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71.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
72.
A new commercially available diode model is described. This unified model is capable of simulating the widest range of diode technologies of any presently available. The emphasis of this paper is on describing the model's extensive features and flexibility in the different domains of operation and is of particular interest in power applications 相似文献
73.
V. I. Shtykov 《Power Technology and Engineering (formerly Hydrotechnical Construction)》1998,32(8):459-462
Conclusions 1. Use of dewatering systems based on voidless drainage is most effective when dewatering slightly permeable soils in regions
with a deep seasonal frost.
2. Two-story drainage with the upper and lower stories spaced 30 m apart accelerates the discharge of gravitational water
from the arable layer. Results of observations on two-story drainage in experimental-production sections indicated that it
discharges 2 – 3.8 times more water than systematic tubular drainage with an interdrain spacing of 10 m and a 0.2-m thick
three-dimensional filter of a sandy-gravelly mixture.
3. It is recommended to use crushed stone and porous-clay gravel with a fineness of 10 – 20 mm as a filler. In that case,
protection of the drain filler is, as a rule, required only from the intrusion of soil from above during construction in cohesive
soils with a plasticity indexW
p≥7.
4. seepage rate in a voidless drain should be lower than the scouring velocity for the soil in which the voidless drainage
is placed. In the opposite case, it is necessary to lower the grade of the drains or select a filler gradation such that the
seepage rate in the drain be lower than the scouring velocity.
Translated from Gidrotekhnicheskoe Stroitel’stvo, No. 8, pp. 41–43, August, 1998. 相似文献
74.
The capacitive idling converters derived from the Cuk, SEPIC, Zeta, and flyback topologies allow soft commutation of power switches without the need for additional circuitry, making it possible to increase the switching frequency while maintaining high efficiency 相似文献
75.
76.
Pipelining and bypassing in a VLIW processor 总被引:1,自引:0,他引:1
This short note describes issues involved in the bypassing mechanism for a very long instruction word (VLIW) processor and its relation to the pipeline structure of the processor. The authors first describe the pipeline structure of their processor and analyze its performance and compare it to typical RISC-style pipeline structures given the context of a processor with multiple functional units. Next they study the performance effects of various bypassing schemes in terms of their effectiveness in resolving pipeline data hazards and their effect on the processor cycle time 相似文献
77.
78.
Translated from Kibernetika i Sistemnyi Analiz, No. 2, pp. 95–112, March–April, 1994. 相似文献
79.
80.
A. G. Strunina 《Journal of Engineering Physics and Thermophysics》1993,65(4):953-956
The process of combustion of homogeneous and heterogeneous nongasifying and slightly gasifying systems over the range of a number of parameters characterizing the reactive composition and the conditions for the arrangement of the combustion process is studied by using thermocouple and optical methods. The regions of the implementation of different combustion regimes, namely, steady, pulsating, multiple-point, and spin, are determined experimentally.Institute of Structural Macrokinetics, Russian Academy of Sciences, Chernogolovka. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 65, No. 4, pp. 407–411, October, 1993. 相似文献