Measurements of distribution of self-bias potential on an RF-plane electrode in plasma etching devices

The self-bias potential (V_dc) induced on an RF-powdered electrode (153 mm Ø) in a plasma is measured using electrical probes which are buried in, de-insulated from, and RF-connected to the electrode. The configuration of the probes allows to study the distribution of V_dc discretely on the electrode. The potential is homogeneous in the absence of external magnetic field. In the presence of a homogeneous magnetic field parallel to the electrode, it is reduced and a monotonous gradient takes place in its distribution due to the plasma shift induced by E × B drift. When the magnetic field is rotated along the axis of the RF-electrode at a frequency less than 50 Hz, the distribution, which is almost identical to the one in a static field, rotates with the magnetic field. On the coordinate system rotating with the magnetic field, the probes are regarded to be rotating. The potential distribution is obtained as a continuous function of the azimuthal angle. Thus the rotation of the field provides information for the experimental interpolation.     

An equation of state for 1,1-difluroethane (HFC 152a)

An equation of state for 1,1-difluoroethane (HFC 152a, CH₃CHF₂) has been developed on the basis of reliable experimental data including PVT, liquid C_p, and saturated-liquid-density data measured by our group. It is a non-dimensionalized virial equation whose functional form is the same as that originally developed for 1,1,1,2-tetrafluoroethane (HFC 134a) in our group. The effective range is for pressures up to 15 MPa, temperatures from 230 to 450 K, and densities to 1000 kg m⁻³. The equation represents reliable PVT measurements within ± 1% in pressure for the superheated vapour and supercritical fluid, while within ±0.5% in density for the compressed liquid. In addition, it should be noted that the equation represents the other essential thermodynamic properties including vapour pressures, saturated-liquid/ vapour densities, isobaric/isochoric specific heats and sound velocity in both the liquid and gaseous phase of HFC 152a.     

New balance ground relay for parallel four-circuit transmission lines

A 66-kV network generally is grounded through a neutral grounding resistor. In this network a single-phase ground-fault current is limited to as small as 100 to 400 A. There are parallel four-circuit transmission lines mounted on the same tower in the 66-kV network. In such transmission lines, the load and the fault currents could induce circulating current that flows through the lines. Since the circulating current has zero-phase-sequence and negative-phase-sequence components, it could cause unwanted operation of a balance ground relay using zero-phase-sequence current. However, it is difficult to compensate for the circulating current by the conventional vector compensation scheme. This paper presents a new balance ground relay to deal with the circulating current. In the relay from the ground-fault inception until first tripping, the difference current Δ3I_2d of negative-phase-sequence current 3I_2d of the differential current between two protected lines is used as an input current. The Δ3I_2d is the difference current of 3I_2d between, before and during faults. After the first tripping, the difference current of positive-phase-sequence load current and zero-phase-sequence current of the forementioned differential current are used as an input current. Consequently, a higher sensitivity of the ground-fault protection for these lines has been achieved. The correct operation of the new balance ground relay was confirmed when a single-phase-ground-fault occurred in the parallel four-circuit transmission lines, to which the relay is applied.     

The gamma-ray-induced crosslinking of polyacrylamide

The gamma-ray-induced crosslinking of polyacrylamide was carried out under various conditions. The molecular weight of the polymer before inrradiation was found to be the most important factor for crosslinking. When polymers have low molecular weights such as 80,000, the intensity of radiation, the external pressure applied, and the water content of the polymer powder became important for crosslinking. Although the polycrylamide hydrogel can be obtained directly by irradiating the monomer, it was obtained more conveniently by the irradiation of monomer—polymer mixtures. The hydrogels obtained by the radiation with a dose of over 50 kgray, absorb water by 1000–1500 wt %.     

Morphology of thin anatase coatings prepared from alkoxide solutions containing organic polymer,affecting the photocatalytic decomposition of aqueous acetic acid

Porous anatase coatings were prepared from alkoxide solutions containing organic polymer by a dip-coating technique. The morphology of the coatings, such as pore size, pore distribution and thickness, was controlled. The effects of the morphology of the porous anatase coatings on the photocatalytic activity for the photocatalytic decomposition of aqueous acetic acid were examined.     

Preparation and photoconduction of rapidly quenched films in the Bi2O31bM2O5 system (M=V,Nb and Ta)

The Bi₂O₃1bM₂O₅ films (M=V, Nb and Ta) were prepared by a rapid quenching technique using a twin-roller type equipment. Quenched film of pure Bi₂O₃ partially precipitated a tetragonal phase which differs from well-known β-Bi₂O₃ in structure. In every (Bi₂O₃)_0.975 (M₂O₅)_0.025 composition (2.5% M₂O₅), the tetragonal phase was obtained as single phase, and the tetragonality became greater than that of the pure Bi₂O₃. Beyond this composition, the tetragonality decreased to form δ-phase with a fcc structure with increasing the M₂O₅ content. The lowest V₂O₅ content forming a δ-phase was 5%, while a slight tetragonality still remained in the samples containing 10% Nb₂O₅ and 10% Ta₂O₅, respectively. From the measurement of the photoconductivities of the quenched films, it was proved that a photoconduction appeared in the tetragonal phase while no photoconductivity was observed in the cubic phase. The characteristic of the photoconduction was that a remarkable decrease in the resistivity was observed when a light of ca. 500 nm in wave length was irradiated on the films.     

TRVs and fault clearing stresses in extra-high-voltage radial networks

To cope with the high rate of increase of power demand in the main industrialized districts in Japan, 550-kV transmission systems covering the districts have been reinforced, with most of the main power plants connected directly to these systems. Through 550-/300-kV substations, the majority of power to the districts is supplied by 300-kV systems. To limit the excess short-circuit capacity in the 300-kV systems, they tend to be reconstructed as so-called radial networks. In radial networks with high short-circuit capacity and relatively small number of transmission lines connected to the substation busbars, the rate of rise of TRV can be far higher than standard value. This paper analyzes the transient recovery voltages (TRV) in such extra-high-voltage radial networks in Japan, together with the relevant stresses to circuit-breakers during fault clearings. Future system conditions have also been introduced. As the typical rate of rise of the TRV values, more than twice that of today's standard ones are probable.