电子束和接触式曝光机的混合曝光技术

Ⅰ线光致抗蚀剂可以同时实用电子束和光学系统曝光，在50kV加速电压下，其曝光剂量为50-100μC/cm^2，曝光后在0.7%NaOH溶液内显影1分钟。其灵敏度比PMMA快5倍，分辩率为0.5μm。采用两方法制备CaAsPHEMT：一种用Ⅰ线光致抗蚀剂，对源、漏及栅全部都采用电子束曝光，制备了0.5μm栅长的GaAs PHEMT；另一种将源、漏及栅分割成两部分，其中精细部分由电子束曝光，其余部分由光学系统曝光，用这种方法制备了0.25μm栅长的GaAs PHEMT。Ⅰ     

Use of weibull statistics to quantify property variability in TiAl alloys

Tensile experiments have been performed on specimens of four different investment-cast TiAl-based alloys with variations in casting conditions. The average ductilities obtained in these experiments vary between approximately 0.8 to 2.0 pct plastic strain to failure in tension. By using the three-parameter form of the Weibull relation, with the 0.2 pct offset yield strength as the minimum failure strength, the resulting variability in the data can be quantified and is found to be similar for those alloys with similar microstructural scale (grain size). Large variations in lamellar volume fraction, segregation, and phase distribution have a minor influence on property variability, compared to changes in the scale of the grain structure caused by either variations in cooling rate during casting or the addition of grain refiners.     

用化学腐蚀制备多孔硅太阳电池减反射膜的研究

采用HF HNO3溶液化学腐蚀 ,在硅片上制备减反射效果优良的多孔硅太阳电池减反射膜 ,借助原子力显微镜 (AFM)和X光电子谱 (XPS)对其表面形貌和成分进行观察 ,发现该膜与电化学阳极腐蚀得到的多孔硅具有相似性 ,其主要成分为非化学配比的硅的氧化物SiOx(X <2 )。采用带积分球的光度分光计 ,测得形成多孔硅减反射膜后 ,硅片表面反射率大大下降 ,,在波长 330～ 80 0nm范围反射率只有 1 5～ 2 9%。研究指出这种强减反射作用 ,与多孔硅具有合适的折射率及其多孔特性的光陷阱作用有关     

Deformation behavior of HCP Ti-Al alloy single crystals

Single crystals of Ti-Al alloys containing 1.4, 2.9, 5, and 6.6 pct Al (by weight) were oriented for 〈a〉 slip on either basal or prism planes or loaded parallel along the c-axis to enforce a nonbasal deformation mode. Most of the tests were conducted in compression and at temperatures between 77 and 1000 K. Trace analysis of prepolished surfaces enabled identification of the twin or slip systems primarily responsible for deformation. Increasing the deformation temperature, Al content, or both, acted to inhibit secondary twin and slip systems, thereby increasing the tendency toward strain accommodation by a single slip system having the highest resolved stress. In the crystals oriented for basal slip, transitions from twinning to multiple slip and, finally, to basal slip occurred with increasing temperature in the lower-Al-content alloys, whereas for Ti-6.6 pct Al, only basal slip was observed at all temperatures tested. A comparison of the critically resolved shear stress (CRSS) values for basal and prism slip as a function of Al content shows that prism slip is favored at room temperature in pure Ti, but the stress to activate these two systems becomes essentially equal in the Ti-6.6 pct Al crystals over a wide range of temperatures. Compression tests on crystals oriented so that the load was applied parallel to the c-axis showed extensive twinning in lower Al concentrations and 〈c+a〉 slip at higher Al concentrations, with a mixture of 〈c+a〉 slip and twinning at intermediate compositions. A few tests also were conducted in tension, with the load applied parallel to the c-axis. In these cases, twinning was observed, and the resolved shear for plastic deformation by twinning was much lower that that for 〈c+a〉 slip observed in compression loading. This article is based on a presentation made in the symposium entitled “Defect Properties and Mechanical Behavior of HCP Metals and Alloys” at the TMS Annual Meeting, February 11–15, 2001, in New Orleans, Louisiana, under the auspices of the following ASM committees: Materials Science and Critical Technology Sector, Structural Materials Division, Electronic, Magnetic & Photonic Materials Division, Chemistry & Physics of Materials Committee, Joint Nuclear Materials Committee, and Titanium Committee.     

Distribution of properties from sampling inhomogeneous materials by line transects

A theory related to the statistics of the structure and properties of inhomogeneous materials has been proposed, dealing with the distribution of properties from sampling of inhomogeneous structures by line transects. It is demonstrated that the empirical cumulative distribution functions of the intercepts from the microstructural constituents and their variances are important fingerprints of the inhomogeneous structures.Simulated sampling of the images of the microstructure by line transects has been proposed as a powerful method for characterization the distribution of properties of inhomogeneous structures. One of the advantages of the method based on the expected values of the order statistics of the intercepts is that the probability bounds of the property are determined without prior knowledge of the functional relationship between the property and the intercepts from the structural constituents.The concept intercept variance has an important application in determining the minimum transect length that stabilizes the variation of the intercept at a low value. Additionally, the concept ‘intercept variance’ can be used for topological optimization of the microstructure regarding the risk of intercepting a large amount of the weaker constituent. Equations regarding the variance of the intercepted fraction characterizing transect lengths with a specified distribution have also been derived.     

Efficient mixed Timoshenko–Mindlin shell elements

The precise representation of rigid body motions in the displacement patterns of curved Timoshenko–Mindlin (TM) shell elements is considered. This consideration requires the development of the strain–displacement relationships of the TM shell theory with regard to their consistency with the rigid body motions. For this purpose a refined TM theory of multilayered anisotropic shells is elaborated. The effects of transverse shear deformation and bending‐extension coupling are included. The fundamental unknowns consist of five displacements and eight strains of the face surfaces of the shell, and eight stress resultants. On the basis of this theory the simple and efficient mixed models are developed. The elemental arrays are derived using the Hu–Washizu mixed variational principle. Numerical results are presented to demonstrate the high accuracy and effectiveness of the developed 4‐node shell elements and to compare their performance with other finite elements reported in the literature. Copyright © 2002 John Wiley & Sons, Ltd.     

Sequential tripping strategy for a transmission network back-upprotection expert system

This paper describes a sequential tripping strategy used in a wide area back-up protection expert system (BPES) to combat situations in which protection relays have maloperated or information is missing. The BPES is an innovative back-up protection scheme designed to prevent the occurrence of widespread blackouts. The BPES evaluates the certainty that transmission lines are likely to be affected by the fault and uses a sequential tripping strategy to isolate the fault if a firm decision is not available due to maloperated relays and/or missing information. The mode of analysis and the sequential tripping strategy ensures that the BPES will clear a fault at minimum risk to the network. An example is included to demonstrate how the certainty factor based sequential tripping strategy is employed by the BPES to clear a fault which occurred on the South Western part of the UK National Grid System     

水蒸汽喷射泵系统实用设计软件的开发

本文在Turboc环境下开发了多级蒸汽喷射泵系统的设计软件，该软件包括了压缩比优化分配、单级喷射泵结构尺寸设计和冷凝器的结构尺寸设计等内容，使设计人员能够根据具体的工艺条件，快速地完成多级喷射泵系统的设计，对于提高多级喷射泵系统的工作稳定性、节省能源具有实际意义。