the activation of the alternative complement pathway. C3 contains an intrachain thioester bond in the alpha chain (110 kDa) and upon activation to C3b, binds with membrane molecules by forming an ester or amide bond. Western blotting of reduced C3b-membrane molecule complexes, isolated from serum-treated apoptotic HUVEC by immunoprecipitation with anti-C3, revealed the covalent binding of C3b to several membrane molecules. Most of the C3b-membrane molecule complexes were cleaved by hydroxylamine, suggesting covalent binding via an ester bond. The molecular mass of the major alpha chain fragment released by hydroxylamine treatment was not 105 kDa but 68 kDa, which corresponds to the alpha 1 fragment of iC3b. These results indicate that most of the C3b on HUVEC was cleaved at its alpha' chain to yield iC3b, which consists of three disulfide-linked polypeptide chains and is a ligand of the complement receptor type 3 (CR3) of phagocytes. These results suggest that apoptotic HUVEC can activate the alternative pathway of the homologous complement and that the complement is related to the clearance of apoptotic cells by phagocytes. 相似文献