A study of a finite element model for the chemical mechanical polishing process

In this paper, relative velocity at a given point on the wafer was first derived. The revolutions of wafer and pad are assumed the same and the axisymmetric uniformly distributed pressure form is given. Thus, a 2D axisymmetric quasic-static model for chemical-mechanical polishing process (CMP) was established. Based on the principle of minimum total potential energy and axisymmetric elastic stress-strain relations, a 2D axisymmetric quasic-static finite element model for CMP was thus established. In this model, the four-layer structures including wafer carrier, carrier film, wafer and pad are involved. The von Mises stress distributions on the wafer surface were analysed, the effects of axial, hoop, radial and shear stresses to von Mises stress and the effects of axial, hoop, radial and shear strains to deformation of the wafer were investigated. The findings indicate that near the wafer centre, von Mises stress distribution on the wafer surface was almost uniform, then increased gradually with a small amount. However, near the wafer edge, it would decrease in a large range. Finally, it would increase dramatically and peak significantly at the edge. Besides, the axial stress and strain are the dominant factors to the von Mises stress distributions on the wafer surface and the wafer deformation, respectively.     

CMOS scaling into the nanometer regime

Starting with a brief review on 0.1-μm (100 nm) CMOS status, this paper addresses the key challenges in further scaling of CMOS technology into the nanometer (sub-100 nm) regime in light of fundamental physical effects and practical considerations. Among the issues discussed are: lithography, power supply and threshold voltage, short-channel effect, gate oxide, high-field effects, dopant number fluctuations and interconnect delays. The last part of the paper discusses several alternative or unconventional device structures, including silicon-on-insulator (SOI), SiGe MOSFET's, low-temperature CMOS, and double-gate MOSFET's, which may lead to the outermost limits of silicon scaling     

AC hot-carrier effects in MOSFETs with furnaceN2O-nitrided gate oxides

AC hot-carrier effects in n-MOSFETs with thin (~85 Å) N₂O-nitrided gate oxides have been studied and compared with control devices with gate oxides grown in O₂. Results show that furnace N₂O-nitrided oxide devices exhibit significantly reduced AC-stress-induced degradation. In addition, they show weaker dependences of device degradation on applied gate pulse frequency and pulse width. Results suggest that the improved AC-hot-carrier immunity of the N₂O-nitrided oxide device may be due to the significantly suppressed interface state generation and neutral electron trap generation during stressing     

Experimental demonstration of multiwavelength optical network with microwave subcarriers

The authors use the unique multiwavelength filtering capability of the acousto-optic tunable filter to demonstrate multiple broadband services with only one fixed-wavelength transmitter and receiver per user in the first experimental demonstration of a multiwavelength subcarrier network.<>     

Multi-criteria Decision-making Approach for Environmental Impact Assessment to Reduce the Adverse Effects Of Dams

Water Resources Management - Environmental Impact Assessments (EIAs) of development projects are necessary to minimize negative impacts and maximize benefits. The objective of this paper is to...     

Production of propylene glycol fatty acid monoesters by lipase-catalyzed reactions in organic solvents

Fatty acid monoesters of propylene glycol (1,2-propanediol) are good water-in-oil emulsifiers. These esters were synthesized enzymatically to overcome the problems associated with chemical processes. APseudomonas lipase was added to reaction mixtures containing propylene glycol and various acyl donors (fatty acids, fatty acid ethyl esters, fatty acid anhydrides and triglycerides) in organic solvents, and the mixtures were shaken at 30°C. The products were analyzed by gas chromatography. The yield of monoesters was affected by the acyl donors, organic solvents, temperature, water content, pH memory and reaction time. The anhydrous (lyophilized) enzyme and fatty acid anhydrides were best for monoester production. The optimum pH ranges were 4–5 and 8–10. The yields of propylene glycol monolaurate, monomyristate, monopalmitate, monostearate and monooleate with 50 mM fatty acid anhydrides as acyl donors were 97.2, 79.6, 83.7, 89.7 and 93.4 mM, respectively; those with 50 mM fatty acids as acyl donors were 37.3, 28.7, 28.7, 35.3 and 36.2 mM, respectively. The yields of propylene glycol monopalmitate, monostearate and monooleate with 50 mM triglycerides as acyl donors were 87.4, 65.1 and 83.2 mM, respectively.     

Geochemical implications of trace elements and sulfur in the saturate, aromatic and resin fractions of crude oil from the Mara and Mara Oeste fields, Venezuela

Ten trace elements (Cr, Zn, Fe, Mn, Cu, Co, Ni, Mo, V and Sr) and sulfur were determined in the saturate, aromatic and resin fractions of 15 crude oils from Mara (DM) and Mara Oeste (DMO) fields of the Maracaibo Basin, Venezuela. The oils studied are classified as unaltered or altered by biodegradation. In the altered oil, the depletion of n-alkanes, the absence of isoprenoids and the presence of steranes and hopanes unaltered by biodegradation are indicative of moderate biodegradation. The elements Zn, Fe, Mn, Cu, Ni, and Sr were detected in the saturated hydrocarbon fraction; Cr and V were detected in the aromatic fraction in addition to the above elements; whereas the elements detected for the resin fraction were Cr, Zn, Fe, Cu, Ni, Mo, V, and Sr. Co was not detected in any fractions of the oils analyzed. Sulfur was found in all fractions of the oils studied. It was proposed that Fe, Zn, Sr, and Mn could have entered the oil during migration or Fe, Zn and Mn as pollutants during oil extraction. Cr and Cu may be of biological origin and Mo could be incorporated into the reservoir through bacteria. Only S, V, and Ni in the resin fractions can be used as indicators of the origin and correlation of Mara and Mara Oeste oils. Based on the results obtained in this work, it can be established that the V/(V+Ni) ratio in the resin fraction can be used as a correlation parameter, for these oils.     

Insecticidal Effects of Organotin(IV) Compounds on Plutella Xylostella (L.) Larvae. II. Inhibitory Potencies Against Acetylcholinesterase and Evidence for Synergism in Tests With Bacillus Thuringiensis(BER.) and Malathion

Features of pesticide synergism and acetylcholinesterase (AChE) inhibition (in vitro) were studied using a selected range of organotin compounds against the early 4th instar larvae of a highly resistant strain of the diamondback moth (DBM), Plutella xylostella, a major universal pest of cruciferous vegetables.Fourteen triorganotin compounds were evaluated for their ability to enhance the toxicity of the microbial insecticide, Bacillus thuringiensis (BT) and of the commercial insecticide, Malathion to Plutella xylostella larvae. Supplemental synergism was observed with triphenyl- and tricyclopentyltin hydroxides in combinations with Bacillus thuringiensis. Increased synergism was observed with an increase in the number of cyclopentyl groups on tin in the mixed series, Cyp(n) Ph(3-n) SnX, where X = OH, and 1-(1,2,4-triazolyl). The combination of (p-chlorophenyl)diphenyltin N,N-dimethyldithiocarbamate at LD(10) and LD(25) concentrations with sublethal concentrations of Malathion as well as of tricyclohexyltin methanesulphonate at the 0.01% (w/v) concentration with Malathion exerted strong synergistic effects (supplemental synergism) with toxicity index (T.I) values of 7.2, 19.8 and 10.1, respectively.Studies on the in vitro inhibition of acetylcholinesterase prepared from the DBM larvae showed that while most of the triorganotin Compounds tested were without effect on the enzyme, compounds containing the thiocarbamylacetate or the dithiocarbamylacetate moieties demonstrated appreciable levels of inhibition, being comparable in efficacy to commercial grades of Malathion and Methomyl.     

A study of the tool-chip interface contact problem under low cutting velocity with an elastic cutting tool

To understand the effects of elastic deformation of the tool and the crater phenomenon generated by the cutting force and high pressure during metal cutting processing on the cutting process, an iterative mathematical model for calculating the tool-chip contact is developed in this paper under the assumption of elastic cutting tools. In this model, the finite-element method is used to simulate the cutting of mild steel by a cutting tool of three different materials. The results obtained in the simulation are found to match experimental data reported by related studies. The simulation results also indicate that tools with a smaller stiffness produce greater elastic deformation. Further, decrease of the rake angle due to elastic deformation of the tool can result in greater difficulty in internal deformation of the material and an increase in cutting force. The micro-crater phenomenon on the tool face generated by high pressure at the tool-chip interface is the preliminary symptom of crater wear on the tool face. Therefore, under some machining conditions, such as in precision machining or in automation processing where tool compensation is required, the phenomenon of elastic deformation of the tool must be considered carefully to ensure product precision.