Cylindrical coils created with 3D X-ray lithography and metallization

The demand for microactuators is increasing recently. The key technology to realizing practical microactuators is microfabrication process. In the production of microminiature components, the technologies for processing high-aspect-ratio structures are essential. As one of these technologies, the LIGA process is widely known. Our laboratory researches the LIGA process to three-dimensional microfabrication and established the cylindrical-microcoil production process. In this paper, we have fabricated the cylindrical-microcoil for the solenoidal electromagnetic type microactuator. We designed and analyzed microactuators, and fabricated and evaluated microactuator coils produced by the combination of three-dimensional X-ray lithography and level copper plating. We succeeded in creating threaded groove-shaped structures with 10 μm line width, 20 μm pitch, and aspect ratio of 5 on the surface of an acrylic pipe by means of three-dimensional X-ray lithography. As a measure to suppress void generation, which is one of the shortcomings of electrolytic plating processes, the sputtering apparatus and plating equipment were improved, a pretreatment process was additionally provided, and the actual electrolytic plating method was improved. As a result, a void-free metallic deposit could be formed on a thin coil line. The processing technology enables the formation of thin-wire coil lines whose current paths feature a large allowable current-carrying capacity, enabling the production of miniature, high-output microactuators.     

Fabrication of large area diffraction grating using LIGA process

X-ray imaging is a very important technology in the fields of medical, biological, inspection, material science, etc. However, it is not enough to get the clear X-ray imaging with low absorbance. We have produced a diffraction gratings for obtaining high resolution X-ray phase imaging, such as X-ray Talbot interferometer. In this X-ray Talbot interferometer, diffraction gratings were required to have a fine, high accuracy, high aspect ratio structure. Then, we succeeded to fabricate a high aspect ratio diffraction grating with a pitch of 8 μm and small area using a deep X-ray lithography technique. We discuss that the diffraction gratings having a narrow pitch and an large effective area to obtain imaging size of practical use in medical application. If the pitch of diffraction gratings were narrow, it is expected high resolution imaging for X-ray Talbot interferometer. We succeeded and fabricated the diffraction grating with pitch of 5.3 μm, Au height of 28 μm and an effective area of 60 × 60 mm².     

Three-dimensional medical image recognition of cancer of the liver by a revised radial basis function (RBF) neural network algorithm

In this study, we propose a revised radial basis function (RBF) neural network algorithm and apply this algorithm to computer-aided diagnosis (CAD) of the liver. First, the revised RBF neural network algorithm is applied to recognition of the liver regions, and the recognition results are compared with those obtained using the conventional RBF neural network and the conventional multilayered neural network trained using the back-propagation algorithm. It is shown that the revised RBF neural network is accurate, and is a useful method because the parameters are automatically determined. Then, the revised RBF neural network is applied to CAD of the liver cancer called hepatocellular carcinoma (HCC).     

Multiphase composites of tetragonal zirconia agglomerate dispersed into alumina and alumina-zirconia matrices

Multiphase composites of yttria- and ceria-doped tetragonal zirconia agglomerates (10–50 m) dispersed into an alumina or alumina-zirconia matrix were sintered at 1500–1600 °C in air, followed by post-Hot Isostatic Pressing (HIP) at 1450°C and 150 MPa in an Ar gas atmosphere. The relative density of the recovered composites was above 98% of the theoretical density. By chemically etching on the surface of zirconia agglomerates, the sinterability of composites was apparently improved; and no microcracks nor pores were observed at the interface of agglomerate and matrix. According to scanning electron microscopy (SEM) observation, tetragonal and tetragonal-monoclinic zirconia agglomerates were highly dispersed into the alumina or alumina-zirconia matrix. The multiphase composites containing 10 vol% spherical agglomerates demonstrate the relatively low value of bending strength, < 400 MPa, and a high value of fracture toughness, > 11 MPa m^1/2. The crack propagation introduced by Vickers indentation was efficiently suppressed and deflected by the agglomerates.     

Two-step design of critical control systems using disturbance cancellation integral controllers

An efficient critical control system design is proposed in this paper. The key idea is to decompose the design problem into two simpler design steps by the technique used in the classical loop transfer recovery method (LTR). The disturbance cancellation integral controller is used as a basic controller. Since the standard loop transfer recovery method cannot be applied to the disturbance cancellation controller, the nonstandard version recently found is used for the decomposition. Exogenous inputs with constraints both on the amplitude and rate of change are considered. The majorant approach is taken to obtain the analytical sufficient matching conditions. A numerical design example is presented to illustrate the effectiveness of the proposed design.     

Design of discrete time adaptive PID control systems with parallel feedforward compensator

This paper deals with the design of an adaptive PID control system with a parallel feedforward compensator (PFC) for discrete-time SISO systems and its application to water level control of a 3-tank system. The proposed method utilizes the characteristics of almost strict positive realness (ASPR) of the controlled plant. A conventional design scheme of a PFC which realizes an ASPR augmented controlled plant is also proposed. Further it is shown that the introduction of an internal model improves the control performance of the control system with the PFC. The effectiveness of the proposed method is confirmed through water level control experiments on a three-tank SISO system.     

Fabrication of X-rays mask with carbon membrane for diffraction gratings

We have produced diffraction gratings for obtaining high resolution X-ray phase imaging, such as X-ray Talbot interferometer. These diffraction gratings were required to have a fine, high accuracy, high aspect ratio structure. Therefore, we decided to use the X-rays lithography technique that used synchrotron radiation of the directivity for a manufacture process. The accuracy of the completed structure depends largely on the accuracy of the X-ray mask. In our group, a resin material is conventionally used for the membrane of large X-ray masks. However, X-ray masks comprising a resin membrane have the disadvantage that, after several cycles of X-ray exposure, they crease and sag due to X-ray-derived heat. As a substitute for the conventional resin membrane, we experimentally fabricated a new X-ray mask using a carbon wafer membrane. The newly fabricated X-ray mask was subjected to X-ray exposure experiment. We succeeded in making the structure body which was almost shape. And the experimental results verified that the new mask did not deteriorate even when used repeatedly, demonstrating that it was highly durable.     

Fabrication of high hardness Ni mold with electroless nickel–boron thin layer

The nickel electroforming method using a high-concentration nickel sulfamate bath is commonly used to fabricate micro metal molds in the LIGA process; however, this method does not produce micro metal molds of sufficient hardness. One means of improving the hardness of micro metal molds made using the nickel electroforming method is to include additives in the nickel plating solution. Another method is nickel alloy plating or a similar technique. In this research, we used a nickel–boron (Ni–B) electroless alloy plating method to obtain a hard nickel plated film having hardness of 832 Hv. It was also ascertained that Ni–B electroless alloy plated film retains its high hardness even during heat treatment in conditions of 250°C for 1 h. To deal with the high stresses developed in high-hardness plated films, we proposed double-layer nickel electroforming. This method is covered and used on conventional nickel electroforming layer by high hardness micro mold. High hardness micro metal mold using double-layer was fabricated by nickel electroforming and Ni–B electroless alloy plating method.     

Peroxiredoxin 2 as a chemotherapy responsiveness biomarker candidate in osteosarcoma revealed by proteomics

Purpose : We aimed to identify novel chemotherapy responsiveness biomarkers for osteosarcoma (OS) by investigating the global protein expression profile of 12 biopsy samples from OS patients. Experimental design : Six patients were classified as good responders and six as poor responders, according to the Huvos grading system. The protein expression profiles obtained by 2‐D DIGE consisted of 2250 protein spots. Results : Among them, we identified 55 protein spots whose intensity was significantly different (Bonferroni adjusted p‐value<0.01) between the two patient groups. Mass spectrometric protein identification demonstrated that the 55 spots corresponded to 38 distinct gene products including peroxiredoxin 2 (PRDX 2). Use of a specific antibody against PRDX 2 confirmed the differential expression of PRDX 2 between good and poor responders, while PRDX 2 levels as measured by Western blotting correlated highly with their corresponding 2‐D DIGE values. The predictive value of PRDX 2 expression was further confirmed by examining an additional four OS cases using Western blotting. Conclusions and clinical relevance : These results establish PRDX 2 as a candidate for chemotherapy responsiveness marker in OS. Measuring PRDX 2 in biopsy samples before treatment may contribute to more effective management of OS.     

Effects of 4He impurities on 3He nuclear spin-lattice relaxation in hcp solid 3He

Nuclear spin-lattice relaxation properties of hcp solid ³He with ⁴He impurities have been studied. At temperatures below the exchange plateau region, three kinds of relaxation time were observed. To analyze the data, a phenomenological four-bath model was developed, the four baths being the Zeeman bath, the phonon bath, an X-bath, and a Y-bath. The X-bath consists of the exchange bath and a part of the ⁴He-⁴He elastic interaction bath. The Y-bath is the main part of the elastic interaction bath. We measured the concentration dependence of the energy constants of all the baths, as well as the temperature and concentration dependences of the three kinds of relaxation time. The relaxation behavior corresponding to the process between the X-bath and the Y-bath could not be expressed by a single exponential function of time and the relaxation rate was strongly dependent on the concentration. This process may be related to the internal thermal equilibrium process within the elastic interaction bath. The impurity-dependent relaxation time between the X-bath and the phonon bath had a temperature dependence of T ^–n with n = 7.4±0.3.