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961.
Advances in micro and nano fabrication technologies for MEMS require high-level measurement techniques with regard to sampling and sensitivity. For this purpose at the Institute of Microtechnology (IMT) highly sensitive piezoresistive 3D force sensors based on SU-8 polymer have been developed. In this paper we present an improved micro fabrication process for a double-sided micro structured design. The sensors are produced by multilayer processing techniques such as UV lithography and coating methods. The double-sided micro structured design demands a photoresist application method which simultaneously features a top side structuring and a casting from a mold. We use a new micro molding process to meet the demands. The micro fabrication technology is described, focusing on the development of the molding structure for shaping of the bottom side and a capable release process for the detachment of the molded structures. The fabrication process of the SU-8 mold layer is optimized to fabricate molding structures with heights from a few μm up to 350 μm. Therefore different SU-8 formulations, namely with classification numbers 5, 25, 50, and 100, have been used. The fundamental limitations for the mold design result from the lithography process, which defines the smallest lateral resolution, and from the characteristics of a molding process, e.g. the impossibility to realize an undercut. To allow for reliable release, the molding structures have to be coated with a sacrificial layer. Silicon nitride is deposited onto the substrate with accompanying monitoring of the deposition temperature during the PECVD process. 相似文献
962.
J. B. Stelzer A. Feldhoff J. Caro M. Fait D. Habel E. Feike H. Schubert 《化学,工程师,技术》2004,76(8):1086-1092
963.
Summary Three copolymers of ethylene and 1-decene, covering a wide range of compositions, have been synthesized with a MgCl2-supported Ziegler-Natta catalyst. The analysis by DSC and X-ray shows a great degree of heterogeneity in these copolymers and appreciable levels of crystallinity, corresponding to the orthorhombic lattice of polyethylene, are present even for very high 1-decene contents. 相似文献
964.
A simple transient performance of floating cum tilted-wick type solar still has been presented by incorporating the effects of water flowing over a glass cover, heat capacity of tilted-wick water surface and floating-wick water surface. Explicit expressions for flowing water, glass, tilted-wick water surface and floating-wick water surface temperature and efficiency of the system have been derived. Numerical calculations have been carried out for a typical day in the month of March 2004. The relative standard deviations between the numerical and experimental results of different temperature components of the proposed still have been found. The results indicate that the relative standard deviations between theoretical and experimental results are less than 8% (glass cover), 2% (tiltedwick water surface), 1% (floating-wick water surface) and 2% (flowing water at the lower end of the glass cover) an average for the working hours of the day. Moreover, based on the numerical results, the following conclusions have been drawn: (i) glass cover temperature decreases significantly; (ii) the effect of water flowing over the glass cover has a fascinating effect on the production of distillate output during peak sunny hours; (iii) water flow rate of 1.5 m/s is optimum, and beyond it the efficiency decreases. Experimental investigations have been performed at Sri Ramakrishna Mission Vidyalaya College of Arts and Science, Coimbatore, India. 相似文献
965.
The study of a three-phase catalytic slurry reactor for SO2 oxidation on activated carbon has been conducted with a dynamic response technique. The analysis of zero and first temporal moments of the gas for temperatures between 10 and 26°C provides individual measurements of the adsorption, desorption and surface reaction rate constants and their energies of activation. A parallel first-moment analysis was carried out for O2 adsorption onto carbon to obtain the necessary equilibrium constants for temperatures used in the SO2-oxidation calculations. With second moment analysis of adsorption data, we find the adsorption kinetic constants with and without reaction are in quantitative agreement. By evaluating the separate temperatu effect on the adsorption/desorption, and surface reaction rates, we conclude that neither step is controlling at temperatures up to 26°C. The values the several kinetic and equilibrium constants agree well with those found by other authors. 相似文献
966.
Bicrystals of Al2 O3 were fabricated to study the effects of thermal expansion anisotropy on fracture in a model system containing one grain boundary. Fractures occurred perpendicular to the directions of maximum tensile stress in bicrystals with thermal expansion coefficient differences as low as 0.31×10−60 C−1 and originated at the boundary, probably in areas of high residual stress associated with pores. Numerical stress analysis of two-dimensional model bicrystal configurations showed that stresses induced by thermal expansion anisotropy are maximal in a region localized along the bicrystal boundary. 相似文献
967.
968.
The effect of the platinum particle size was investigated for the catalytic oxidative dehydrogenation of aqueous ethanol to ethanal at a temperature of 303 K, an ethanol concentration of 260 mol m–3, a partial oxygen pressure 60 kPa, a pH of 9, and an ethanal and ethanoate concentration of 20 mol m–3. A particle size effect on the turnover frequency was observed but only for particle sizes smaller than 2 nm. Hence, the reaction shows a limited structure sensitivity. 相似文献
969.
L. B. Brattsten 《Journal of chemical ecology》1988,14(10):1919-1939
Herbivorous insects have the capacity to develop behavioral, physiological, and biochemical resistance mechanisms in response to chemical selection pressures. Among natural insect-plant associations, there are several cases of target-site insensitivity to and enhanced metabolism of plant allelochemicals. There are also known instances of physiological defenses such as extra rapid excretion or storage of toxic compounds. Multiple defenses seem to be prevalent in natural insect-plant interactions that involve toxic compounds, possibly reflecting the long time these interactions have had to evolve compared to insect-synthetic insecticide interactions. Synthetic insecticides were introduced about 45 years ago. Until recently they have been used as single-active-component preparations. As such, they have been and are very effective in producing insect populations with enhanced detoxification ability and target-site insensitivity. Most insecticide-resistant insect populations have one major defense mechanism. This feature makes the synthetic insecticides very useful tools for studies of insect defenses against toxic chemicals. Information gained from studies with insecticides can shed light on the capabilities of insects to adapt to toxicants in their environment. In assessing the validity of work with synthetic insecticides for natural systems, the fundamental differences between these substances and allelochemicals, and in their presentation to the insects, must, however, be considered. The prevalence of multiple defenses and reliance on modified physiological processes in natural interactions may reflect different properties of the natural chemicals in being generally highly biodegradable and often less acutely toxic than synthetic insecticides. In many cases, the plant allelochemicals are presented to the insects as mixtures. It is, however, to be expected that pest insects will evolve effective multiple defenses against synthetic insecticides. About 20% of all resistant populations have already developed multiple defenses, in most cases combinations of enhanced metabolism and target-site insensitivity. This implies that current crop protection practices need to be modified to ensure the continued usefulness of synthetic insecticides. To achieve this, it is important to study intensively not only insect-insecticide interactions but also the interactions operating in natural insect-plant associations. 相似文献
970.
Phosphorus modification of ZSM-5 leads to extra framework P5+ and probably incorporation of +3 valence state of P in the framework. The resulting system has increased Brønsted acidity. Theoretical calculations also favour the postulate that phosphorus in +3 valence state can be incorporated into the lattice. 相似文献