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101.
A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR/R through an integral (the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object) and compare the theoretical values with the experimental results. Compared with the traditional method, this novel calculation method is more accurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor. 相似文献
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Jyh-Jier Ho Fang Y.K. Lee W.J. Chen F.Y. Hsieh W.T. Ting S.F. Ju M.S. Huang S.B. Kun-Hsien Wu Chen C.Y. 《Electron Devices, IEEE Transactions on》1999,46(12):2289-2294
Both theoretical and experimental studies of the substrate effect on the thermal behavior of a PbTiO3 infrared (IR) sensor have been reported. With active cantilever dimensions of 200×100×5 μm3 formed by etching processes, the pyroelectric micro-electro-mechanical system (pyro/MEMS) structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure under the 800-μW incident optical light with wavelength of 970 nm. Two-order improvement in current responsivity is obtained for the pyro/MEMS structure. This shows the substrate effect on the performance of a pyro/MEMS IR sensor is very significant. A simple model has also been proposed to illustrate the substrate effect more comprehensively 相似文献
105.
光电导太赫兹源(Photo-Conductive Antenna,PCA)已广泛用于太赫兹时域光谱系统(THz-TDS)。在THz-TDS系统中,处于偏置状态的PCA被飞秒激光触发因光生载流子,在偏置电场下的加速运动而向自由空间辐射太赫兹波,同时在PCA偏置回路中形成脉冲电流。通常给PCA加载偏置电压的回路有不同结构的电路设计,导致PCA装架的基板回路不可避免地存在一定电感,由此引起的电磁惯性会显著影响回路中脉冲电流的脉宽,电流脉冲的脉宽会随回路电感的增大而展宽。那么PCA回路电感是否会影响PCA向自由空间辐射THz波的特性,这是设计PCA基板电路面临的问题所在。本文尝试在PCA回路中加入不同电感值的电感元件,通过实验测试了PCA辐射THz波的时域波形和频谱,结果表明,PCA回路电感的数值对PCA辐射THz波没有明显影响,从而对不同场合应用的PCA基板结构和电路设计提供了实验基础。 相似文献
106.
Congcong Cai Xinyuan Li Ping Hu Ting Zhu Jiantao Li Hao Fan Ruohan Yu Tianyi Zhang Sungsik Lee Liang Zhou Liqiang Mai 《Advanced functional materials》2023,33(24):2215155
Introducing anionic redox in layered oxides is an effective approach to breaking the capacity limit of conventional cationic redox. However, the anionic redox reaction generally suffers from excessive oxidation of lattice oxygen to O2 and O2 release, resulting in local structural deterioration and rapid capacity/voltage decay. Here, a Na0.71Li0.22Al0.05Mn0.73O2 (NLAM) cathode material is developed by introducing Al3+ into the transition metal (TM) sites. Thanks to the strong Al–O bonding strength and small Al3+ radius, the TMO2 skeleton and the holistic TM–O bonds in NLAM are comprehensively strengthened, which inhibits the excessive lattice oxygen oxidation. The obtained NLAM exhibits a high reversible capacity of 194.4 mAh g-1 at 20 mA g-1 and decent cyclability with 98.6% capacity retention over 200 cycles at 200 mA g−1. In situ characterizations reveal that the NLAM experiences phase transitions with an intermediate OP4 phase during the charge–discharge. Theoretical calculations further confirm that the Al substitution strategy is beneficial for improving the overlap between Mn 3d and O 2p orbitals. This finding sheds light on the design of layered oxide cathodes with highly reversible anionic redox for sodium storage. 相似文献
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Jyh-Jier Ho Y. K. Fang M. C. Hsieh S. F. Ting G. S. Chen M. S. Ju 《International Journal of Electronics》2013,100(6):757-767
Based on computer finite-element analysis ANSYS 5.3 and microelectromechanical systems (MEMS) technologies, a micropressure sensor was designed and fabricated. The sensor can be used to measure the distribution of normal stress between soft tissues on an above-knee amputee's skin and the contacting surface of a rehabilitation device. A square membrane with dimensions 2400 µm × 2400 µm × 80 µm is formed by backside photolithography and wet etching of an n-type ?100? monolithic silicon wafer. On the middle of the membrane edge, an X-shaped silicon wafer was implanted with boron ions and then enhanced by diffusion to form a piezoresistive strain gauge. In the design process, a finite-element method is used to analyse the effects of pressure sensitivity and its temperature coefficients. The developed micropressure sensors, which have smaller weight and volume than a conventional machine type, perform well and fit our design specifications. 相似文献
110.
传统的利用光纤Bragg光栅(FBG)反射光作为长周期 光纤光栅(LPFG)入射光的解调方式,无法避免温度的影响。本文提出了一种具有温度补偿功 能的LPFG功率解调方案,将FBG的Bragg波长由压电陶瓷(PZT)的驱动电压控制,使得FBG谐振 波长始终跟随LPFG谐振波长, 以此抵消温度对传统功率解调中的影响。这种解调方案适用于LPFG透射光谱随物理量变化谱 形也发生变化的传感,如微 弯、横向负载等特性。利用本系统对LPFG的横向负载特性进行试验,结果表明,采用此解调 方案获得的实验数据具有与 光谱仪相同的功率变化趋势,能够始终监测LPFG的谐振峰幅值,实现温度补偿的功率解调, 更适合于动态解调。对LPFG 的温度特性进行功率解调实验,结果也验证了解调系统具有温度补偿功能。 相似文献