Systematic characterization of Cl2 reactive ion etchingfor improved ohmics in AlGaN/GaN HEMTs

Pre-metal-deposition reactive ion etching (RIE) was performed on an Al_0.3Ga_0.7N/AlN/GaN heterostructure in order to improve the metal-to-semiconductor contact resistance. An optimum AlGaN thickness for minimizing contact resistance was determined. An initial decrease in contact resistance with etching time was explained in terms of removal of an oxide surface layer and/or by an increase in tunnelling current with the decrease of the AlGaN thickness. The presence of a dissimilar surface layer was confirmed by an initial nonuniform etch depth rate. An increase in contact resistance for deeper etches was experienced. The increase was related to depletion of the two-dimensional (2-D) electron gas (2-DEG) under the ohmics. Etch depths were measured by atomic force microscopy (AFM). The contact resistance decreased from about 0.45 Ωmm for unetched ohmics to a minimum of 0.27 Ωmm for 70 Å etched ohmics. The initial thickness of the AlGaN layer was 250 Å. The decrease in contact resistance, without excessive complications on device processing, supports RIE etching as a viable solution to improve ohmic contact resistance in AlGaN/GaN HEMTs     

Announcement

Samples of nine different fruits grown in Oyo State of Nigeria were obtained from different market locations within Ibadan Municipality and analysed for their vitamin C content. Sweet orange was found to contain the highest amount of vitamin C ($\text{56·0}\text{mg}\text{100}\text{g}$ edible portion) whilst sweet banana variety II contained the lowest amount ($\text{9·4}\text{mg}\text{100}\text{g}$ edible portion). Lime, grapefruit, pawpaw and ‘agbalumo’ were found to contain considerable amounts of vitamin C, having 46·5, 47·0, 43·2 and $\text{48·0}\text{mg}\text{100}\text{g}$ respectively. Consumption of these fruits would thus meet the nutritional requirement for vitamin C in this part of Nigeria. It is also recommended that sweet orange, agbalumo, grapefruit, lime and pawpaw, found to contain considerable amounts of vitamin C, should be processed either at home or factory level to make them available to the people all year round.     

Constant thrust programming for a multistage rocket flown in vacuum with a given initial/final thrust-to-weight ratio in an arbitrary stage

The burn time and burnout velocity of a multistage rocket flown vertically in vacuum with constant thrust tangential to the flight path and a prescribed initial/final thrust-to-weight ratio in an arbitrary stage have been determined. The present paper also deals with optimal staging under given conditions of flight.     

A STUDY OF THE PRIMARY PHASE OF FOOD FREEZE-DRYING IN VACUO

In the development of a novel freeze-drying technique in a fluidized bed at atmospheric pressure, a parallel study was undertaken using a conventional vacuum equipment. Two kinetically distinct phases were observed during freeze drying of representative Pood samples:

(1) a period during which the rate of drying was constant and (2) a second period during which the drying rate sufferedcontinual reduction. This paper focused attention on the primary drying period which corresponded with the kinetics of sublimation of pure     

Measurement of the delayed-neutron yields in the fission of233U,236U,237Np,240Pu,and241Pu by neutrons from the spectrum of a fast reactor

Translated from Atomnaya Énergiya, Vol. 66, No. 2, pp. 100–103, February, 1989.     

测定钠中杂质的手动阻塞计的研究

文章介绍了测定钠中杂质浓度的手动阻塞计的原理、装置和实验结果。为了减少测量误差,我们研究了影响准确测定阻塞温度的因素,并且找到了减少测量误差的办法。在同样的杂质饱和温度下,该阻塞计测得的高、低阻塞温度所对应的杂质浓度差是很接近的。对氧其差值为1.03ppm;对氢为0.0763ppm。