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A high temperature AlN template was grown on sapphire substrate by metalorganic chemical vapor deposition.AFM results showed that the root mean square of the surface roughness was just 0.11 nm.Optical transmission spectrum and high resolution X-ray diffraction(XRD)characterization both proved the high quality of the AlN template.The XRD(002)rocking curve full width at half maximum(FWHM)was about 53.7 arcsec and(102)FWHM was about 625 arcsec.The densities of screw threading dislocations(TDs)and edge TDs wereestimated to be - 6 × 10^6 cm^-2 and - 4.7 ×10^9 cm^-2. AlGaN of Al composition 80.2% was further grown on the AlN template. The RMS of the surface roughness was about 0.51 nm. XRD reciprocal space mapping was carried out to accurately determine the Al composition and relaxation status in the AlGaN epilayer. The XRD (002) rocking curve FWHM of the AIGaN epilayer was about 140 arcsec and (102) FWHM was about 537 arcsec. The density of screw TDs was estimated to be - 4 × 10^7 cm^-2 and that of edge TDs was - 3.3 × 10^9 cm^-2. These values all prove the high quality of the AlN template and AlGaN epilayer. 相似文献
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采用RF-MBE技术,在蓝宝石衬底上生长了高Al组分势垒层AlGaN/GaN HEMT结构.用三晶X射线衍射分析得到AlGaN势垒层的Al组分约为43%,异质结构晶体质量较高,界面比较光滑.变温霍尔测量显示此结构具有良好的电学性能,室温时电子迁移率和电子浓度分别高达1246cm2/(V·s)和1.429×1013cm-2,二者的乘积为1.8×1016V-1·s-1.用此材料研制的器件,直流特性得到了提高,最大漏极输出电流为1.0A/mm,非本征跨导为218mS/mm.结果表明,提高AlGaN势垒层Al的组分有助于提高AlGaN/GaN HEMT结构材料的电学性能和器件性能. 相似文献
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为了研究不同压力和不同模板对InA lN薄膜外延生长的影响,分别选取以GaN为模板时生长压力为4.00、6.67和13.33 kPa,压力为4.00 kPa时模板为GaN和A lN这两组条件进行实验比较。研究发现,随着生长压力的增加,样品中In含量降低,样品的粗糙度则随压力的增加而增大;压力为4.00 kPa时,分别以摇摆曲线半高宽(FWHM)为86.97″的A lN和224.1″的GaN为模板,发现A lN模板上生长的InA lN样品(002)和(102)峰的FWHM值及表面粗糙度比上述GaN为模板生长的InA lN样品都要小很多。综合以上结果可初步得知:降低压力可以优化InA lN薄膜的表面形貌,增加In组分含量;采用高质量的A lN作模板能生长出晶体质量和表面形貌都比较好的InA lN薄膜。 相似文献
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The effect of different barriers between green and blue light regions in dual wavelength light emitting diodes was studied.Compared with a traditional sample,electroluminescence and photoluminescence spectra of the newly designed samples showed peak intensity improvements and smaller blue-shifts with increasing injection current level,and the bottom quantum-wells light emitting is enhanced.All these phenomena can be ascribed to reduced barrier thickness and indium doping in the quantum-barrier influencing electric fields and more holes injecting into the bottom QWs. 相似文献
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为研究多量子阱中的发光分布和空穴输运,制备了非对称InGaN/GaN 多量子阱(MQW)发光二极管。在电注入下,具有wNQW有源区结构(靠近p的第一个阱QW1比其他QWs较宽)的样品只有一个来自QW1的发光峰,而具有nWQW有源区结构的样品具有一个短波长发光峰和一个长波长发光峰,分别来自QW1和后面的QWs。增加QW1和后面QWs之间的势垒厚度,来自后面QWs的长波长发光峰减弱,总的发光强度也随之减弱。结论是具有nWQW和薄势垒的非对称耦合MQW结构可以改善空穴输运,从而增强后面QW的发光,提高LED内量子效率。 相似文献
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采用MOCVD技术在Si衬底(111)面上生长了GaN外延膜,分析了薄膜表面形貌和Si基GaN的临界载荷,研究了表面发光性能和GaN晶体质量随深度的变化.结果表明,外延层的表面比较平整,多组超晶格插入层可以进一步降低位错密度,提高晶体质量.膜的表面有许多颗粒状的发光中心,除了强的带边峰外,还有弱的黄光带和红光带,这可能是ON与VGa所产生的深能级跃迁产生的.GaN的晶体质量具有梯度变化,GaN外延层的上层晶体质量比较好,界面附近比较差,但是外延层与衬底的结合强度较高,临界载荷达到2.05 N. 相似文献