Mechanical stress control in a VLSI-fabrication process: a method for obtaining the relation between stress levels and stress-induced failures

An ideal fabrication process is designed to minimize mechanical stress in semiconductor devices and to improve device reliability. Mechanical stress levels were predicted by in-house simulations supported by a thin-film database. These stress levels were correlated with stress-induced defects by TEM analysis supported by fail bit addressing on matured megabit SRAMs. Amorphous-doped silicon film with various annealing temperatures were used for the gate electrode to change the mechanical stress in devices and to get the direct relationship between predicted stress levels and stress related defects. The authors describe brief guidelines for suppressing dislocations in the small geometry shallow-trench isolation process utilizing this system. Polysilicon thickness in the W-polycide gate electrode is designed to minimize mechanical stress in the gate oxide and to suppress the gate oxide failure in probe and class tests. Moreover, critical stress generates dislocations during post source/drain ion implantation anneal obtained by a ball indentation method. This indicated that lower temperature anneal is effective in suppressing the dislocations. A two-step anneal was introduced to suppress dislocations and to enable higher ion activation.     

Creating advanced functions on network processors: experience and perspectives

In this article we present five case studies of advanced networking functions that detail how a network processor (NP) can provide high performance and also the necessary flexibility compared with ASIC. We first review the basic NP system architectures, and describe the IBM PowerNP architecture from the data plane as well as the control plane point of view. We introduce models for the programmer's views of NP that facilitate a global understanding of NP software programming. Then, for each case study, we present results from prototypes as well as general considerations that apply to a wider range of system architectures. Specifically, we investigate the suitability of NP for QoS (active queue management and traffic engineering), header processing (GPRS tunneling protocol), intelligent forwarding (load balancing without flow disruption), payload processing (code interpretation and just-in-time compilation in active networks), and protocol stack termination (SCTP). Finally, we summarize the key features as revealed by each case study, and conclude with remarks on the future of NP.     

Low RF noise and power loss for ion-implanted Si having an improved implantation process

Very-low-transmission line noise of <0.25 dB at 18 GHz and low power loss /spl les/0.6 dB at 110 GHz have been measured on transmission lines fabricated on proton-implanted Si. In contrast, a standard Si substrate gave much higher noise of 2.5 dB and worse power loss of 5 dB. The good RF integrity of proton-implanted Si results from the high isolation impedance to ground, as analyzed by an equivalent circuit model. The proton implantation is also done after forming the transmission lines at a reduced implantation energy of /spl sim/4 MeV. This enables easier process integration into current VLSI technology.     

The hydration phase and pore structure formation in the blends of sulfoaluminate-belite cement with Portland cement

Sulfoaluminate-belite (SAB) cements are an attractive class of low-energy cements from the viewpoint of saving energy and releasing less CO₂ into the atmosphere during their production. Their hydraulic activity, however, does not match that of the ordinary Portland cement (PC) and needs improvement before they can be used on their own. However, SAB cements when blended with PC have the potential to be used effectively in traditional applications as shown by this study. Mortars made with blends of SAB cements and PC, and a cement-to-sand ratio of 1:3 by weight and a water-to-cement ratio of 0.5, indicate a superior protection against corrosion of steel to those made with blends of PC and blast-furnace slag (BFSPC). The prepared mortars were stored at 20 °C for 90 days under either a 60% relative humidity (RH)-dry air, or 100% RH-wet air conditions. With further improvement in the SAB cement quality through better understanding of their characteristics, a genuine competition between SAB/PC and BFSPC can be expected in practice.     

Automation model of sewerage rehabilitation planning.

The major steps of sewerage rehabilitation include inspection of sewerage, assessment of structural conditions, computation of structural condition grades, and determination of rehabilitation methods and materials. Conventionally, sewerage rehabilitation planning relies on experts with professional background that is tedious and time-consuming. This paper proposes an automation model of planning optimal sewerage rehabilitation strategies for the sewer system by integrating image process, clustering technology, optimization, and visualization display. Firstly, image processing techniques, such as wavelet transformation and co-occurrence features extraction, were employed to extract various characteristics of structural failures from CCTV inspection images. Secondly, a classification neural network was established to automatically interpret the structural conditions by comparing the extracted features with the typical failures in a databank. Then, to achieve optimal rehabilitation efficiency, a genetic algorithm was used to determine appropriate rehabilitation methods and substitution materials for the pipe sections with a risk of mal-function and even collapse. Finally, the result from the automation model can be visualized in a geographic information system in which essential information of the sewer system and sewerage rehabilitation plans are graphically displayed. For demonstration, the automation model of optimal sewerage rehabilitation planning was applied to a sewer system in east Taichung, Chinese Taiwan.     

Evaluating the stabilisation degree of digested sewage sludge: investigations at four municipal wastewater treatment plants.

Further reduction of volatile suspended solids (VSS) during a post-stabilisation step was applied to evaluate the stabilisation degree of digested sewage sludge. For this purpose digested sludge was collected at four municipal wastewater treatment plants (WWTPs) and further stabilised in lab-scale chemostat reactors either under anaerobic or aerobic conditions. Experimental results showed that even in adequately digested sludge a consistent amount of VSS was degraded during aerobic post-stabilisation. It seems that aerobic conditions play a significant role during degradation of residual VSS. Additionally, specific VSS production (gVSS/peCOD110.d) as well as specific oxygen uptake rate were shown to be suitable parameters to assess the degree of sludge stabilisation at WWTPs. Fourier transform infrared spectroscopy was used to reveal changes in the sludge composition. Spectra of treated and untreated sludge samples indicated that the major component of residual VSS in stabilised sludge for instance consisted of biomass, while cellulose was absent.     

Cramer-Rao bounds for the estimation of multipath parameters and mobiles' positions in asynchronous DS-CDMA systems

Commercial applications for the location of subscribers of wireless services continue to expand. Consequently, finding the Cramer-Rao lower bound (CRLB), which serves as an optimality criterion for the location estimation problem, is of interest. In this paper, we derive the deterministic CRLBs for the estimation of the specular multipath parameters and the positions of the mobiles in an asynchronous direct sequence code division multiple access (DS-CDMA) system operating over specular multipath fading channels. We assume a multilateral radio location system where the location estimates are obtained from some or all of the estimated signal parameters at different clusters of antennas of arbitrary geometry. Extension for unilateral and composite radio location techniques is also discussed. As an application example, we use numerical simulations to investigate the effects of specular multipath and multiple access interference (MAI) on the positioning accuracy for different radio location techniques.     

Manipulation of microenvironment with a built-in electrochemical actuator in proximity of a dissolved oxygen microsensor

Biochemical sensors for continuous monitoring require dependable periodic self diagnosis with acceptable simplicity to check its functionality during operation. An in-situ self-diagnostic technique for a dissolved oxygen microsensor is proposed in an effort to devise an intelligent microsensor system with an integrated electrochemical actuation electrode. With a built-in platinum microelectrode that surrounds the microsensor, two kinds of microenvironments, called the oxygen-saturated or oxygen-depleted phases, can be created by water electrolysis, depending on the polarity. The functionality of the microsensor can be checked during these microenvironment phases. The polarographic oxygen microsensor is fabricated on a flexible polyimide substrate (Kapton) and the feasibility of the proposed concept is demonstrated in a physiological solution. The sensor responds properly during the oxygen-generating and oxygen-depleting phases. The use of these microenvironments for in-situ self-calibration is discussed to achieve functional integration, as well as structural integration, of the microsensor system.