0.18μm铜金属双重镶嵌工艺中空间成像套刻精度分析

由于空间成像套刻(Overlay)技术的预算随集成电路(IC)设计规范的紧缩而吃紧,因此,Overlay测量技术准确度的重要意义也随之提高。通过对后开发(AfterDevelopDI)阶段和后蚀刻(AfterEtchFI)阶段的Overlay测量结果进行比较,研究了0.18μm设计规范下的铜金属双重镶嵌工艺过程中的Overlay准确度。在确保对同一个晶圆进行后开发(DI)阶段和后蚀刻(FI)阶段测试的条件下,我们对成品晶圆的5个工艺层进行了比较。此外,还利用CD-SEM(线宽-扫描电子显微镜)测量了某个工艺层(PolyGate)上的芯片内Overlay,并与采用分割线方法的光学Overlay测量结果进行了比较。发现对芯片内overlay的校准存在着严重的局限性,即在应用CD-SEM时缺乏合适的结构进行Overlay测量。我们还将继续为大家提供定量的比较结果,同时也会向大家推荐组合的CD-SEM测量结构,使其能够被应用到今后的光刻设计中。     

New ternary Mo(II) - compounds InxMo15Se19 containing Mo6Se8 and Mo9Se11 units

A new ternary molybdenum chalcogenide has been found with composition In_xMo₁₅Se₁₉. This compound crystallizes in the hexagonal space group P6₃/m, and shows both types of blocks Mo₆Se₈ and Mo₉Se₁₁. To our knowledge, this is the first Me₉X₁₁ unit ever observed in a material. It presents a homogeneity domain: 2, 9 < x < 3, 4. Substitution of sulphur and tellurium for selenium in In_3.3Mo₁₅Se_19-yX_y (X = S, Te) is possible in the limits 0 < y < 12 and 0 < y < 2 respectively. The new compound becomes a high field superconductor at low temperature.     

Coating with artificial matrices from collagen and sulfated hyaluronan influences the osseointegration of dental implants

Dental implants are an established therapy for oral rehabilitation. High success rates are achieved in healthy bone, however, these rates decrease in compromised host bone. Coating of dental implants with components of the extracellular matrix is a promising approach to enhance osseointegration in compromised peri-implant bone. Dental titanium implants were coated with an artificial extracellular matrix (aECM) consisting of collagen type I and either one of two regioselectively low sulfated hyaluronan (sHA) derivatives (coll/sHA1Δ6s and coll/sHA1) and compared to commercial pure titanium implants (control). After extraction of the premolar teeth, 36 implants were inserted into the maxilla of 6 miniature pigs (6 implants per maxilla). The healing periods were 4 and 8 weeks, respectively. After animal sacrifice, the samples were evaluated histomorphologically and histomorphometrically. All surface states led to a sufficient implant osseointegration after 4 and 8 weeks. Inflammatory or foreign body reactions could not be observed. After 4 weeks of healing, implants coated with coll/sHA1Δ6s showed the highest bone implant contact (BIC; coll/sHA1Δ6s: 45.4 %; coll/sHA1: 42.2 %; control: 42.3 %). After 8 weeks, a decrease of BIC could be observed for coll/sHA1Δ6s and controls (coll/sHA1Δ6s: 37.3 %; control: 31.7 %). For implants coated with coll/sHA1, the bone implant contact increased (coll/sHA1: 50.8 %). Statistically significant differences could not be observed. Within the limits of the current study, aECM coatings containing low sHA increase peri-implant bone formation around dental implants in maxillary bone compared to controls in the early healing period.     

Pulsed laser deposition of La0.67Ca0.33MnO3 thin films on LiNbO3 and surface acoustic wave studies

Surface Acoustic Waves on piezoelectric substrates can be used to investigate the dynamic conductivity of thin films in a non-contact and very sensitive way, especially at low conductivities. Here, we report on such surface acoustic wave studies to characterize thin manganite film like La_0.67Ca_0.33MnO₃, exhibiting a Jan Teller effect with a strong electron phonon interaction and a metal insulator transition at high temperatures.

We report on the deposition of La_0.67Ca_0.33MnO₃ on piezoelectric substrates (LiNbO₃ in different crystal cuts, employing a pulsed laser deposition technique. The structural quality of the thin films are examined by X-Ray Diffraction, Scanning Electron Microscope and Energy Dispersive X-ray spectroscopy. For the electrical characterization, we employ the surface acoustic wave technique, accompanied by conventional direct current resistance measurements for comparison.     

Highly crystalline WO3 thin films with ordered 3D mesoporosity and improved electrochromic performance

WO3 thin layers with nanometer-scale periodicity were prepared by evaporation-induced self-assembly (EISA) using a novel amphiphilic block-copolymer template (poly(ethylene-co-butylene)-block-poly(ethylene oxide)). The evolution of the mesoporous ordered network and the crystallinity of the framework were monitored by 2D-SAXS, WAXS, SEM, XPS, and porosimetry. By annealing the films, the pore-wall crystallinity is adjusted between fully amorphous and highly crystalline without mesostructural degradation. Thus, the crystalline-film framework is composed of phase-pure monoclinic WO3 nanoparticles (12-14 nm in size). Furthermore, heat treatment transforms the originally spherical mesopores into ellipsoids, resulting in a unidirectionally shrunken, but still well-defined and fully accessible bcc mesopore architecture. The influence of mesoporosity and crystallinity on electrochemical/electrochromic characteristics was addressed by monitoring electrochemical features and the absorption changes during Li insertion/extraction (repetitive potentiostatic cycling). Both the amorphous and crystalline mesoporous films possess electrochromic response times on the order of only seconds, which are attributable to the facilitated insertion of guest ions due to shortening of the diffusion path lengths. Also, the insertion/extraction reversibility of crystalline WO3 layers with 3D mesoporosity is improved compared to amorphous ones and reaches values close to 100%.     

Enhanced π-π interactions between a C60 fullerene and a buckle bend on a double-walled carbon nanotube

In situ low-voltage aberration corrected transmission electron microscopy (TEM) observations of the dynamic entrapment of a C₆₀ molecule in the saddle of a bent double-walled carbon nanotube is presented. The fullerene interaction is non-covalent, suggesting that enhanced π-π interactions (van der Waals forces) are responsible. Classical molecular dynamics calculations confirm that the increased interaction area associated with a buckle is sufficient to trap a fullerene. Moreover, they show hopping behavior in agreement with our experimental observations. Our findings further our understanding of carbon nanostructure interactions, which are important in the rapidly developing field of low-voltage aberration corrected TEM and nano-carbon device fabrication.      

Graphite Nucleation in Cast Iron Melts Based on Solidification Experiments and Microstructure Simulation

Microstructure strongly influences the mechanical properties of cast iron. By inoculating the melt with proper inoculants, foreign substrates are brought into the melt and eventually the graphite can crystallize on them. The elements and substrates that really play a role for nucleation are yet unknown. Until now there is very little knowledge about the fundamentals of nucleation, such as composition and morphology of nuclei. In this work we utilized EN-GJL-200 as a base material and examined several produced specimens. The specimens were cast with and without inoculants and quenched at different solidification states. Specimens were also examined with a high and low oxygen concentration, but the results showed that different oxygen contents have no influence on the nucleation in cast iron melts. Our research was focused on the microscopic examination and phase-field simulations. For studying the samples we applied different analytical methods, where SEM-EDS, -WDS were proved to be most effective. The simulations were conducted by using the software MICRESS, which is based on a multiphase-field model and has been coupled directly to the TCFE3 thermodynamic database from TCAB. On the basis of the experimental investigations a nucleation mechanism is proposed, which claims MnS precipitates as the preferred site for graphite nucleation. This theory is supported by the results of the phase-field simulations.     

Nanomaterials for environmental studies: Classification, reference material issues, and strategies for physico-chemical characterisation

NanoImpactNet is a European Commission Framework Programme 7 (FP7) funded project that provides a forum for the discussion of current opinions on nanomaterials in relation to human and environmental issues. In September 2008, in Zurich, a NanoImpactNet environmental workshop focused on three key questions:

1.

What properties should be characterised for nanomaterials used in environmental and ecotoxicology studies?

2.

What reference materials should be developed for use in environmental and ecotoxicological studies?

3.

Is it possible to group different nanomaterials into categories for consideration in environmental studies?

Such questions have been, at least partially, addressed by other projects/workshops especially in relation to human health effects. Such projects provide a useful basis on which this workshop was based, but in this particular case these questions were reformulated in order to focus specifically on environmental studies. The workshop participants, through a series of discussion and reflection sessions, generated the conclusions listed below.The physicochemical characterisation information identified as important for environmental studies included measures of aggregation/agglomeration/dispersability, size, dissolution (solubility), surface area, surface charge, surface chemistry/composition, with the assumption that chemical composition would already be known.There is a need to have test materials for ecotoxicology, and several substances are potentially useful, including TiO₂ nanoparticles, polystyrene beads labelled with fluorescent dyes, and silver nanoparticles. Some of these test materials could then be developed into certified reference materials over time.No clear consensus was reached regarding the classification of nanomaterials into categories to aid environmental studies, except that a chemistry-based classification system was a reasonable starting point, with some modifications. It was suggested, that additional work may be required to derive criteria that can be used to generate such categories, that would also include aspects of the material structure and physical behaviour.     

Part II of the Special Issue on 3rd International Conference on Engineering and Technology Innovation (ICETI 2014), held in Kenting,Taiwan Oct 31–Nov 2, 2014

Microsystem Technologies -