A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology.     

基于规则的光学邻近矫正中规则的相关处理

讨论了如何选择适当的规则,如何建立简洁实用的规则库,如何应用规则库.提出了四种主要的光学邻近矫正规则,在实验结果中列举了规则库中的部分数据.利用规则矫正后的版图光刻得到的硅片图形有了明显的改善.规则库的自动建立部分 (OPCL)是基于规则的光学邻近矫正系统的重要组成部分.     

An efficient mixed algorithm of L-MEI and DDM for the wavescattering by a concave cylinder

In this paper, a localized MEI method (L-MEI) is developed and combined with the domain decomposition method (DDM) for the simulation of scattering by a concave cylinder. In the L-MEI, the whole domain is decomposed into many subdomains. Different from the conventional MEI method, the MEI coefficients of the L-MEI method in each subdomain are only dependent on the localized metrons that are defined in the subdomain. The localization of metrons has the following advantages: (1) speeding up the calculation of MEI coefficients and saving memory, (2) making the MEI method available for concave structures, and (3) obtaining a band sparse matrix directly without any modification     

MEMS移相器及其在微型通信系统中的应用

从传统移相器的构造和原理出发，进一步分析了MEMS移相器的结构、特性。结果表明，MEMS移相器具有传统移相器所无法比拟的体积小、损耗小、成本低、频带宽、易于集成等突出优点。随着高阻硅衬底在微波领域应用的扩展，MEMS移相器介质损耗大幅度降低，将能与信号处理电路一同集成于硅衬底上，便于相控阵雷达等通信系统实现微小型化。     

基于数字信号处理器的直流电机控制系统

介绍了定点数字信号处理器（DSP）TMS320F240的一般性能及其在永磁无刷直流电机控制上的应用，给出了硬件设计方案、软件策略及输出结果。     

直接氯化法合成对硝基氯化苄

介绍了以对硝基甲苯和氯气为原料 ,在催化剂存在下合成对硝基氯化苄的方法 ,考察了催化剂种类、反应温度、溶剂配比等因素对反应的影响 ,优化的反应条件为 :对硝基甲苯用量 1 3 7g,对硝基甲苯 /邻二氯苯 (摩尔比 ) =1∶ 0 .6,w (偶氮二异丁腈 ) =0 .6% ,反应时间 3 h,反应温度 1 60℃ ,产物单程收率大于 65 % ;将反应混合物中未反应的原料分离后 ,以无水乙醇为溶剂结晶纯化 ,物料 /溶剂 (摩尔比 ) =1∶ 1 .5时晶体含量在 99.0 %以上 ,结晶收率达 67     

模糊数学识别火山岩岩性

针对火岩地层岩性识别成功率低的状况，应用模糊数学原理，建立模糊数学识别火山岩岩性模式，识别和划分火山岩地层岩性，以便进一步深入研究火山岩油气藏储层，选择8个反映火山岩岩性测井参数，确定阈值；利用所建立的火山岩岩性识别模式，对火山岩岩性进行分类；依据最大隶属原则，识别火山岩岩性，应用实地研究资料，识别10种火山岩岩性，并与岩心鉴定统计分析结果对比，一致性达85％。表明该方法识别火山岩岩性精度较高，在地质上具有很好的应用前景。     

由乙腈一步法制备乙酸丁酯的研究

以丁醇和制备丙烯腈的副产物乙腈为原料 ,采用一步法合成了乙酸丁酯。通过正交实验得到了影响反应的 4种因素。确定了最佳的工艺条件为 :催化剂的量为样品质量的 40 % ;n(CH3CN)∶ n(C4 H9OH) =1∶ 1 .0 5 ;反应温度为 1 0 5℃ ;反应时间为 8h。在此反应条件下 ,乙酸丁酯的收率为 88.8% ,纯度可达 99.5 %。并用气相色谱及红外光谱对产品的纯度进行了表征     

浅析嵌入式电脑及其发展趋势

主要介绍嵌入式电脑的构成特点、应用与发展前景。     

Improvement of RCA transistor using RTA annealing after theformation of interfacial oxide

A polysilicon emitter RCA transistor (an ultra-thin interfacial oxide layer exists between polysilicon and silicon emitter) is presented which can operate at 77 K for the first time. An ultra-thin (1.5 nm) interfacial oxide layer is grown deliberately between polysilicon and silicon emitter using RCA oxidation and excellent device stability is obtained after rapid thermal annealing (RTA) treatment in nitrogen atmosphere. The RCA transistor exhibits good electrical performance at very low temperature for an emitter area of 3 × 8 μm². The maximum toggle frequency of a 1:2 static divider is 1.2 GHz and 732 MHz at 300 K and 77 K, respectively