A nickel micromirror array was designed and successfully fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. It was composed of two address electrodes, two support posts and a nickel mirror plate. The mirror plate, which is supported by two nickel posts, is overhung about 10 μm from the silicon substrate. The nickel mirror plate is actuated by an electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. Optimized fabrication processes have been developed to reduce residual stress in mirror plate and prevent contact between the mirror plate and the substrate, which ensure a reasonable flat and smooth micromirror for operation at low actuation voltage.
A gas-jet micro pump with novel cross-junction channel has been designed and fabricated using a Si micromachining process.
The valveless micro pump is composed of a piezoelectric lead zirconate titanate (PZT) diaphragm actuator and fluidic network.
The design of the valveless pump focuses on a cross-junction formed by the neck of the pump chamber and one outlet and two
opposite inlet channels. The structure of cross-junction allows differences in fluidic resistance and fluidic momentum inside
the channels during each PZT diaphragm vibration cycle, which leads to the gas flow being rectified without valves. The flow
channels were easily fabricated by using silicon etching process. To investigate the effects of the structure of the cross-junction
on the gas flow rate, two types of pump with different cross-junction were studied. The design and simulation were done using
ANSYS-Fluent software. The simulations and experimental data revealed that the step-nozzle structure is much more advantageous
than the planar structure. A flow rate of 5.2 ml/min was obtained for the pump with step structure when the pump was driven
at its resonant frequency of 7.9 kHz by a sinusoidal voltage of 50 Vp–p. 相似文献