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81.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
82.
A new commercially available diode model is described. This unified model is capable of simulating the widest range of diode technologies of any presently available. The emphasis of this paper is on describing the model's extensive features and flexibility in the different domains of operation and is of particular interest in power applications 相似文献
83.
The capacitive idling converters derived from the Cuk, SEPIC, Zeta, and flyback topologies allow soft commutation of power switches without the need for additional circuitry, making it possible to increase the switching frequency while maintaining high efficiency 相似文献
84.
Pipelining and bypassing in a VLIW processor 总被引:1,自引:0,他引:1
This short note describes issues involved in the bypassing mechanism for a very long instruction word (VLIW) processor and its relation to the pipeline structure of the processor. The authors first describe the pipeline structure of their processor and analyze its performance and compare it to typical RISC-style pipeline structures given the context of a processor with multiple functional units. Next they study the performance effects of various bypassing schemes in terms of their effectiveness in resolving pipeline data hazards and their effect on the processor cycle time 相似文献
85.
86.
Translated from Kibernetika i Sistemnyi Analiz, No. 2, pp. 95–112, March–April, 1994. 相似文献
87.
Variations in lipid profile and incidence of vascular events were evaluated. Group 1 had a 29.3% reduction of total and a 38.3% reduction of LDL cholesterol as against reductions of 9% and 9.6% respectively in group 2. No significant difference was observed between the two groups as far as the vascular events considered were concerned. Pravastatin is an effective and safe drug. The lack of influence on the evolution of vascular disease would appear to be correlated to the small number of subjects studied and the short follow-up. 相似文献
88.
89.
A. G. Strunina 《Journal of Engineering Physics and Thermophysics》1993,65(4):953-956
The process of combustion of homogeneous and heterogeneous nongasifying and slightly gasifying systems over the range of a number of parameters characterizing the reactive composition and the conditions for the arrangement of the combustion process is studied by using thermocouple and optical methods. The regions of the implementation of different combustion regimes, namely, steady, pulsating, multiple-point, and spin, are determined experimentally.Institute of Structural Macrokinetics, Russian Academy of Sciences, Chernogolovka. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 65, No. 4, pp. 407–411, October, 1993. 相似文献
90.
An extended logistic model with a varying asymptotic upper bound for long-range peak demand forecasting is described. The model has been applied to a typical fast growing system, the Saudi Consolidated Electric Company. The forecasts are compared with actual demands and with those obtained from classical forecasting methods. The model gave relatively accurate peak demand forecasts compared with other classical methods. The model with a single load observation is capable of producing several peak demand forecasts corresponding to different levels of maximum temperature and various levels of social activity. The forecasts produced by the model were also stable irrespective of the length of the ex-post simulation period 相似文献