Fabrication of ultrathin and highly uniform silicon on insulator by numerically controlled plasma chemical vaporization machining

Metal-oxide semiconductor field-effect transistors fabricated on a silicon-on-insulator (SOI) wafer operate faster and at a lower power than those fabricated on a bulk silicon wafer. Scaling down, which improves their performances, demands thinner SOI wafers. In this article, improvement on the thinning of SOI wafers by numerically controlled plasma chemical vaporization machining (PCVM) is described. PCVM is a gas-phase chemical etching method in which reactive species generated in atmospheric-pressure plasma are used. Some factors affecting uniformity are investigated and methods for improvements are presented. As a result of thinning a commercial 8 in. SOI wafer, the initial SOI layer thickness of 97.5+/-4.7 nm was successfully thinned and made uniform at 7.5+/-1.5 nm.     

高阶四边形单元的流形方法

在原有的三角形单元的流形方法的基础上，提出了高阶四边形单元的流形方法。该法简化了数学和物理网格，减少了小块物理覆盖的生成数量，采用解析解的单纯形积分，提高了应力和应变的计算精度。首先推导了四边形单元的权函数，并给出四边形单元的高阶位移方程的一般表达式。进一步推导了应变和应力以及单元的刚度矩阵等，最后通过具体实例验证了高阶四边形流形单元的计算应力和应变的准确性。     

Reliability of prototype microcapsule diffuser for speckle noise reduction in laser displays

A microcapsule diffuser of the transparent type is proposed to reduce the speckle noise generated on a laser display. This diffuser has a microcapsule that is secured between two transparent electrodes. The microcapsule contains light diffusion particles that are electrically charged. Because the particles in the microcapsules are moved by the electric field, the proposed device reduces speckle noise. This paper reports the results of one study of the device reliability.     

Removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machining

Optical mirrors used in extreme ultraviolet lithography systems require a figure accuracy and a roughness of about 0.1 nm rms. In addition, mirror substrates must be low-thermal-expansion materials. Thus, in this study, we processed two low-thermal-expansion materials, ULE [K. Hrdina, B. Hanson, P. Fenn, R. Sabia, Proc. SPIE 4688 (2002) 454.] (Corning Inc.) and Zerodur [I. Mitra, M.J. Davis, J. Alkemper, Rolf Müller, H. Kohlmann, L. Aschke, E. Mörsen, S. Ritter, H. Hack, W. Pannhorst, Proc. SPIE 4688 (2002) 462.] (SCHOTT AG), with elastic emission machining (EEM) in order to evaluate the removal properties. Consequently, we successfully calculated the respective removal rates, because removal volumes were found to be proportional to process times in EEM. Moreover, we demonstrated that the surface roughness of Zerodur is reduced to 0.1 nm rms in the spatial wavelength range from 100 μm to 1 mm.     

Effect of cholestyramine on bile acid metabolism in conventional rats

Effects of cholestyramine on biliary secretion of cholesterol, phospholipids and bile acids and fecal excretion of sterols and bile acids were examined in Wistar male rats. Six rats were fed a basal diet, and the other six were fed a basal diet supplemented with 5% cholestyramine for eight days. Bile flow and biliary secretion of bile acids and phospholipids (per hour per rat) decreased with cholestyramine treatment, while biliary cholesterol secretion (per hour per rat) remained unchanged. In the biliary bile acid composition, a marked increase of chenodeoxycholic acid with a concomitant decrease of β-muricholic acid was observed in cholestyramine-treated rats. Fecal excretion of total sterols and bile acids increased about three-and four-fold, respectively, after cholestyramine treatment. The increase of fecal bile acids derived from cholic acid was more predominant than that derived from chenodeoxylcholic acid, resulting in an increase of the cholic acid group/chenodeoxycholic acid group ratio.     

Comparisons of the mineral dust optical thickness retrieved from Geostationary Meteorological Satellite with ground-based radiometer measurements

Optical thickness of the Asian dust aerosols over the ocean near Japan was retrieved from the visible data of the Geostationary Meteorological Satellite (GMS-5) from April 7 to 22, 2002 using the method by Masuda et al. [Remote Sens. Environ. 82 (2002) 238] in which the nonsphericity of dust particles was taken into account. The retrieved optical thicknesses were then compared with those derived from the sunphotometer and the skyradiometer measurements. The mean and the standard deviation of the optical thickness difference, GMS minus radiometers, were −0.03 and 0.17, respectively, for 85 samples where the optical thickness ranges from 0.25 to 1.07.     

Acid-treated high-amylose corn starch suppresses high-fat diet-induced steatosis

Resistant starch (RS) has been reported to improve steatosis as well as obesity. Type 4 resistant starch (RS4), a chemically modified starch, is particularly hard to digest and suggesting higher efficacy. However, because the effects of RS4 on steatosis are not yet fully understood, the effects of RS4 on steatosis were examined using a murine high-fat diet model. Seven-week-old male mice were divided into three groups and fed a normal diet, a high-fat diet (HFD), or a high-fat diet with added RS (HFD + RS). Amylofiber SH^® produced from acid-treated corn starch was used as the dietary RS. At 22 weeks old, hepatic steatosis and short chain fatty acid (SCFA) content and gut microbiota in cecum stool samples were analyzed. The ratio of body weight to 7 weeks was significantly suppressed in the HFD + RS group compared to the HFD group (132.2 ± 1.4% vs. 167.2 ± 3.9%, p = 0.0076). Macroscopic and microscopic steatosis was also suppressed in the HFD + RS group. Analysis of cecum stool samples revealed elevated SCFA levels in the HFD + RS group compared with the HFD group. Metagenome analysis revealed that Bifidobacterium (17.9 ± 1.9% vs. 3.6 ± 0.7%, p = 0.0019) and Lactobacillus (14.8 ± 3.4% vs. 0.72 ± 0.23%, p = 0.0045), which degrade RS to SCFA, were more prevalent in the HFD + RS group than the HFD group. In conclusion, RS4 suppressed steatosis, and increased Bifidobacterium and Lactobacillus, and SCFAs. RS4 may prevent steatosis by modulating the intestinal environment.     

A numerical method for factorizing the rational spectral density matrix

Improving Rozanov (1967, Stationary Random Processes. San Francisco: Holden‐day.)’s algebraic‐analytic solution to the canonical factorization problem of the rational spectral density matrix, this article presents a feasible computational procedure for the spectral factorization. We provide numerical comparisons of our procedure with the Bhansali's (1974, Journal of the Statistical Society, B36 , 61.) and Wilson's (1972 SIAM Journal on Applied Mathematics, 23 , 420) methods and illustrate its application in estimation of invertible MA representation. The proposed procedure is usefully applied to linear predictor construction, causality analysis and other problems where a canonical transfer function specification of a stationary process in question is required.