Plasma etching of high-k and metal gate materials

Etching characteristics of high-k dielectric materials (HfO₂) and metal electrode materials (Pt, TaN) have been studied in high-density chlorine-containing plasmas at pressures around 10 mTorr. The etching of HfO₂ was performed in BCl₃ without rf biasing, giving an etch rate of about 5 nm/min with a high selectivity of >10 over Si and SiO₂. The etching of Pt and TaN was performed in Ar/O₂ with high rf biasing and in Ar/Cl₂ with low rf biasing, respectively, giving a Pt etch rate of about several tens nm/min and a TaN etch rate of about 200 nm/min with a high selectivity of >8 over HfO₂ and SiO₂. The etched profiles were outwardly tapered for Pt, owing to the redeposition of etch or sputter products on feature sidewalls, while the TaN profiles were almost anisotropic, probably owing to the ion-enhanced etching that occurred.     

Stiffness-Damping Simultaneous Identification under Limited Observation

A more reliable and stable method, compared to the previous one developed by the present writers, of stiffness-damping simultaneous identification of shear-type building structures is proposed using stationary random records under limited observation. It is shown that when stationary random horizontal accelerations are recorded at the floors just above and below a specific story in a shear building model, the story stiffness and the damping ratio can be identified uniquely. The viscous damping coefficient and the material damping ratio can also be identified simultaneously in a numerical model structure. It is also shown that unfavorable effects by extraneous noises, including measurement noises, due to wind excitation, building facilities, and the motion of the occupants can be eliminated partially by using the present method. The accuracy of the present identification method is investigated through the actual records under limited observation in a base-isolated building.     

An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives

 We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic head tracking system of hard disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We realize the aspect ratio of 125 by the LIGA process using a Si-Au mask. We propose to use PMMA molds both as the mechanical structure and as the insulator between electrodes. We believe there are great opportunity for the LIGA process in making micro actuators of HDDs. Received: 25 August 1997 / Accepted: 24 October 1997     

Efficient distribution-free population learning of simple concepts

We consider a variant of the ‘population learning model’ proposed by Kearns and Seung [8], in which the learner is required to be ‘distribution-free’ as well as computationally efficient. A population learner receives as input hypotheses from a large population of agents and produces as output its final hypothesis. Each agent is assumed to independently obtain labeled sample for the target concept and output a hypothesis. A polynomial time population learner is said to PAC-learn a concept class, if its hypothesis is probably approximately correct whenever the population size exceeds a certain bound which is polynomial, even if the sample size for each agent is fixed at some constant. We exhibit some general population learning strategies, and some simple concept classes that can be learned by them. These strategies include the ‘supremum hypothesis finder’, the ‘minimum superset finder’ (a special case of the ‘supremum hypothesis finder’), and various voting schemes. When coupled with appropriate agent algorithms, these strategies can learn a variety of simple concept classes, such as the ‘high–low game’, conjunctions, axis-parallel rectangles and others. We give upper bounds on the required population size for each of these cases, and show that these systems can be used to obtain a speed up from the ordinary PAC-learning model [11], with appropriate choices of sample and population sizes. With the population learner restricted to be a voting scheme, what we have is effectively a model of ‘population prediction’, in which the learner is to predict the value of the target concept at an arbitrarily drawn point, as a threshold function of the predictions made by its agents on the same point. We show that the population learning model is strictly more powerful than the population prediction model. Finally, we consider a variant of this model with classification noise, and exhibit a population learner for the class of conjunctions in this model. This revised version was published online in June 2006 with corrections to the Cover Date.     

A new hybrid GA solution to combinatorial optimization problems— an application to the multiprocessor scheduling problem

The multiprocessor scheduling problem is one of the classic examples of NP-hard combinatorial optimization problems. Several polynomial time optimization algorithms have been proposed for approximating the multiprocessor scheduling problem. In this paper, we suggest a geneticizedknowledge genetic algorithm (gkGA) as an efficient heuristic approach for solving the multiprocessor scheduling and other combinatorial optimization problems. The basic idea behind the gkGA approach is that knowledge of the heuristics to be used in the GA is also geneticized alongiside the genetic chromosomes. We start by providing four conversion schemes based on heuristics for converting chromosomes into priority lists. Through experimental evaluation, we observe that the performance of our GA based on each of these schemes is instance-dependent. However, if we simultaneously incorporate these schemes into our GA through the gkGA approach, simulation results show that the approach is not problem-dependent, and that the approach outperforms that of the previous GA. We also show the effectiveness of the gkGA approach compared with other conventional schemes through experimental evaluation. This work was presented, in part, at the Second International Symposium on Artifiical Life and Robotics, Oita, Japan, February 18–20, 1997     

三水铝石的粉碎机械力化学效就与热特性

使用振动球磨机将三水铝石粉体进行干式微粉碎.粉碎实验条件为介质球/试样(质量比)=8.5.研究调查了不同粉碎时间处理粉碎试样的机械力化学效应(平均粒径、结晶无定形和加热特性).结果表明,长时间粉碎,达到粉碎平衡,平均粒径趋于极限值.粉碎过程中未脱水.由于粉碎,加热脱水温度、结晶相变温度降低.     

Phase Diagram of Hydrogen in Palladium

Hydrogen in palladium, Pd-H(D), is an interesting system because of the highly mobile hydrogen and the presence of a phase boundary below 100 K. Experimentally, however, the nature of this transition has not been established. Historically this transition around 55 to 100 K has been thought to be an order-disorder transition. Such a transition would produce a phase boundary with anomalies at specific hydrogen concentrations corresponding to the specific ordered structures. In order to check this phase boundary we have performed a detailed study of the hydrogen concentration dependence of the specific heat of PdH _x over the temperature range from below 0.5 K to above 100 K using PdH _x specimens with x up to 0.8753. The measured heat capacity has been analyzed as the sum of contributions due to the lattice specific heat of Pd, the electronic specific heat of PdH _x , and the excess contribution caused by hydrogenation of the specimen. The excess specific heat result shows a sharp peak which indicates a phase boundary with transition temperature T ₁=55 K to 85 K depending linearly on the hydrogen concentration from x=0.6572 to 0.8753. We do not observe anomalies at specific x values as would be expected for the specific ordered structures.     

Design and performance of compensator for decremental persistent current in HTS magnets using linear type magnetic flux pump

This paper has described the characteristics of a stationary linear type magnetic flux pump newly developed this time. The linear type flux pump aims to compensate a little decremental persistent current of the HTS magnet in NMR and MRI systems. The flux pump mainly consists of DC bias coil, 3-phase AC coil and Nb foil. Analytical results by the FEM are proved to nearly agree with experimental ones. In the experiment, it has been investigated that the flux pump can effectively charge the current in the load coil of 1.3 mH for various frequencies in 150 s under two following conditions: (1) DC bias of 10 A and AC of 4 A_rms, (2) DC bias of 10 A and AC of 5 A_rms. The maximum magnitudes of initial increasing rate of pumping current and load magnet voltage are: (1) 0.2 A/s and 25 mV and (2) 0.22 A/s and 34 mV, respectively.     

Magnetic Behavior of Some Rare-Earth Transition-Metal Perovskite Oxide Systems

Magnetic properties were investigated for the rare-earth 3d-transition metal oxides with the perovskite structure. Intriguing magnetic phenomena were reviewed for a few systems:magnetization peak effect in the titanates, magnetization reversal in the chromites and metallic ferromagnetism in the cobahites. The results suggest an important role of the rare-earth ions for the magnetic properties of such complex oxides.     

Bending Behavior of Steel Pipe Girders Filled with Ultralight Mortar

Bending behavior of steel pipes filled with ultralight mortar was studied by bending tests using a steel pipe, steel pipes filled with ultralight mortar, and steel pipes filled with light aggregate concrete and normal concrete. The steel pipe model filled with normal concrete had 1.8 times higher bending strength than the steel pipe model. The bending behavior of the steel pipe filled model with ultralight mortar was not improved when the compressive strength of the ultralight mortar was less than 1 MPa. However, ductility was much improved when the compressive strength was over 5 MPa, and the ultimate steel strain was more than double of the steel pipe model. The strains of steel and concrete in all the models were proportional to the distance from the neutral axis until the steel plate yielded. A simple analytical method was proposed to calculate the bending moments of the ultralight mortar filled steel pipes. The calculated values agreed very well with the test results.