An output-based adaptive iterative learning controller for high relative degree uncertain linear systems

In this paper, we derive an output tracking error model based on signals filtered from plant input and output, and then present a new output-based adaptive iterative learning controller for repeatable linear systems with unknown parameters, high relative degree, initial resetting error, input disturbance and output noise. The proposed controller solves the important robustness issues without assuming the bounds of uncertainties to be sufficiently small and can be applied to high relative degree plants without using output differentiation. Control parameters are updated between successive iterations so as to compensate for unknown system parameters and uncertainties. It is shown that the internal signals inside closed-loop learning system remain bounded and the output tracking error will asymptotically converge to a profile tunable by some design parameters. Furthermore, the learning speed is easily improved if the learning gain is increased.     

The high‐speed measurement of a partial area imaging system applied to photoresist development processing

Abstract

Among the parameters that affect photolithography, the most important are exposure and development time which affect the coating photoresist characteristics. This study further researches the relationship between the exposure and development time using a high speed image inspection system, and the relationship between the development time and photoresist depth using a Scanning Probe Microscope (SPM). A partial scan CCD camera and high speed frame capture card were used to obtain the photoresist development processing parameters. The experimental results verified that this imaging system provides an economical and effective method for producing a micro‐photo‐etched product. It is expected that these experiments can also offer some good references useful in the micro electro mechanical industrial field.     

Efficient development of cycle time response surfaces using progressive simulation metamodeling

In semiconductor manufacturing, hot lots are to provide marketing and engineering with extra flexibility regarding delivery lead times, and in turn enhance its competitive advantages against other companies. On the other hand, hot lots are among major sources of disruption of the smoothness of the manufacturing flow. They can lead to a significant increase of cycle time of normal lots, and in turn result in delayed delivery times and serious service deteriorations. Due to the complex nature of semiconductor manufacturing, evaluating the impact of hot lots on the cycle time of normal lots presents major challenges. In this paper, we propose a methodology, called progressive simulation metamodelling (PSM), that allows for an efficient development of the response surface between the cycle time of normal lots and the percentage of hot lots in semiconductor manufacturing. The response surface generated by the proposed PSM is like an easy-to-use analytical model, but with the fidelity of simulation that takes into account all important manufacturing details. The specially-designed mechanisms, including identifying the critical region and sequentially adding design points in the critical region, further grants PSM computational advantages compared to the traditional response surface method. An empirical study conducted in collaboration with a semiconductor company validates the viability of PSM in real settings.     

Temperature and voltage sensings by mode‐mode interference in polarization‐maintaining optical fibers

Abstract

Two optic fiber sensing systems for temperature and voltage have been developed which utilize the mode‐mode interference of the two orthogonally polarized modes, HE^x _II and HE^y _II, in two commencal polarization‐maintaining fibers (bow‐tie and elliptical core fibers). A package of controlled programs in a Macintosh computer, which can record and process all related data automatically, is established for temperature sensing. The signal drifting problem in voltage sensings has been investigated, and the elimination of signal drifting is obtained by the phase tracking with direct current technology The agreement between the sensing results for temperature and dynamic voltage and those predicted by experimental principles is satisfactory, which confirms the validity of the developed sensing systems.     

A study on the formation of a measurement scale for the environmental quality of Taiwan’s long-term care institutions by the Delphi method

This study used a two-round modified Delphi technique with a questionnaire survey in order to reach a consensus for the questionnaire; the survey was conducted from September to December 2009. The six indicators for the environmental quality of long-term care institutions in Taiwan are (1) indoor environmental quality, (2) safety equipment for the prevention and management of disasters occurring in residents?? daily lives, (3) provision for assistive devices for residents?? daily use, (4) provision for privacy and individualized space, (5) provision for comfortable and decorated indoor environments, and (6) provision for social interaction space. The scale included 34 items with an acceptable number of panel members and acceptable construct validity. Panel members all highly approved of Indicators 1, 2, and 6. Although they approved of Indicator 3, they suggested that caregivers at institutions should replace the functions of living assistive devices. They approved of Indicator 5; however, they questioned the method for providing comfortable and decorated environments. They approved of Indicator 4; however, they suggested that private space need not be provided in the living room of the institution. In terms of long-term care institution environments in Taiwan, Indicators 1, 2, and 6 were important for protecting residents?? physical and psychological well-being and improving their social interactions. Indicator 3, although important, could be directly replaced by caregivers. Indicator 5 required more implementation methods, while Indicator 4, the living room of the institution, was considered unnecessary.     

Large-area TiO2 nanotube dye-sensitized solar cells using thermal-sprayed Ti layers on stainless steel

This work presents large-scale dye-sensitized solar cells and methods for their manufacture. A dye-sensitized solar cell device contains a photosensitive dye adsorbed on a large surface of the anode, and a transparent conductive cathode disposed opposite the anode, wherein platinum nano-catalytic particles adhere to its surface, and an electrolytic solution is sealed between the anode and the transparent conductive cathode. A titania nanotube film was fabricated by thermo-spraying titanium film on 304 stainless-steel substrate. The photo-current conversion efficiency was tested under an AM 1.5 solar simulator. The dye-sensitized solar cell device has a short current density of 8.22 mA cm^–2, open voltage of 0.71 V, fill factor of 0.59, and conversion efficiency of 3.4%. The internal impedance of the dye-sensitized solar cell was detected and simulated using an electrical impedance spectra technique with inductance, resistance, and capacitance characteristics. The stainless-steel/titania, titania/electrolyte, electrolyte, and electrolyte/(platinum/indium tin oxide) interfaces were simulated using an resistor–capacitor parallel circuit, and bulk materials such as stainless steel, tin doped indium oxide, and conducting wire were simulated by using a series of resistors and inductance.     

Influence of chemisorption on the thermal conductivity of graphene nanoribbons

The thermal conductivity of graphene nanoribbons (GNRs) functionalized by the chemical attachment of methyl and phenyl groups at random positions is calculated using reverse nonequilibrium molecular dynamics. The GNRs exhibit a rapid drop in thermal conductivity with increasing degree of functionalization; a functional group coverage regime of as little as 1.25% of GNR atoms reduces the thermal conductivity by about 50%. The thermal conductivity of nanoribbons with zigzag edges is more sensitive in the degree of functionalization than nanoribbons with armchair edges. The simulation results indicate that the rapid drop in thermal conductivity is a consequence of the higher angular momentum of functional groups, which rotate the unsupported sp³ bonds and thus reduce the phonon mean free paths.