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Pad effects on material-removal rate in chemical-mechanical planarization   总被引:1,自引:0,他引:1  
The role of a porous pad in controlling material-removal rate (MRR) during the chemical-mechanical planarization (CMP) process has been studied numerically. The numerical results are used to develop a phenomenological model that correlates the forces on each individual abrasive particle to the applied nominal pressure. The model provides a physical explanation for the experimentally observed domains of pressure-dependent MRR, where the pad deformation controls the load sharing between active-abrasive particles and direct pad-wafer contact. The predicted correlations between MRR and slurry characteristics, i.e., particle size and concentration, are in agreement with experimentally measured trends reported by Ouma1 and Izumitani.2  相似文献   
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Polyetherurethaneureas (PEUUs) were synthesised from polyethylene-glycols (PEGs) of molecular weight 400, 600 and 1000, 4,4′-diphenylmethanediisocyanate (MDI) and aliphatic diamine chain extenders, 1,3-propanediamine (PDA) and 1,6-hexanediamine (HDA). Polymer films were irradiated with 365 nm light at 293 K and the effects of polyether soft segment length and urea hard segment on photo-oxidative stability were studied by following the variation in weight-average molecular weight (M w), gel formation and stress-strain properties. Changes in ultraviolet and infrared spectroscopy were monitored on photo-oxidation and hydroperoxide content determined. The soft segment length was increased by increasing the molecular weight of PEG from 400 to 1000 and hard segment structure was changed by variation of diamine. It was noted that the structure of urea and polyether soft segment length plays an important role in photostability of PEUUs. PDA chain extended PEUUs were more stable than HDA chain extended PEUUs.  相似文献   
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The paper studies the uniaxial buckling behavior of composite laminates in which preselected variations of fiber spacing in the constituent laminae are adopted. Such laminates are referred to as inhomogeneous laminates because of the variable elastic stiffness along the coordinate axes. A non-uniform prebuckling stress state observed even under constant uniaxial compression has a pronounced influence on the buckling behaviour of an inhomogeneous laminate. A procedure is summarized for computing the critical load of a laminate using the Ritz method which exploits an analogy between the bending and stretching formulations and utilizes Gram-Schmidt orthogonal polynomials. The paper illustrates that the variation in fiber spacing is an innovative way of increasing the critical load for a prescribed amount of fiber and highlights its remarkable sensitivity to the nature of fiber spacing, in-plane and out-of-plane boundary conditions, fiber type and the aspect ratio of the laminate.  相似文献   
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OBJECTIVE: To study the pathogenesis of aseptic loosening: in particular, to determine whether macrophages responding to particles of biomaterials commonly used in arthroplasty surgery for arthritis are capable of differentiating into osteoclastic bone resorbing cells, and the cellular and hormonal conditions required for this to occur. METHODS: Biomaterial particles (polymethylmethacrylate, high density polyethylene, titanium, chromium-cobalt, stainless steel) were implanted subcutaneously into mice. Macrophages were isolated from the foreign body granulomas that resulted, cultured on bone slices and coverslips, and assessed for both cytochemical and functional evidence of osteoclast differentiation. RESULTS: Tartrate resistant acid phosphatase (TRAP) negative macrophages isolated from granulomas containing particles of all types of biomaterial composition were capable of differentiating into TRAP positive cells capable of extensive lacunar bone resorption (assessed by scanning electron microscopy). The presence of both UMR106 rat osteoblast-like cells and 1,25-dihydroxy vitamin D3 was necessary for this to occur. CONCLUSION: All implant materials produce wear particles that are the focus of a heavy foreign body macrophage response in the fibrous membrane between a loose implant component and the host bone undergoing resorption. These findings underline the importance of biomaterial wear particle generation and the macrophage response to different types of biomaterial wear particles in the pathogenesis of aseptic loosening.  相似文献   
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The resonant frequency of a circular patch antenna with and without circular cavity is measured. The patch miniaturization in the presence of the cavity is proved. Different methods of reducing resonant frequencies and broadening bandwidth without significantly reducing antenna gain are presented. Capacitively loaded patch and slits on the patch stimulate the patch at lower frequencies and multiple resonances, thus help miniaturization. Finally ferrite loading on the feed probe further increases the bandwidth without significantly reducing the antenna gain. The method is much more improved than that for a resistive loaded patch and a deformed patch. © 2007 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2007.  相似文献   
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In life testing, the failure-time distributions are often specified by choosing an appropriate hazard-rate function. The class of life-time distribution characterized by a linear hazard-rate includes the one-parameter exponential and Rayleigh distributions. Usually the parameters of the linear hazard-rate model are estimated by the method of least squares. This work is concerned with Bayes estimation of the two-parameters from a type-2 censored sample. Monte Carlo simulation is used to compare the Bayes risk of the regression estimator with the minimum Bayes risk. Discrete mixtures of decreasing failure rate distributions are known to have decreasing failure rates. The authors prove that the result holds for continuous mixtures as well  相似文献   
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