Lithographic characterization of the spherical error in an extreme-ultraviolet optic by use of a programmable pupil-fill illuminator

Extreme-ultraviolet (EUV) lithography remains a leading contender for use in the mass production of nanoelectronics at the 32 nm node. Great progress has been made in all areas of EUV lithography, including the crucial issue of fabrication of diffraction-limited optics. To gain an accurate understanding of the projection optic wavefront error in a completed lithography tool requires lithography-based aberration measurements; however, making such measurements in EUV systems can be challenging. We describe the quantitative lithographic measurement of spherical aberration in a 0.3 numerical aperture. EUV microfield optic. The measurement method is based on use of the unique properties of a programmable coherence illuminator. The results show the optic to have 1 nm rms spherical error, whereas interferometric measurements performed during the alignment of the optic indicated a spherical error of less than 0.1 nm rms.     

Flextensional ultrasonic piezoelectric micro-motor

This paper presents the experimental design, construction, and operational characteristics of a new type of standing wave piezoelectric ultrasonic micro-motor. The motor uses a composite stator, consisting of a metallic flex-tensional mode converter, or "cymbal", bonded to a 2-mm-square piezoelectric plate. The cymbal converts contour-mode vibrations of the plate into oscillations in the cymbal, perpendicular to the stator plane. These are further converted into rotational movement in a rotor pressed against the cymbal by means of an elastic-fin friction drive to produce the required rotary actuation. The motor operates on a single-phase electrical supply, and direct control of the output speed and torque can be achieved by adjusting the amplitude and frequency of the supply voltage. Noncontact optical techniques were used to assess the performance of the developed micro-motor. The operational characteristics were developed from the acceleration and deceleration characteristics. No-load output speed (11 rev s(-1)) and stall torque (27 nNm) were derived using high-speed imaging and image analysis. Maximum efficiency was 0.6%.     

Statistical Analysis of Transponder Packaging in UHF RFID Systems

Packaging of RFID transponders that operate at ultrahigh frequencies (UHF) requires nontraditional materials and innovative methods in order to make a functional, reliable, and inexpensive RFID transponders. Presented is a statistical analysis along with the model as the way to evaluate measured results and provide the quality and process control for the electrical and mechanical performance of the packaging of RFID tags with respect to different manufacturing processes. The power analysis is presented in support of the statistical analysis and the sample size selection.     

A marsupial robotic system for surveying and inspection of freshwater ecosystems

Freshwater ecosystems are vast areas that are constantly changing and evolving. To maintain the ecosystem as well as the structures located close to bodies of water, frequent monitoring is required. Although dangerous and time consuming, manual operations are the conventional way of monitoring such areas. Recently, Autonomous Surface Vehicles (ASVs) have been proposed to undertake the monitoring task. As any other platform, ASVs have limitations, such as a restricted point of view and access only where the water is sufficiently deep. Unmanned Aerial Vehicles (UAVs) can fly over any terrain and provide a “bird's‐eye‐view” of the environment. However, UAVs have limited operational time due to power constraints. Heterogeneous marsupial robotic systems use different types of robots to augment their operation envelope, taking advantage of their individual strengths. A marsupial survey system comprised an ASV and a UAV for freshwater monitoring is developed and presented in this paper. This system is able to complete long missions and reach remote locations while also being able to generate detailed maps and inspections of points of interest. The system was thoroughly tested during a 6‐month period in a number of field deployments in freshwater ecosystems at Lake Murray and at the Congaree River, SC, USA, to validate its capabilities.     

Platinum Cyclooctadiene Complexes with Activity against Gram-positive Bacteria

Antimicrobial resistance is a looming health crisis, and it is becoming increasingly clear that organic chemistry alone is not sufficient to continue to provide the world with novel and effective antibiotics. Recently there has been an increased number of reports describing promising antimicrobial properties of metal-containing compounds. Platinum complexes are well known in the field of inorganic medicinal chemistry for their tremendous success as anticancer agents. Here we report on the promising antibacterial properties of platinum cyclooctadiene (COD) complexes. Amongst the 15 compounds studied, the simplest compounds Pt(COD)X₂ (X=Cl, I, Pt1 and Pt2 ) showed excellent activity against a panel of Gram-positive bacteria including vancomycin and methicillin resistant Staphylococcus aureus. Additionally, the lead compounds show no toxicity against mammalian cells or haemolytic properties at the highest tested concentrations, indicating that the observed activity is specific against bacteria. Finally, these compounds showed no toxicity against Galleria mellonella at the highest measured concentrations. However, preliminary efficacy studies in the same animal model found no decrease in bacterial load upon treatment with Pt1 and Pt2 . Serum exchange studies suggest that these compounds exhibit high serum binding which reduces their bioavailability in vivo, mandating alternative administration routes such as e. g. topical application.     

Culture, ethnicity, and children's facial expressions: A study of European American, mainland Chinese, Chinese American, and adopted Chinese girls.

This investigation extends previous research documenting differences in Chinese and European American infants' facial expressivity. Chinese girls adopted by European American families, nonadopted Mainland Chinese girls, nonadopted Chinese American girls, and nonadopted European American girls responded to emotionally evocative slides and an odor stimulus. European American girls smiled more than Mainland Chinese and Chinese American girls and scored higher than Mainland Chinese girls for disgust-related expressions and overall expressivity. Adopted Chinese girls produced more disgust-related expressions than Mainland Chinese girls. Self-reported maternal strictness, aggravation, positive expressiveness, and cultural identification correlated with children's facial responses, as did number of siblings and adults in the home. Results suggest that culture and family environment influences facial expressivity, creating differences among children of the same ethnicity. (PsycINFO Database Record (c) 2010 APA, all rights reserved)     

Odor and chemesthesis from brief exposures to TXIB

An experiment explored ability of subjects to detect vapors of the plasticizer TXIB (2,2,4-trimethyl-1,3-pentanediol diisobutyrate) and ethanol via olfaction and via ocular and nasal chemesthesis, i.e. chemically stimulated feel. Testing, tailored to the sensitivity of each subject, produced psychometric functions for individuals. Olfactory detection of TXIB began at concentrations below 1 ppb (v/v), with 50% correct detection at 1.2 ppb. (Comparable detection for ethanol occurred almost two orders of magnitude higher.) Chemesthetic detection of TXIB began at about 500 ppb, with 50% correct detection at 2.1 ppm for the eye and 4.6 ppm for the nose, both close to saturated vapor concentration. (Comparable detection for ethanol occurred essentially three orders of magnitude higher.) Suggestions that TXIB plays a role in generation of irritative symptoms at concentrations in the range of parts-per-billion need to reckon with a conservatively estimated 200-fold gap between the levels putatively 'responsible' for the symptoms and those even minimally detectable via chemesthesis. Neither the variable of exposure duration nor that of mixing offers a likely explanation. Inclusion of ethanol in the study allowed comparisons pertinent to issues of variability in human chemoreception. An interpretation of the psychometric functions for individuals across materials and perceptual continua led to the conclusion that use of concentration as the metric of detection in olfaction inflates individual differences. PRACTICAL IMPLICATIONS: This study indicated that the plasticizer TXIB could contribute odor at concentrations in the range of parts-per-billion, but could hardly contribute sensory irritation per se, as alleged in reports of some field studies where TXIB has existed amongst many other organic compounds.     

Wear of a single asperity using Lateral Force Microscopy

This report describes an observation of alternating transitions between linear (Amontons) and non-linear friction-load behavior during Lateral Force Microscope experiments using a silicon tip sliding on a quartz surface. Initially, a transition from linear to non-linear behavior was attributed to nanoscale ‘running-in’ of the tip to form a single contact junction at the interface. Once this had occurred, a non-linear relationship between friction and applied load was observed during a number of loading and unloading cycles. For higher compressive loads, a further transition to a more linear friction-load behavior was attributed to nanoscale wear in the contact zone. Notably, when applied load was reduced below this ‘high-load’ transition point, the same non-linear friction-load behavior was again observed, but with a larger (friction per load) magnitude than seen previously. This cycle was repeated five times in these experiments, and each time, switching between non-linear and linear friction-load behavior occurred, along with a progressive increase in friction (per load) each time load was reduced below the transition point. The progressive increase in friction is attributed to an increased area of contact, caused by nanoscale wear at higher applied loads. An increase in tip size was confirmed by tip profiling before and after experiment. By progressively wearing the asperity at higher loads, the (interfacial or true) contact area, A, between the surfaces could be progressively increased, and as a result, a progressive increase in interfacial sliding friction, F _f , was obtained at lower loads (according to F _f = τA).     

Selection of novel ligands from a whole-molecule randomly mutated C5a library

Novel antagonists of the proinflammatory leukocyte chemoattractantC5a have been produced from a phage display library of whole-moleculerandom mutants. The cDNA for the inflammatory polypeptide C5adR⁷⁴was used as template in a PCR reaction doped with the mutagenicnucleoside triphosphates dPTP {dP: 6-(2-deoxy-ß-D-ribofuranosyl)-3,4-dihydro-8H-pyrimido-[4,5-c][1,2]oxazin-7-one}and 8-oxodGTP (8-oxodG: 8-oxo-2'-deoxyguanosine) to allow theintroduction of mutations in a highly controlled manner throughoutthe cDNA. The resultant library of mutants was displayed onbacteriophage M13 using a jun/fos linker sequence. Functionalpolypeptides were isolated by several rounds of selection againstthe receptor for C5a expressed on the surface of CHO cells.From this selection procedure, a limited number of variantsof C5adR⁷⁴ were obtained. When expressed as free polypeptide,the binding affinities of the selected C5adR⁷⁴ sequences wereincreased 5-fold relative to wild-type protein. Site-directedmutagenesis of the C-terminus of these variants resulted inthe production of antagonists of C5adR⁷⁴ activity.