A novel MOSFET with vertical signal‐transfer capability for 3D‐structured CMOS image sensors

We have developed a novel MOSFET that can transfer signals vertically without through‐silicon vias but by using a fully depleted silicon‐on‐insulator (FDSOI) structure with its source region connected to the back electrodes as well as the front ones. A prototype MOSFET fabricated using the backside anisotropic wet etching technique has confirmed that the electrical characteristics measured from the front and the back electrodes are identical. The subthreshold factor S of the prototype was found to be 64.5 mV/decade, suggesting a good switching performance. Since the double‐sided MOSFET has vertical signal‐transfer capability and excellent operating characteristics, it is expected to contribute to developing a More‐than‐Moore type device of three‐dimensional integration such as pixel‐parallel image sensors. © 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.     

A behavioral model for optically powered OCT endoscope with a micro electrostatic vertical‐comb optical scanner

This paper presents a novel device architecture for optically actuated microelectromechanical systems (MEMS) endoscopes for optical coherence tomography (OCT) measurement. A 10‐mW infrared light beam at a wavelength of 1.5 µm is transferred through the single‐mode fiber to provide a scanning MEMS mirror with the drive voltage (maximum 11 V) by exciting a photovoltaic cell, while also providing with a secondary light beam at a wavelength of 1.3 µm for the OCT measurement. An electrostatic vertical comb‐drive optical scanner (1.5 mm × 2.0 mm × 0.5 mm) has been developed by using the deep reactive ion etching (DRIE) of a silicon‐on‐insulator (SOI) wafer. The design of the scanner module is discussed, along with the experimental results of electrostatic operation. An equivalent circuit model for the optical scanner is developed to explain the behavior of the optically powered actuation mechanism, including the hysteresis loop in the frequency response and the voltage dependence of oscillating angle (mechanical peak ±3.2°/7 V around the resonance frequency of 250 Hz). OCT measurement of a tissue is demonstrated to reconstruct the cross‐sectional image of a fingerprint at a resolution of lateral 40 µm × vertical 8 µm and penetration depth of 2.5 mm. © 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.     

Dependence of property, cathode characteristics, thermodynamic stability, and average and local structures on heat-treatment condition for LiNi0.5Mn0.5O2 as a cathode active material for Li-ion battery

LiNi_0.5Mn_0.5O₂ was heat-treated under high oxygen-pressure and Ar-reducing conditions, and then the cathode properties, thermodynamic stability and average and local structures were investigated. From X-ray diffraction and ICP measurements, it was found that the pristine LiNi_0.5Mn_0.5O₂ had a single phase of the layered rock-salt structure although the Ni content was slightly rich compared with the nominal one. These characteristics were kept even after the heat-treatments. Charge–discharge cycle tests clarified that the cycle performance of LiNi_0.5Mn_0.5O₂ was improved by both the reducing and oxidizing treatments. From neutron diffraction and X-ray absorption fine structure measurements, the local distortion around the transition metal, especially Ni, was supposed to be one of the important factors to determine the cathode properties. It was also found that the sample with higher thermodynamic stability exhibited better capacity retention in the discharge–charge cycle tests.     

Optical and adhesive properties of composite silica-impregnated Ca-α-SiAlON:Eu2+ phosphor films prepared on silica glass substrates

The compaction of a Eu-doped Ca-α-SiAlON phosphor powder was performed by electrophoretic deposition (EPD). The effect on the adhesion and optical properties of the silica precursor as both a binder of the powder and a filler of the air voids were evaluated. The adhesion of the silica impregnated composite film to the silica glass substrate was characterized by the tape test. The improvement of the external quantum efficiency was confirmed from the PL spectra measurement after the silica impregnation. The temperature dependence of the external quantum efficiency was also investigated in order to discuss the advantage of using the silica precursor as a binder for high-brightness LED applications.     

Utilization of a Biodegradable Mulch Sheet Produced from Poly(Lactic Acid)/Ecoflex?/Modified Starch in Mandarin Orange Groves

We have developed a mulch sheet made by inflation molding of PLA, Ecoflex^® and modified starch, which all have different biodegradabilities. A field test of use as an agricultural mulch sheet for mandarin oranges was carried out over two years. The mechanical properties of the mulch sheet were weakened with time during the field test, but the quality of the mandarin oranges increased, a result of the controlled degradation of the sheet. The most degradable modified starch degraded first, allowing control of the moisture on the soil. Accelerator mass spectroscopy was used for evaluation of the biomass carbon ratio. The biomass carbon ratio decreased by degradation of the biobased materials, PLA and modified starch in the mulch sheet.     

Identifying network density and scale economies for Japanese water supply organizations

Within this analysis we determine the optimal size (that is, with the minimum average cost) of a water supply enterprise and reconsider the matter of scale economies, using sample data from Japanese water supply organizations. After surveying evidence from previous studies of scale economies in the water supply industry, we estimate cost functions with three different cost models: the log-linear, translog and translog with a hedonic function. We obtain the result that economies of network density do exist, but that there are slight diseconomies of scale at the sample mean point. The optimal size of a water supply organization would be one supplying a population of approximately 766,000 people. Received: 10 March 2000 / Accepted: 8 January 2001     

The nanostructuring of materials for device and sensor applications

This paper reviews advances in nanotechnology and includes a discussion of microelectronics and microsystems. The main emphasis is on silicon technology, where the electrical properties are used in circuit applications and the mechanical properties are used in a growing range of sensor and micromechanical applications     

Variation in In-Plane Stress during Densification and Crystallization of Titania Gel Coatings Deposited on Different Substrate Surfaces

Titania gel films were prepared from a coating solution with a starting mole ratio of Ti(OC₃H₇ⁱ)₄:H₂O:HNO₃:C₂H₅OH=1:1:0.2:30 on Si(100) wafers by spin coating, with and without sol–gel-derived, fired silica, and titania underlayers. In situ measurement was conducted on the in-plane stress in the titania gel films during heating up to 500°C at 5°C/min. Basically, for all the gel films, the in-plane, tensile stress increases once with increasing temperature, and then decreases around the temperature of crystallization. The increase in stress was thought to result from the capillary pressure due to solvent evaporation and from the densification of the coatings. The reduction in stress around the temperature of crystallization was ascribed to the accelerated atomic diffusion in the coatings and to the difference in thermal expansion coefficient between the coatings and the Si wafer. However, when the stress–temperature curves were examined more in detail, differences were found in the variation in stress, depending on the underlayers. Then, the question of how the underlayers could induce the crystallization and relax the strain in the coatings was discussed.     

Optical properties of photoluminescent polycrystalline CuLa0.98Eu0.02O2 thin film prepared by pulsed laser deposition at room temperature

Smooth CuLa_0.98Eu_0.02O₂ thin film has successfully been prepared by pulsed laser deposition method at room temperature. Crystal structure of the obtained film was almost same as that of CuLa_0.98Eu_0.02O₂ polycrystalline ceramic. Orange luminescence with high intensity due to ⁵D₀ – ⁷F_0,1 transitions of Eu³⁺, which was an evidence of Eu³⁺ substitution for La³⁺ site in LaO₆ octahedra with the inversion symmetry, was also observed in the obtained film. The optical band gap of CuLa_0.98Eu_0.02O₂ was measured to be 2.85 eV from absorption spectroscopy.