We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic
head tracking system of hard disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We
realize the aspect ratio of 125 by the LIGA process using a Si-Au mask. We propose to use PMMA molds both as the mechanical
structure and as the insulator between electrodes. We believe there are great opportunity for the LIGA process in making micro
actuators of HDDs.
Received: 25 August 1997 / Accepted: 24 October 1997 相似文献
In this paper, we present Robot Entertainment as a new field of the entertainment industry using autonomous robots. For feasibility studies of Robot Entertainment, we have developed an autonomous quadruped robot, named MUTANT, as a pet-type robot. It has four legs, each of which has three degree-of-freedom, and a head which also has three degree-of-freedom. Micro camera, stereo microphone, touch sensors, and other sensor systems are coupled with newly developed behavior generation system, which has emotion module as its major components, and generates high complex and interactive behaviors. Agent architecture, real-world recognition technologies, software component technology, and some dedicated devices such as Micro Camera Unit, were developed and tested for this purpose. From the lessons learned from the development of MUTANT, we refined the design concept of MUTANT to derive requirements for a general architecture and a set of interfaces of robot systems for entertainment applications. Through these feasibility studies, we consider entertainment applications a significant target at this moment from both scientific and engineering points of view. 相似文献
Based on the comparative review of several approaches to legacy system conversion and revitalization, the Lyee methodology application for the issue is presented to clarify its idea, the associated procedure, and the implemented tools. It could be said that with the tools and manual developed by ICBSM&T, the mechanical transformation of the conventional program to a Lyee-structured one becomes possible as long as the programs are made in a procedure-oriented language. In addition to the program structure conversion, the Lyee methodology permits people to choose any application language in the transformed program. At the same time, quite a new approach related to the system conversion is introduced, in which the chunk of data extracted from an old program is edited to make a new conventional structure program that has a logical sequence instead of a Lyee type of declarative program. These features can be realized through the concept of LyeeBELT, which is a set of word-information about the attributes, formulae, and conditions for an independent data item.
The overall workflow of the legacy program transformation is shown in the following.
A critical part in its implementation is the feasibility study (pre-analysis) stage where necessary information is supposed to be secured, and an appropriate plan and policy about the system to be revitalized in the new system environment should be clarified so as to customize the tools accordingly. If the initial process is completed, the mechanical legacy system conversion will be realized by registering the parameters in the tool, and the reestablishment of business knowledge in the LyeeBELT will be enabled. With the regulated business logic on the LyeeBELT, the program maintenance afterwards becomes drastically simplified and stable without the ‘spaghetti’ problem, so that software evolution can be possible. 相似文献
High voltage electron microscopy has shown numerous advantages for the study of natural science, including biology, but it is especially useful in materials science. The most important advantage for materials science is in-situ experiments on detailed processes of the same phenomena that occur in bulk materials. For such in-situ experiments, the specimens should be thicker than a few microns to observe the behavior of lattice effect. The maximum observable thickness of the specimens and other advantages markedly increase with increasing accelerating voltage, and since 1965, two 3 MV instruments have been installed. The present paper is mainly concerned with these 3 MV electron microscopes and their applications to new research fields. 相似文献
Measurements of the residual stress and observations of the microstructure at the surface and in the subsurface of rollers were performed during rolling contact fatigue tests of annealed 0.45% carbon steel and case-hardened nickel-chromium steel rollers. Compressive residual stresses in annealed rollers were induced by the rolling contact. With case-hardened rollers they were induced by heat treatment prior to the rolling contact fatigue tests. After the rolling contact fatigue tests the compressive residual stresses on the surface of the annealed rollers and in the subsurface of the case-hardened rollers relaxed; a characteristic substructure was formed by the stress cycles, which caused surface failure. It was confirmed that the microcracks leading to surface failure initiate on the surfaces of annealed rollers and in the subsurface of case-hardened rollers. 相似文献
The capacity of distributed generators (DGs) connected to the grid by inverters is growing year after year. The inverters are generally controlled by a phase locked loop (PLL) in order to achieve synchronization with the power system frequency. Power systems may become unstable as the capacity of the inverter‐type DGs continues to increase, because the inverter frequency is controlled just to follow the frequency determined by other synchronous generators. It has been suggested that inverters be controlled to behave like a synchronous generator. This concept is referred to as the virtual synchronous generator (VSG). In this paper, a control scheme for a VSG is presented, and the design method for the required energy storage and the capacity for grid stabilization control by a VSG is investigated by computer simulations. 相似文献
This work presents a varying trend of impact ignition threshold denoted by minimum impact velocity to trigger an ignition when the scale of the explosive changes. The effects of explosive scale factors on impact-induced reaction degree were investigated using Steven tests and numerical simulation for polymer-bonded explosive-C03 (a cyclotetramethylene tetranitramine [HMX]-based explosive) impacted by projectiles of various velocities. Two scale factors—that is, axial thickness and radius—were studied through various scale samples including Φ98 mm × 13 mm, Φ98 mm × 39 mm, Φ140 mm × 13 mm, and Φ140 mm × 39 mm. The velocities of projectiles and the impact and ignition processes were analyzed using a high-speed camera. The pressure histories were measured by embedded manganin pressure gauges and poly vinylidene fluoride stress gauges. The reaction overpressures of the explosive were obtained by blast pressure gauges to evaluate the reaction degree. The effects of explosive scale factor on reaction degree and characteristics under mild impact were summarized. In a certain range (larger than the diameter of the impact projectile), different sample diameters do not influence the velocity threshold, but the thickness of the samples does; that is, the velocity threshold increases with the thickness of the sample. The study also indicates that the ignition and explosion in Steven tests are mainly triggered by the overlapping of direct impact and reflected stress waves. Our numerical simulations results of pressure and ignition times are consistent with the experimental data. The obtained knowledge can be used to evaluate the safety of different scale HMX-based explosives under accidental impact or falls. 相似文献