A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication

The defect of process equipments is a major factor that impairs the yields in the mass production of semiconductor wafer fabrication and it is a main supervision means to use high-resolution defect inspection tools to detect and monitor the defect damage. Due to the high investment costs of these inspection tools and the resulting decrease in the throughput, how to improve the sampling rate is an important issue for the associated inspection strategy. This paper proposes a new concept and implementation of virtual inspection (VI) to enhance the detection and monitoring of defect in semiconductor production process. The underlying theory of the VI concept is that the state variables identifications (SVIDs) of process equipments can reflect the process quality effectively and loyally. The approach of VI is to combine the application of the fault detection and classification (FDC), and the defect library and the re-engineering of inspection procedure to reach the full-scope of strategic objective. VI enables the defect monitoring to enter a new era by promoting the monitoring level of defect inspection from the previous lot-sampling basis to the wafer-sampling level, and hence upgrades the sampling strategy from random-sampling to full and right-sampling. In this study, various typical defect cases are utilized to illustrate how to create VI models and verify the reliability of the proposed approach. Furthermore, a feasible architecture of the VI implementation for mass production in semiconductor factory is presented in the paper.     

TRUST BY ASSOCIATION: A META‐REPUTATION SYSTEM FOR PEER‐TO‐PEER NETWORKS

Trust mechanisms are used in peer‐to‐peer (P2P) networks to help well‐behaving peers find other well‐behaving peers with which to trade. Unfortunately, these trust mechanisms often do little to keep badly behaving peers from entering and taking advantage of the network, which makes the resulting network difficult or impossible to use for legitimate purposes such as e‐commerce. We propose trust by association, a way of tying peers together in invitation‐only P2P networks in such a way as to encourage the removal of badly behaving peers. We use invitations to create a structure within the otherwise ad hoc P2P network. Using this structure, we create a meta‐reputation system where we measure a peer’s trustworthiness not only by its own behavior, but also by the behavior of the peers it has invited to join. The connection created between the peers takes advantage of the external social relationship that must exist before a peer can be invited into the network. The result is a P2P network where, rather than just trying to marginalize badly behaving peers, there is incentive to kick them out of the network. We present results from a simple simulation showing that our approach works well in general when combined with and compared to an existing trust mechanism.     

Improving traversability of quadruped walking robots using body movement in 3D rough terrains

This paper presents a study on improving the traversability of a quadruped walking robot in 3D rough terrains. The key idea is to exploit body movement of the robot. The position and orientation of the robot are systematically adjusted and the possibility of finding a valid foothold for the next swing is maximized, which makes the robot have more chances to overcome the rough terrains. In addition, a foothold search algorithm that provides the valid foothold while maintaining a high traversability of the robot, is investigated and a gait selection algorithm is developed to help the robot avoid deadlock situations. To explain the algorithms, new concepts such as reachable area, stable area, potential search direction, and complementary kinematic margin are introduced, and the effectiveness of the algorithms is validated via simulations and experiments.     

Integrated micro Pirani gauge based hermetical package monitoring for uncooled VO x bolometer FPAs

This paper presents the design and fabrication of a micro Pirani gauge using VO _x as the sensitive material for monitoring the pressure inside a hermetical package for micro bolometer focal plane arrays (FPAs). The designed Pirani gauge working in heat dissipating mode was intentionally fabricated using standard MEMS processing which is highly compatible with the FPAs fabrication. The functional layer of the micro Pirani gauge is a VO _x thin film designed as a 100 × 200 μm pixel, suspended 2 μm above the substrate. By modeling of rarefied gas heat conduction using the Extended Fourier’s law, finite element analysis is used to investigate the sensitivity of the pressure gauge. Also the thermal interactions between the micro Pirani gauge and bolometer FPAs are verified. From the fabricated prototype, the measured device TCR is about −0.8% K⁻¹ and the sensitivity about 1.84 × 10⁻³ W K⁻¹ mbar⁻¹.     

Implicit modeling from polygon soup using convolution

We present a novel method for creating implicit surfaces from polygonal models. The implicit function is defined by convolving a kernel with the triangles in the polygonal model. By adopting a piecewise quartic polynomial kernel function with a finite support, we derive a convolution model that has a closed-form solution, and thus can be efficiently evaluated. The user only needs to specify an effective radius of influence to generate an implicit surface of desired closeness to the polygonal model. The resulting implicit surface is fast to evaluate, not requiring accumulating evaluation results using any hierarchical data structure, and can be efficiently ray-traced to reveal the detailed features.     

Microinjection molded disposable microfluidic lab-on-a-chip for efficient detection of agglutination

Previous diagnosing methods based on agglutination have a limitation in view of emergency and point-of-care diagnoses due to the requirement of large scale equipments and much agglutination time. In this paper, we propose a low cost microfluidic lab-on-a-chip for more efficient detection of agglutination. In the present lab-on-a-chip, two inlet microwells, flow guiding microchannels, chaotic micromixer and reaction microwell are fully integrated. Mold inserts for the lab-on-a-chip were manufactured by UV photolithography and nickel electroplating process. The complete lab-on-a-chip was realized by the microinjection molding of cyclic olefin copolymer and the subsequent thermal bonding. The improved serpentine laminating micromixer, developed by our group, integrated in the lab-on-a-chip showed the high-level of chaotic mixing, thereby enabling us to get a reliable mixing of sample and reagent. The performance of the fabricated lab-on-a-chip was demonstrated by agglutination experiments with simulated bloods of 10 μl and simulated sera of 10 μl. The results of agglutination inside the reaction microwell were clearly read by means of the level of light transmission. The present microfluidic lab-on-a-chip could be widely applied to various clinical diagnostics based on agglutination tests.     

Automatic Task-Based Code Generation for High Performance Domain Specific Embedded Language

Providing high level tools for parallel programming while sustaining a high level of performance has been a challenge that techniques like Domain Specific Embedded Languages try to solve. In previous works, we investigated the design of such a DSEL—NT\(^2\)—providing a Matlab -like syntax for parallel numerical computations inside a C++ library. In this paper, we show how NT\(^2\!\) has been redesigned for shared memory systems in an extensible and portable way. The new NT\(^2\!\) design relies on a tiered Parallel Skeleton system built using asynchronous task management and automatic compile-time taskification of user level code. We describe how this system can operate various shared memory runtimes and evaluate the design by using two benchmarks implementing linear algebra algorithms.     

基于STM32的居民社区门窗禁控制系统

针对居民社区公共门窗管理不及时,耗费大量人力资源,且效率较低等问题,设计了一款基于STM32单片机的居民社区门窗禁控制系统.在传统的门禁控制系统的基础上,系统利用Zigbee无线传感网技术,实现门窗禁控制器之间的无线通讯.管理用户可以通过以太网远程控制系统,系统也可以根据传感器监测到的环境数据实现自动调节.同时,尝试采用一种基于频率捷变的分布式自适应干扰技术,解决系统在居民居住环境中遇到的Wifi网络信号干扰问题.最后,通过测试表明,该系统运行稳定,具有广泛的应用前景.     

SVM for English semantic classification in parallel environment

Semantic analysis is very important and very helpful for many researches and many applications for a long time. SVM is a famous algorithm which is used in the researches and applications in many different fields. In this study, we propose a new model using a SVM algorithm with Hadoop Map (M)/Reduce (R) for English document-level emotional classification in the Cloudera parallel network environment. Cloudera is also a distributed system. Our English testing data set has 25,000 English documents, including 12,500 English positive reviews and 12,500 English negative reviews. Our English training data set has 90,000 English sentences, including 45,000 English positive sentences and 45,000 English negative sentences. Our new model is tested on the English testing data set and we achieve 63.7% accuracy of sentiment classification on this English testing data set.     

A decision tree using ID3 algorithm for English semantic analysis

Natural language processing has been studied for many years, and it has been applied to many researches and commercial applications. A new model is proposed in this paper, and is used in the English document-level emotional classification. In this survey, we proposed a new model by using an ID3 algorithm of a decision tree to classify semantics (positive, negative, and neutral) for the English documents. The semantic classification of our model is based on many rules which are generated by applying the ID3 algorithm to 115,000 English sentences of our English training data set. We test our new model on the English testing data set including 25,000 English documents, and achieve 63.6% accuracy of sentiment classification results.