Effect of gas mixing ratio on gas-phase composition and etch rate in an inductively coupled CF4/Ar plasma

In this work, we carried out investigations aimed at understanding the effect of gas mixing ratio on plasma parameters, gas phase composition and etch rate in CF₄/Ar inductively coupled plasma. For this purpose, a combination of experimental methods and modelling was used. Experiments showed that electron temperature and electron density are not very sensitive to variations of Ar content in CF₄/Ar plasma. From a zero-dimensional plasma model, the densities of both neutral and charged particles change monotonically. The analysis of surface kinetics based on an ion-assisted etching mechanism showed the possibility of non-monotonic etch rate behaviour due to a concurrence of chemical and physical etching pathways.     

A continuum model for pumping performance of turbomolecular pumps in all flow regimes

In the present study a continuum model for one-dimensional plane Couette-Poiseuille flow is implemented to turbomolecular pumps in different flow regimes. Pumping performance of various turbomolecular pumps including 6 single rotors, a rotor-stator row, a rotor-stator-rotor row, and a multi-row with 13 alternative rotor-stator rows is considered here. The obtained results show that the model provides good quantitative values for pumping performance of turbomolecular pumps over the whole regimes ranging from molecular flow to transition to slip flow.     

Theory to boil-off gas cooled shields for cryogenic storage vessels

An intermediate refrigeration with boil-off gas cooled shields using the boil-off gas stream is an alternative method to the conventional intermediate refrigeration with a cryogenic liquid.By using an analytical calculation method relations are derived, which enable complete predictions about the effectiveness of an intermediate refrigeration with boil-off gas cooled shields as a function of the number of shields for the different stored cryogenic liquids. For this theoretical derivation however, the restrictive assumption must be made that the thermal conductivity of the used insulation material has a constant value between the considered temperature boundaries.For purposes of a more exact calculation a numerical method is therefore suggested, which takes into consideration that the thermal conductivity is temperature-dependent. For a liquid hydrogen storage vessel with a perlite-vacuum insulation e.g., the effectiveness of one shield and its equilibrium temperature are given as a function of the position of the shield in the insulation space.     

Thermal conductance measurements of bolted copper to copper joints at sub-Kelvin temperatures

We have measured the thermal contact conductance of several demountable copper joints below 1 K. Joints were made by bolting together either two flat surfaces or a clamp around a rod. Surfaces were gold plated, and no intermediate materials were used. A linear dependence on temperature was seen. Most of the measured conductance values fell into a narrow range: 0.1-0.2 W K⁻¹ at 1 K. Results in the literature for similar joints consist of predictions based on electrical resistance measurements using the Wiedemann-Franz law. There is little evidence of the validity of this law in the case of joints. Nevertheless, our results are in good agreement with the literature predictions, suggesting that such predictions are a reasonable approximation.     

Boiling: Size Distribution of Bubbles as Demanded by the Principle of Maximum Information

The principle of maximum informational entropy is used to find the probability density function for the departure radius of a bubble in boiling on a solid surface. A general relation is derived, which leads to particular expressions.     

The Difference in Turbulent Diffusion between the Active and Passive Scalars in a Thermally Stably Stratified Medium

The difference in the turbulent diffusion between the active (heat) and passive (mass) scalars in a thermally stably stratified medium is investigated. The axisymmetric problem is treated on the formation of a turbulent circulation flow above a heated disk and on the turbulent diffusion of a passive scalar (impurity) from a continuous surface source in a stably stratified medium. The results indicate that the thermal stratification causes appreciable differences in the coefficients of turbulent transfer between the active (heat) and passive (mass) scalars. This means that the assumption of the identity of the coefficient of turbulent diffusion of heat and mass, employed in conventional models of turbulence, produces significant errors in estimating the heat and mass transfer in a thermally stably stratified medium.     

Filtration of Non-Newtonian Hydrocarbon Fluid in a High-Frequency Electromagnetic Field

The paper gives the results of experimental investigations of the initial pressure gradient of bituminous oil and the time dependences of variation of the temperature in a formation model and of the well production rate in a microwave-frequency electromagnetic field. The effect of strong decay of the non-Newtonian properties of bituminous oil is revealed. The nonuniformity of temperature distribution over the formation thickness is demonstrated, which depends on the initial production rate of the well and on the duration of stimulation of the bottom-hole zone of formation.     

Dynamic error correction of a digitizer for time-domain metrology

A method for numerical correction of distortion in a digitizer used for metrology applications is described. Investigation of the digitizer's error behavior in the phase plane leads to the development of an analytic error model that describes the digitizer's distortion behavior. Of particular significance is the model's ability to describe nonlinear error in the fundamental spectral component manifested as amplitude and frequency-dependent gain and phase error. When fitted only to the harmonic distortion content of the digitizer's output data, the model generates an amount of fundamental that correctly accounts for the error in the digitizer's gain that is not due to linear system response. The model is therefore able to improve not just the total harmonic distortion (THD) performance of the digitizer but its ac root mean square measurement accuracy as well. At 1 MHz, the model linearizes the digitizer to 70 /spl mu/V/V over a range of 1 to 8 V and reduces harmonic distortion by >20 dB. It is believed that this is the first time that results of this nature have been reported in the literature.     

CMOS circuit testing via time-resolved luminescence measurements and simulations

The continuous trend in modern CMOS technology toward smaller devices and faster clock frequency is challenging the picosecond imaging circuit analysis technique. In this paper we discuss the role of the single-photon avalanche diode with very sharp time resolution in testing CMOS circuits. Thanks to the 30 ps-time resolution, innovative measurements regarding delays and jitter are presented, along with a case study. A compact model of the luminescence is also proposed and used to compare on-chip electrical signals with optical waveforms.