Elimination of extra spring effect at the step-up anchor ofsurface-micromachined structure

This paper describes the concept, analysis, fabrication, and testing of a new anchor for surface-micromachined beams. The anchor is designed to eliminate the extra spring effect at the step-up anchor common in conventional surface-micromachined beams, so that the boundary condition follows the ideal anchoring condition more accurately. The idea is to form a reinforcement hump at the beam anchor through a minor modification in the sacrificial-layer mask. No modification in the fabrication process is necessary. Formation of the reinforcement hump is tested using the multiuser MEMS Process (MUMP) foundry service at the Microelectronics Center of North Carolina (MCNC). The effectiveness of the new anchor is analyzed by finite-element analysis based on the actual anchor geometry obtained from the fabrication directly. Experimental verification is provided by making overhanging microcantilever pairs, one with the new anchor and the other with conventional, through MUMP's and postprocessing and comparing their frequency responses. Small-signal frequency response measurements are made with a modified Michaelson interferometer. Resonant frequency of a 2-μm-thick 300-μm-long polysilicon cantilever with the new anchor differed by less than 0.1% from the ideal anchor case. In comparison, the resonant frequency of the same beam with a conventional anchor is off by over 1%     

Manipulation of microenvironment with a built-in electrochemical actuator in proximity of a dissolved oxygen microsensor

Biochemical sensors for continuous monitoring require dependable periodic self diagnosis with acceptable simplicity to check its functionality during operation. An in-situ self-diagnostic technique for a dissolved oxygen microsensor is proposed in an effort to devise an intelligent microsensor system with an integrated electrochemical actuation electrode. With a built-in platinum microelectrode that surrounds the microsensor, two kinds of microenvironments, called the oxygen-saturated or oxygen-depleted phases, can be created by water electrolysis, depending on the polarity. The functionality of the microsensor can be checked during these microenvironment phases. The polarographic oxygen microsensor is fabricated on a flexible polyimide substrate (Kapton) and the feasibility of the proposed concept is demonstrated in a physiological solution. The sensor responds properly during the oxygen-generating and oxygen-depleting phases. The use of these microenvironments for in-situ self-calibration is discussed to achieve functional integration, as well as structural integration, of the microsensor system.     

On-line dead-time compensation method using disturbance observer

A new on-line dead-time compensation method for a permanent magnet (PM) synchronous motor drive is proposed. Using a simple disturbance observer without any additional circuit and off-line experimental measurement, disturbance voltages in the rotor reference dq frame caused by the dead time and nonideal switching characteristics of power devices are estimated in an on-line manner and fed to voltage references in order to compensate the dead-time effects. The proposed method is applied to a PM synchronous motor drive system and implemented by using software of a digital signal processor (DSP) TMS320C31. Simulations and experiments are carried out for this system and the results well demonstrate the effectiveness of the proposed method.     

Extraction of penicillin G from simulated media by an emulsion liquid membrane process

The extraction of penicillin G from simulated media was performed by water/oil/water (w/o/w) emulsion liquid membranes (ELMs) and studied under various operational conditions in a batch system. The degree of extraction achieved was between 80% and 95% under specific conditions. A concentration of greater than nine times the initial concentration of penicillin G in the external phase was obtained in the internal phase. The pH of the internal aqueous solution, containing a basic salt, was theoretically calculated on the basis of the amount of penicillin G transported into the internal phase. The calculated results agreed with the experimental data well and were used to select a suitable type and concentration of a basic salt in the internal phase to give a pH within the range 5 to 8 where penicillin G was stable after the termination of extraction. The extraction of penicillin G was successfully performed by the ELM process with sodium carbonate in the internal phase.     

Deactivation of copper-ion-exchanged hydrogen-mordenite-type zeolite catalyst by SO2 for no reduction by NH3

Deactivation of copper-ion-exchanged hydrogen-mordenite-type zeolite catalyst by SO₂ for NO reduction by NH₃ was examined in a fixed-bed flow reactor. The deactivation of the catalyst was strongly dependent on reaction temperature. At high reaction temperatures over 300°C, the catalyst did not lose its initial activity up to 50 h of operation, regardless of SO₂ feed concentration from 500 to 20,000 ppm. However, at low reaction temperatures near 250°C, apparent deactivation did occur. Changes in the physicochemical properties such as surface area and sulfur content of deactivated catalyst well correlated with catalyst activity, depending upon reaction temperatures. The deactivation was due to pore blocking and/or filling by deactivating agents, which plugged and/or filled the pores of catalyst. The deactivating agents deposited on the catalyst surface were presumed to be (NH₄)₂SO₄ and/or (NH₄)HSO₄ from the results of TGA and ion-chromatography measurement.     

Using thermally stimulated currents to find defective capacitors

BaTiO₃ multilayer capacitors with a nominal capacitance of 3.5nF have been carefully measured using the thermally stimulated current (TSC) technique. When a 300V polarization voltage is applied at room temperature, a new TSC peak appeared in defective sample A after it has been immersed in water. No new peak was found in good-quality sample B after a similar treatment. The accelerated life test shows that sample A hasa much shorter life than sample B in terms of insulation resistance.     

RE／S值对控轧低碳Mn－Nb－RE钢硫化物成分和形貌的影响

用扫描电镜测定了含０．０４１％～０．０７６％ＲＥ的低碳Ｍｎ－Ｎｂ－ＲＥ钢中硫化物的成分、大小和形貌。ＲＥ／Ｓ值为２．８～３．０时，钢中的硫化物充分变质。     

精馏塔静态仿真：Ⅰ.静动态混合数学模型的应用

本文为了克服精馏塔静态仿真不易收敛和初值难以给定等难题，巧妙地利用隐含数值积分方法的特点，将稳态与动态数学模型耦合起来，用以求解高难度的非理想精馏塔静态仿真问题。所得静动态混俣模型大大提高了精馏塔静态仿真的鲁棒性，对于高度非理想精馏塔的仿真尤为有效。通过对某丙烯腈萃取精馏塔的静态仿真，充分证明了这种混合模型化方法的可行性。