Low temperature wafer direct bonding

A pronounced increase of interface energy of room temperature bonded hydrophilic Si/Si, Si/SiO₂, and SiO₂/SiO ₂ wafers after storage in air at room temperature, 150°C for 10-400 h has been observed. The increased number of OH groups due to a reaction between water and the strained oxide and/or silicon at the interface at temperatures below 110°C and the formation of stronger siloxane bonds above 110°C appear to be the main mechanisms responsible for the increase in the interface energy. After prolonged storage, interface bubbles are detectable by an infrared camera at the Si/Si bonding seam. Desorbed hydrocarbons as well as hydrogen generated by a reaction of water with silicon appear to be the major contents in the bubbles. Design guidelines for low temperature wafer direct bonding technology are proposed     

The design, fabrication, and testing of corrugated silicon nitridediaphragms

Silicon nitride corrugated diaphragms of 2 mm×2 mm×1 μm have been fabricated with 8 circular corrugations, having depths of 4, 10, or 14 μm. The diaphragms with 4-μm-deep corrugations show a measured mechanical sensitivity (increase in the deflection over the increase in the applied pressure) which is 25 times larger than the mechanical sensitivity of flat diaphragms of equal size and thickness. Since this gain in sensitivity is due to reduction of the initial stress, the sensitivity can only increase in the case of diaphragms with initial stress. A simple analytical model has been proposed that takes the influence of initial tensile stress into account. The model predicts that the presence of corrugations increases the sensitivity of the diaphragms, because the initial diaphragm stress is reduced. The model also predicts that for corrugations with a larger depth the sensitivity decreases, because the bending stiffness of the corrugations then becomes dominant. These predictions have been confirmed by experiments. The application of corrugated diaphragms offers the possibility to control the sensitivity of thin diaphragms by geometrical parameters, thus eliminating the effect of variations in the initial stress, due to variations in the diaphragm deposition process and/or the influence of temperature changes and packaging stress     

Flexible, dry-released process for aluminum electrostatic actuators

We present an all-aluminum MEMS process (Al-MEMS) for the fabrication of large-gap electrostatic actuators with process steps that are compatible with the future use of underlying, pre-fabricated CMOS control circuitry. The process is purely additive above the substrate as opposed to processes that depend on etching pits into the silicon, and thereby permits a high degree of design freedom. Multilayer aluminum metallization is used with organic sacrificial layers to build up the actuator structures. Oxygen-based dry etching is used to remove the sacrificial layers. While this approach has been previously used by other investigators to fabricate optical modulators and displays, the specific process presented herein has been optimized for driving mechanical actuators with relatively large travels. The process is also intended to provide flexibility for design and future enhancements. For example, the gap height between the actuator and the underlying electrode(s) can be set using an adjustable polyimide sacrificial layer and aluminum “post” deposition step. Several Al-MEMS electrostatic structures designed for use as mechanical actuators are presented as well as some measured actuation characteristics     

MULTIMEDIA NETWORKING A Leading-Edge Communication Technology

The realization of digital multimedia's full business potential requires networking. This article discusses the value-added benefits to the corporation of networked multimedia as well as the choice of architectures and technologies needed to deliver multimedia networking solutions.     

PROBLEM-SOLVING SUPPORT FOR TQM A Hypertext Approach

New IS technology is contributing to continuous quality improvement throughout the organization. Hypertext and hypermedia offer new ways for decision makers to gain easy and relevant access to information. By combining hypertext with total quality tools, decision makers are able to explore the richness of data bases in more creative and useful ways. This article describes how you can develop a hypertext system that can help employees improve their job performance through better problem solving.     

UTEC and Ferut: the University of Toronto's computation centre

Although not well known, the University of Toronto had a very early computer-development program and in 1952 was one of the first few institutions with an operable computer in North America. This article describes the university's initial attempt to build the UTEC computer and how it acquired the pioneering Ferut machine     

Multicriterion differential games

Translated from Kibernetika i Sistemnyi Analiz, No. 1, pp. 24–33, January–February, 1994.     

Comments on “Editorial: fuzzy models-what are they andwhy?”

In the editorial by J.C. Bezdek (ibid., p.1), an example is presented to demonstrate differences between fuzzy membership and probability. The authors argue that probability can be used in a way much more closely analogous to this use of fuzzy membership, weakening the argument for the latter     

Fuzzy controller design by using neural network techniques

This paper investigates the relationship between the piecewise linear fuzzy controller (PLFC), in which the membership functions for fuzzy variables and the associated inference rules are all in piecewise linear forms, and a Gaussian potential function network based controller (GPFNC), in which the network output is a weighted summation of hidden responses from a series of Gaussian potential function units (GPFU's). Systematic procedures are proposed for transformation from a PLFC to its GPFNC counterpart, and vice versa. Based on these transformation principles, a series of systematic and feasible steps is presented for the design of an optimized PLFC (PLFC*) by using neural network techniques. In the design procedures, the simplified PLFC is used as the initial controller structure, then a GPFNC, which gives the approximate control response to the initially given PLFC, is found for further optimization. A neutralization process is used to demonstrate the feasibility and the potential applicability of these intelligent controllers on the regulation of highly nonlinear chemical processes     

A semantic modeling approach for image retrieval by content

We introduce a semantic data model to capture the hierarchical, spatial, temporal, and evolutionary semantics of images in pictorial databases. This model mimics the user's conceptual view of the image content, providing the framework and guidelines for preprocessing to extract image features. Based on the model constructs, a spatial evolutionary query language (SEQL), which provides direct image object manipulation capabilities, is presented. With semantic information captured in the model, spatial evolutionary queries are answered efficiently. Using an object-oriented platform, a prototype medical-image management system was implemented at UCLA to demonstrate the feasibility of the proposed approach.