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991.
992.
Lutz Hofmann Tobias Fischer Thomas Werner Franz Selbmann Michael Rennau Ramona Ecke Stefan E. Schulz Thomas Geßner 《Microsystem Technologies》2016,22(7):1665-1677
This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC2H5)4 (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO2-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm2 at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV. 相似文献
993.
Jieguang?HeEmail author Xin?ChenEmail author Xindu?Chen Qiang?Liu 《Journal of Intelligent Manufacturing》2016,27(5):1067-1084
This paper is aimed at employing analytical target cascading (ATC) to solve the distributed production planning problem. In the ATC hierarchy, by setting a parent element to the core enterprise and a child element to each manufacturer, the core enterprise can negotiate the plans with the manufactures. Individual manufactures are able to make production plans autonomously, and finally achieve the global objective under the coordination of the core enterprise. ATC offers an independent decision making ability to each member, a decentralize coordination strategy to the core enterprise and a parallel computing method to the planning model. In order to obtain the concrete production quantities and balance the costs and the service levels, a multi-objective integer linear programming has also been introduced in the model, where different costs have different weights. By setting different weights to different optimization objectives, the core enterprise can obtain the lowest overall cost or the best service quantity. Meanwhile, from a strategic point of view, two coordination patterns, competitive and cooperative, through modifying the iterative mode of ATC, are addressed here. The competitive pattern make the core enterprise achieve a lower cost, while the cooperative pattern make the core enterprise maintain a better relationship with the manufactures. A series of comparative analyses are conducted to identify the strengths of the ATC method and demonstrate the effectiveness of the proposed coordination patterns. In particular, one of these experiments, which considers the quantity discount, has been done to further verify the effectiveness of the ATC based coordination mechanism while encountering the newly added decision-making factors. 相似文献
994.
This paper investigates the relative attitude formation control problem for a group of rigid‐body agents using relative attitude information on SO(3). On the basis of the gradient of a potential function, a family of distributed angular velocity control laws, which differ in the sense of a geodesic distance dependent function, is proposed. With directed and switching interaction topologies, the desired relative attitude formation is showed to be achieved asymptotically provided that the topology is jointly quasi‐strongly connected. Moreover, several sufficient conditions for the desired formation to be achieved exponentially and almost globally are given. Additionally, numerical examples are provided to illustrate the effectiveness of the proposed distributed control laws. Copyright © 2017 John Wiley & Sons, Ltd. 相似文献
995.
We propose a scheme for preparation of large-scale entangled GHZ states and W states with neutral Rydberg atoms. The scheme mainly depends on Rydberg antiblockade effect, i.e., as the Rydberg–Rydberg interaction strength and the detuning between the atom transition frequency and the classical laser frequency satisfies some certain conditions, the effective Rabi oscillation between the two ground states and the two excitation Rydberg states would be generated. The prominent advantage is that both two multiparticle GHZ states and two multiparticle W states can be fused in this model, especially the success probability for fusion of GHZ states can reach unit. In addition, the imperfections induced by the spontaneous emission is also discussed through numerical simulation. 相似文献
996.
International Journal of Control, Automation and Systems - This paper concerns the attitude control problem of a 3D rigid pendulum based on dynamic T-S fuzzy neural model. A generalized 3D rigid... 相似文献
997.
D. C. Da J. H. Chen X. Y. Cui G. Y. Li 《Structural and Multidisciplinary Optimization》2017,56(1):131-137
This paper presents a new approach for the topological design of materials with extreme properties. The method is based on hybrid cellular automaton (HCA), which is an implicit optimization technique that uses local rules to update design variables iteratively until meeting the described optimality conditions. By means of an energy-based homogenization approach, the effective properties of the considered material are calculated in terms of element mutual energies. By this method, no sensitivity information is required to find the optimal topology for the considered design objectives: bulk modulus, shear modulus, and negative Poisson’s ratio. The proposed method is validated by a series of numerical examples. 相似文献
998.
目的 Landsat-8传感器采用线阵推扫式成像,通过分景处理获得标准景产品。面对大范围遥感数据需求,长条带数据具有更高的应用价值。长条带数据的一般获取方法是通过拼接标准景正射产品的方式,该方法处理效率不高,并且当条带中某景由于云覆盖量较多无法生产正射产品时,将无法通过多景拼接的方式生成相应的长条带正射产品。针对此方法存在的问题,本文提出一种Landsat-8长条带影像的正射校正方法。方法 以长条带影像为整体,通过控制点匹配、长条带几何精校正和正射校正3个部分,直接生成长条带级别的正射校正产品。在长条带几何精校正过程中,提出了Landsat-8的基于轨道约束的长条带平差模型及控制点优化选取方法。结果 在15景的条带长度范围内,本文方法生成的长条带正射产品的几何精度在12 m以内,满足Landsat-8正射产品的精度要求,且处理效率相较于标准景拼接方式提升1倍左右;对于云覆盖较多的景,利用连续3景进行长条带正射校正,可以得到与标准景正射产品几何精度相当的长条带正射产品。结论 本文提出的长条带处理方法,在一定长度范围内,能够得到满足Landsat-8正射产品的精度要求的长条带正射产品,处理效率得到较大提高,且能够有效克服传统方法中云覆盖情形对长条带产品获取的限制。 相似文献
999.
1000.
随着流媒体应用需求的日益增加,不断改进和完善现有流媒体系统性能势在必行,将云计算引入流媒体系统成为未来流媒体系统的一大趋势.本文简单分析了云计算、CDN(ContentDeliveryNetwork)St]P2P(PeertoPeer)网络的优缺点和研究现状.主要讨论并分析了云环境下的P2P流媒体传输系统所面临的带宽问题、流媒体数据处理、服务质量问题和系统中的关键技术——虚拟化技术、存储管理技术、调度技术和复制技术.此外,从搭建云计算实验环境角度。本文列举了目前比较流行的5种仿真实验手段. 相似文献