High-performance MIM capacitor using ALD high-k HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectrics

For the first time, we successfully fabricated and demonstrated high performance metal-insulator-metal (MIM) capacitors with HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectric using atomic layer deposition (ALD) technique. Our data indicates that the laminate MIM capacitor can provide high capacitance density of 12.8 fF//spl mu/m/sup 2/ from 10 kHz up to 20 GHz, very low leakage current of 3.2 /spl times/ 10/sup -8/ A/cm/sup 2/ at 3.3 V, small linear voltage coefficient of capacitance of 240 ppm/V together with quadratic one of 1830 ppm/V/sup 2/, temperature coefficient of capacitance of 182 ppm//spl deg/C, and high breakdown field of /spl sim/6 MV/cm as well as promising reliability. As a result, the HfO/sub 2/-Al/sub 2/O/sub 3/ laminate is a very promising candidate for next generation MIM capacitor for radio frequency and mixed signal integrated circuit applications.     

Hydrogen annealing effect on DC and low-frequency noise characteristics in CMOS FinFETs

The hydrogen annealing process has been used to improve surface roughness of the Si-fin in CMOS FinFETs for the first time. Hydrogen annealing was performed after Si-fin etch and before gate oxidation. As a result, increased saturation current with a lowered threshold voltage and a decreased low-frequency noise level over the entire range of drain current have been attained. The low-frequency noise characteristics indicate that the oxide trap density is reduced by a factor of 3 due to annealing. These results suggest that hydrogen annealing is very effective for improving device performance and for attaining a high-quality surface of the etched Si-fin.     

溶胶--凝胶镀膜技术综述(连载5)

第三节　常见氧化物膜目前研究最多的氧化物膜可谓二氧化硅和二氧化钛膜 ,这两种薄膜也是接受呈色离子、制备彩色镀膜常用的基体膜 ,所以 ,有必要将它们单独列出 ,加以讨论。1　二氧化钛膜在所有高折射率材料中 ,由钛的化合物制备的氧化物膜具有特殊的实际意义。因此 ,对二氧化     

Motive Force in a Complex Model of Mass Transfer

Relations for determining a motive force in a complex model of mass transfer as applied to concurrent, countercurrent, and cross motion of the vapor and liquid phases have been introduced. These forces have been compared for different forms of organization of the flow, and their comparison with similar quantities from the known Murphree and Hausen models is presented.     

Bio-layer management in anaerobic membrane bioreactors for wastewater treatment.

Membrane separation technology represents an alternative way to achieve biomass retention in anaerobic bioreactors for wastewater treatment. Due to high biomass concentrations of anaerobic reactors, cake formation is likely to represent a major cause of flux decline. In the presented research, experiments are performed on the effect of biomass concentration and level of gas sparging on the hydraulic capacity of a submerged anaerobic membrane bioreactor. Both parameters significantly affected the hydraulic capacity, with biomass exerting the most pronounced effect. After 50 days of continuous operation the critical flux remained virtually unchanged, despite an increase in membrane resistance, suggesting that biomass characteristics and hydraulic conditions determine the bio-layer formation rather than the membrane's fouling level. The concept of bio-layer management is introduced to describe the programmed combination of actions performed in order to control the formation of biomass layer over membranes.     

ASON实际组网中架构及演进方式分析

对在实际组网中选择合理的ASON架构和保护方式作了相应分析，并为搭建可向ASON平滑演进的传统网络时需注意的问题提供了参考意见，     

Segmented polymer networks containing amino‐dendrimers

Polymer networks in which poly(propylene imine) dendrimers (Astramol?) are connected to each other by linear polytetrahydrofuran (polyTHF) segments, were prepared by two methods. The first method was a one‐step procedure in which bifunctionally living polyTHF, obtained by initiation of the THF polymerization with trifluoromethane sulfonic anhydride (triflic anhydride), was reacted with an amino‐dendrimer. This reaction was very fast but did not allow formation of the end products. The second method was a two‐step procedure. In a first step, living polyTHF, prepared with acryloyloxybutyl triflate as initiator, was grafted on an amino‐dendrimer, to form a star‐like, acrylate‐terminated polyTHF multi‐macromonomer with the dendrimer as core. In a second step, networks were obtained by Michael addition between the acrylate end‐groups and unreacted amino‐groups of the dendrimer. This cross‐linking reaction occurred spontaneously upon heating of the solution of the multi‐macromonomer with gelation times varying from a few minutes to a few hours, depending on the temperature and the composition of the prepolymers. With this method it was possible to prepare networks in the form of coatings or films. © 2003 Society of Chemical Industry     

Wavelength-tunable 40-GHz picosecond harmonically mode-locked fiber laser source

We demonstrate a novel 40-GHz mode-locked fiber laser that utilizes a single active device to provide both gain and mode-locking. The laser produces pulses as short as 2.2 ps, is tunable over a 27-nm band centered at 1553 nm, and exhibits long-term stability without cavity-length feedback control. The pulse train at 1556 nm was used in a 40-Gb/s transmission experiment over 45 km with a low 0.4-dB power penalty.