Swords to plowshares: Shock wave applications to advanced lithography

xtreme ltra iolet ithography (EUVL) seeks to apply radiation in a wavelength region centered near 13 nm to produce microcircuits having feature sizes 0.1 micron or less. A critical requirement for the commercial application of this technology is the development of an economical, compact source of this radiation which is suitable for lithographic applications. A good candidate is a laser-plasma source, which is generated by the interaction of an intermediate intensity laser pulse (up to 10¹² W/cm²) with a metallic target. While such a source has radiative characteristics which satisfy the needs of an EUVL source, the debris generated during the laser-target interaction strikes at the economy of the source. Here, we review the use of concepts and computer modeling, originally developed for hypervelocity impact analysis, to study this problem.     

Densification of plasma deposited silicon nitride films by hydrogen dilution

The effects of hydrogen dilution on the bonding characteristics, composition, and properties of SiN films deposited from a SiH₄/NH₃ mixture by r.f. plasma enhanced chemical vapor deposition were studied. The addition of relatively small amounts of hydrogen increased the Si/N ratio resulting in a corresponding increase in the Si---H/N---H bonding ratio. At higher hydrogen dilutions, the Si/N ratio decreased towards stoichiometric with significant changes in the hydrogen bonding characteristics. Changes in the physical properties are discussed in terms of the measured changes in bonding structure. Changes normally associated with changes in bulk film density were found to be well correlated to the Si---N bond density. The effects of substrate temperature and NH₃/SiH₄ ratio on films deposited under conditions of high hydrogen dilution were similar to those widely reported in the literature for plasma-enhanced chemical vapor deposition films deposited without hydrogen. Films deposited by remote plasma using hydrogen as the excitation exhibited high Si---N bond densities and low hydrogen. Experiments are planned to clarify the mechanism responsible for the observed changes in film properties.     

Use of Explosives on The Moon

The utilization of explosives for excavation on the lunar surface is under serious consideration as a part of the design for construction of temporary and permanent bases. An excavation research program has shown that small‐scale explosives blasting in a lunar‐soil simulant will greatly reduce the digging forces required for scoop and dragline excavators. Some crater‐blasting parameters were determined for the lunar soil simulant at one Earth gravity and at 10 Earth gravities using a centrifuge. The size of the craters produced at 10 Earth gs matched those formed at one earth g by scaling according to the weight of the explosive. These data can be applied to explosive‐excavation problems such as habitat construction, burial of nuclear power sources, and the rapid construction of shelters remote from the main base to shield against solar‐flare activity.     

Genetic influences on job satisfaction: A reply to Cropanzano and James.

Responds to the points made by R. Cropanzano and K. James (see record 1991-00462-001) concerning the article by R. D. Arvey et al (1989). The authors acknowledge that the Arvey et al study is based on a single design, makes use of a small and special sample, and, as such, is vulnerable to threats of internal and external validity. Nevertheless, after providing a more comprehensive conceptual and empirical context for the study, and after reviewing a number of the issues raised by Cropanzano and James, the authors conclude that it is not premature to accept the idea that work attitudes are partially genetically influenced. Indeed, the authors use behavioral genetic theory, together with data gathered in the Arvey et al study, to make specific point predictions regarding the outcomes of an array of studies that easily can be undertaken. Finally, the authors acknowledge that the comments and issues raised by Cropanzano and James, along with the interchange, can offer directions for future research in this important area. (PsycINFO Database Record (c) 2010 APA, all rights reserved)     

Evolution of the capillary network in a reactive powder concrete during hydration process

Ultrasonic waves in echographic mode, combined with autogenous shrinkage measurements, were used to study the evolution of the capillary network of reactive powder concrete (RPC) from the time after the mixing. Two characteristic porous classes have been identified: the first, between 10 and 20 nm, begins when the material reaches its solid hyperstatic state, and the second about 1 or 2 nm. The first class is associated with the porous space between the C-S-H hydrate clusters and the second with the internal porosity of the hydrate. The evolution of the active capillary radius as a function of the degree of hydration allows us to understand the strong interaction between the capillary network size and the chemical activity given by the dissipated calorimetric power curve. Indeed, the maximum point of the chemical activity marks the transition of the first class of pores to the second one. Finally, measurements of electrical conductivity through RPC samples show that after the maximum of the dissipated power, the curve of this electrical conductivity presents the same evolution as the capillary radius. As the electrical conductivity clearly depends on the evolution of the capillary network, the similarity between the results confirms our analysis in pore classes.