浸没式光刻的优势和可行性

浸没式光刻通过高折射率的液体充入透镜底部和片子之间的空间使光学系统的数值孔径具有显著的优势。在193nm曝光系统中,水(折射率为1.44)被选作最佳的浸入液体。通过成像模拟,现已证明ArF穴193nm雪浸没式光刻(NA=1.05～1.23)与F2穴157nm雪干法穴NA=0.85～0.93雪光刻具有几乎相同的成像性能。结合流体力学和热模拟结果,讨论了ArF浸没式曝光设备的优势和可行性。     

Strong Surface‐Termination Effect on Electroresistance in Ferroelectric Tunnel Junctions

Tunnel electroresistance in ferroelectric tunnel junctions (FTJs) has attracted considerable interest, because of a promising application to nonvolatile memories. Development of ferroelectric thin‐film devices requires atomic‐scale band‐structure engineering based on depolarization‐field effects at interfaces. By using FTJs consisting of ultrathin layers of the prototypical ferroelectric BaTiO₃, it is demonstrated that the surface termination of the ferroelectric in contact with a simple‐metal electrode critically affects properties of electroresistance. BaTiO₃ barrier‐layers with TiO₂ or BaO terminations show opposing relationships between the polarization direction and the resistance state. The resistance‐switching ratio in the junctions can be remarkably enhanced up to 10⁵% at room temperature, by artificially controlling the fraction of BaO termination. These results are explained in terms of the termination dependence of the depolarization field that is generated by a dead layer and imperfect charge screening. The findings on the mechanism of tunnel electroresistance should lead to performance improvements in the devices based on nanoscale ferroelectrics.     

Degradation evaluation of poly-Si TFTs by comparing normal and reverse characteristics and behavior analysis of hot-carrier degradation

We propose degradation evaluation of poly-Si TFTs by comparing normal and reverse characteristics. Since symmetrical normal and reverse characteristics indicate Joule-heating degradation whereas asymmetrical characteristics indicate hot-carrier degradation, they can be clearly and easily classified. Moreover, degradation occurrence is contrasted between standard and fine TFTs. Finally, behavior of the hot-carrier degradation is analyzed.     

Osteoclastic features of multinucleated giant cells responding to synthetic hydroxyapatite implanted in rat jaw bone.

Multinucleated giant cells (MGCs) that responded to synthetic hydroxyapatite (HAP) implanted in rat mandibles were studied with electron microscopy. HAP used in this study sintered at 200 degrees C (HAP200) and at 125 degrees C (HAP1250) after the synthesis by a wet method. One to three weeks after the intraosseous implantation of HAP, MGCs responding to HAP200 had not only well-developed ruffled border and the clear zone but well-developed perinuclear Golgi complex, many mitochondria and vesicles in their cytoplasms. MGCs responding to HAP1250 had the clear zone, but not the ruffled border although they showed similar cytoplasmic features to those of MGCs responding to HAP200. They merely extended short slender cytoplasmic processes to HAP1250. These results suggest that although osteoclast-like MGCs respond to HAP implanted in the bone, the development of the ruffled border-clear zone system depends on physicochemical properties of HAP.     

The computed characteristics of turbulent flow and convection in concentric circular annuli. Part IV: Generalizations

This is the concluding portion of a four-part numerical investigation. The first was limited to the prediction of the velocity field, a prerequisite for the prediction of convection. The second concerned the prediction of the Nusselt number for uniform heating on the inner wall only, and the third the prediction of the Nusselt numbers for most of the other thermal boundary conditions that occur in practice. Herein, generalized predictive equations are presented for all of these conditions. The number of such equations and coefficients is minimized by the use of superposition and generalized expressions for the dependence on Re and Pr, and to some extent on the aspect ratio.     

Noise characteristics of Er3+-doped fiber amplifierspumped by 0.98 and 1.48 μm laser diodes

Measured noise characteristics of Er³⁺-doped optical fiber amplifiers pumped by 0.98- and 1.48-μm laser diodes (LDs) are reported. The noise figures estimated from the beat noise between signal and spontaneous emission are 3.2 dB for pumping by 0.98-μm LD and 4.1 dB for pumping by 1.48-μm LD. The beat noise between spontaneous emission components and the spontaneous shot noise for the 0.98-μm pumping are lower than those for the 1.48-μm pumping     

Effects of bile acid feeding on hepatic deoxycholate 7α-hydroxylase activity in the hamster

In order to investigate the effects of bile acid feeding on hepatic microsomal deoxycholate 7α-hydroxylase activity, three different bile acids were administered (0.2% w/w in chow) to hamsters for two weeks. Deoxycholate 7α-hydroxylase activity was increased markedly by feeding of cholic acid (CA) and slightly by deoxycholic acid (DCA) Chenodeoxycholic acid (CDCA) had little effect on the enzyme activity. Feeding each of the bile acids significantly inhibited the activity of cholesterol 7α-hydroxylase in the order CDCA≥ DCA>CA. There was no correlation between deoxycholate 7α-hydroxylase activity and cholesterol 7α-hydroxylase activity. It is concluded that the activity of deoxycholate 7α-hydroxylase is up-regulated by feeding DCA and CA and that the mechanism seems to be different from that of cholesterol 7α-hydroxylase. The increased activity of hepatic deoxycholate 7α-hydroxylase by CA and DCA should be beneficial in minimizing the toxic effects of DCA in the hamster.     

Oxygen-permselectivity in new type polyorganosiloxanes with carboxyl group on the side chain

Summary Oxygen-permselectivity through polyorganosiloxanes with carboxyl group on the side chain is discussed in terms of the differences between the O₂, N₂ diffusion coefficients or their solubility coefficients. The oxygen-selectivity increases from 2 to 5 with the increase in the carboxyl component of the side chain. Especially the selectivity in the diffusion coefficient is found to more contribute to the oxygenpermselectivity in comparison with that of the solubility coefficient. But the permeation coefficient decreases with the permselectivity.This work was partially supported by a Grand-in-Aid from the Ministry of Education, Science and Culture, Japan.     

Oxygen Self-Diffusion in Single-Crystal Y2O3

Self-diffusion coefficients of the oxygen ion in single-crystal Y₂O₃ were determined by the gas-solid isotope exchange technique. The results in the range 1100° to 1500°C are described by D=7.3 X 10^-6 exp [-19l(kJ/mol)/RT] cm²/s. Comparison of the results with those for oxides with the fluorite-type structure indicates that the regularly arranged vacant anion sites in the C-type structure do not contribute eflectively to oxygen ion diffusion .