The effect of surface roughness on the radiative properties ofpatterned silicon wafers

The radiative properties of patterned silicon wafers have a major impact on the two critical issues in rapid thermal processing (RTP), namely wafer temperature uniformity and wafer temperature measurement. The surface topography variation of the die area caused by patterning and the roughness of the wafer backside can have a significant effect on the radiative properties, but these effects are not well characterized. We report measurements of room temperature reflectance of a memory die, logic die, and various multilayered wafer backsides. The surface roughness of the die areas and wafer backsides is characterized using atomic force microscopy (AFM). These data are subsequently used to assess the effectiveness of thin film optics in providing approximations for the radiative properties of patterned wafers for RTP applications     

On the ontological expressiveness of information systems analysis and design grammars

Abstract. Information systems analysis and design (ISAD) methodologies provide facilities for describing existing or conceived real-world systems. These facilities are ontologically expressive if they are capable of describing all real-world phenomena completely and clearly. In this paper we formally examine the notion of the ontological expressiveness of a grammar and discuss some of its implications for the design and use of ISAD methodologies. We identify some generic ways in which ontological expressiveness may be undermined in a grammar and some potential consequences of these violations. We also examine ontological expressiveness within the context of some other desirable features that might be considered in the design of ISAD methodologies.     

Probing the early stages of polymerization of ethylene on a model chromium/silica catalyst by Fourier transform infrared spectroscopy

The nature of the interaction of monomer, and the early stages of growth of oligomers of ethylene on a rather more uniform surface of Cr/SiO₂ catalyst than hitherto studied has been investigated by differenceFTIR spectroscopy using C₂D₄ and C₂H₄ as reactants both with and without subsequent treatment of the catalyst with CO andTHF. The active catalyst was prepared by reaction of vapour phase CrO₂Cl₂ with the vicinal hydroxyls of the silica surface. Three distinct kinds of methylene groups were detected. Arguments are given for assigning the peaks at 2935 and 2860 cm^–1 to CH₂ groups directly bound to the active site and those at 2920 and 2850 to CH₂s in the growing chain well removed from the Cr. The peaks at 2160 and 2165 cm^–1 are attributed to CD₂ groups hydrogen bonded to surface hydroxyls.     

Middle cerebral artery main stem thrombosis in two siblings with familial thrombotic thrombocytopenic purpura

Idiopathic thrombotic thrombocytopenic purpura (TTP) is frequently complicated by microinfarcts in cerebral cortex and subcortical white matter. We describe two sisters who suffered massive hemispheric infarction due to thrombosis of the middle cerebral artery main stem during exacerbations of TTP. Acute TTP may be associated with intraluminal thrombosis of large-diameter arteries in addition to arterioles and capillaries.     

Dynamic effects in hot-carrier degradation relevant for CMOS operation

We describe different dynamic degradation effects in n- and p-MOSFETs as they are clearly proven and generally accepted to date. It turns out that they are connected with time constants in the oxide and at the interface and that time constants related to the device operation are too short to be relevant in this context. The effects are detrapping of fixed charges, the slow movement of holes in the oxide, an enhanced-degradation effect caused by alternating voltage conditions, during dynamic stress, and a post-stress interface state formation effect in nitride passivated n-MOSFETs. Furthermore, we discuss the relevance of those effects, under different operation conditions, finding that the fast non-stationary effects are of little significance. Only the “slow” effects, with time constants of seconds and above, play a role in reliability issues of MOSFETs.     

The use of force modulation microscopy to investigate block copolymer morphology

Force modulation microscopy (FMM) is used to characterize the external surface and internal fracture surface morphologies of three different block copolymer samples. A roll-cast poly(styrene-butadiene-styrene) triblock copolymer film, spin-coated poly(styrene-b-methyl methacrylate) thin films, and an ultrathin poly(styrene-b-hexyl isocyanate) rod-coil block copolymer film were investigated. For each sample, height and elasticity images were obtained for the same areas allowing direct comparison. The elasticity images obtained using force modulation microscopy were independent of surface roughness and found to exhibit better contrast and spatial resolution of the respective block copolymer domains than the height images. The lateral resolution of the elasticity images was sufficient to show microphase separated domains having length scales as small as about 10 nm. The poly(styrene-b-methyl methacrylate) samples demonstrate that FMM can even be successfully used to study block copolymers in which both blocks are glassy under the conditions of measurement.     

Software for dynamic reconfigurable order picking systems

This paper describes an approach, conceptual framework, and software architecture for dynamic reconfiguration of the order picking system. The research and development project was sponsored by the Material Handling Research Center (MHRC), a National Science Foundation sponsored Cooperative Industry/University Research Center. The storage configuration is assumed to be an in-the-aisle order picking system in which stockkeeping units (SKUs) can occupy variable capacity storage locations and stock-splitting is allowed among zones (clusters). The product mix may include multiple product families with different life cycles, correlated demand within families and commonality of demand across families.