The high‐speed measurement of a partial area imaging system applied to photoresist development processing

Abstract

Among the parameters that affect photolithography, the most important are exposure and development time which affect the coating photoresist characteristics. This study further researches the relationship between the exposure and development time using a high speed image inspection system, and the relationship between the development time and photoresist depth using a Scanning Probe Microscope (SPM). A partial scan CCD camera and high speed frame capture card were used to obtain the photoresist development processing parameters. The experimental results verified that this imaging system provides an economical and effective method for producing a micro‐photo‐etched product. It is expected that these experiments can also offer some good references useful in the micro electro mechanical industrial field.     

Scalable Gaussian Normal Basis Multipliers over GF(2<Superscript><Emphasis Type="Italic">m</Emphasis></Superscript>) Using Hankel Matrix-Vector Representation

This work presents a novel scalable multiplication algorithm for a type-t Gaussian normal basis (GNB) of GF(2^m). Utilizing the basic characteristics of MSD-first and LSD-first schemes with d-bit digit size, the GNB multiplication can be decomposed into n(n + 1) Hankel matrix-vector multiplications. where n = (mt + 1)/d. The proposed scalable architectures for computing GNB multiplication comprise of one d × d Hankel multiplier, four registers and one final reduction polynomial circuit. Using the relationship of the basis conversion from the GNB to the normal basis, we also present the modified scalable multiplier which requires only nk Hankel multiplications, where k = mt/2d if m is even or k = (mt − t + 2)/2d if m is odd. The developed scalable multipliers have the feature of scalability. It is shown that, as the selected digit size d ≥ 8, the proposed scalable architectures have significantly lower time-area complexity than existing digit-serial multipliers. Moreover, the proposed architectures have the features of regularity, modularity, and local interconnection ability. Accordingly, they are well suited for VLSI implementation.     

Stability and robustness of time‐delay systems

Abstract

Using some properties of matrix measures and matrix's spectral radius, a new stability criterion for a linear time‐delay system is derived. This result is also extended to interval time‐delay systems.     

Torrefied biomass‐polypropylene composites

Torrefied almond shells and wood chips were incorporated into polypropylene as fillers to produce torrefied biomass‐polymer composites. The composites were prepared by extrusion and injection molding. Response surface methodology was used to examine the effects of filler concentration, filler size, and lignin factor (relative lignin to cellulose concentration) on the material properties of the composites. The heat distortion temperatures, thermal properties, and tensile properties of the composites were characterized by thermomechanical analysis, differential scanning calorimetry, and tensile tests, respectively. The torrefied biomass composites had heat distortion temperatures of 8–24°C higher than that of neat polypropylene. This was due to the torrefied biomass restricting mobility of polypropylene chains, leading to higher temperatures for deformation. The incorporation of torrefied biomass generally resulted in an increase in glass transition temperature, but did not affect melting temperature. Also, the composites had lower tensile strength and elongation at break values than those of neat polypropylene, indicating weak adhesion between torrefied biomass and polypropylene. However, scanning electron microscopy results did indicate some adhesion between torrefied biomass and polypropylene. © 2014 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2015 , 132, 41582.     

Unusual exfoliation of layered silicate clays by non-aqueous amine diffusion mechanism

The organic ionic exchange intercalation of smectite clays is conventionally performed in water swelling conditions. Here we report a different mechanism for modifying the smectite clays in alcohol solvents. The modification of sodium montmorillonite with poly(oxyethylene-oxypropylene)-amines (POA-amine) were compared for the differences between in water and in alcohol. In water, the intercalation of hydrophobic poly(oxypropylene)-rich amines in the silicate galleries expands the interlayer spacing up to 10 nm and even to exfoliation (featureless in X-ray diffraction pattern) with over 5 amine equivalents, where as hydrophilic poly(oxyethylene)-rich amines could only intercalate in a low spacing of 1.8 nm. On the other hand, all of the POA-amines in isopropanol afford the exfoliation with over, 3 amine equivalents. The mechanism of this unexpected exfoliation is explained by the thermodynamic formations of an imaginary membrane surrounding the clay units, followed by amine diffusion from the solvent into the clay galleries.     

Identification of Entry Inhibitors against Delta and Omicron Variants of SARS-CoV-2

Entry inhibitors against severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) are urgently needed to control the outbreak of coronavirus disease 2019 (COVID-19). This study developed a robust and straightforward assay that detected the molecular interaction between the receptor-binding domain (RBD) of viral spike protein and the angiotensin-converting enzyme 2 (ACE2) receptor in just 10 min. A drug library of 1068 approved compounds was used to screen for SARS-CoV2 entry inhibition, and 9 active drugs were identified as specific pseudovirus entry inhibitors. A plaque reduction neutralization test using authentic SARS-CoV-2 virus in Vero E6 cells confirmed that 2 of these drugs (Etravirine and Dolutegravir) significantly inhibited the infection of SARS-CoV-2. With molecular docking, we showed that both Etravirine and Dolutegravir are preferentially bound to primary ACE2-interacting residues on the RBD domain, implying that these two drug blocks may prohibit the viral attachment of SARS-CoV-2. We compared the neutralizing activities of these entry inhibitors against different pseudoviruses carrying spike proteins from alpha, beta, gamma, and delta variants. Both Etravirine and Dolutegravir showed similar neutralizing activities against different variants, with EC50 values between 4.5 to 5.8 nM for Etravirine and 10.2 to 22.9 nM for Dolutegravir. These data implied that Etravirine and Dolutegravir may serve as general spike inhibitors against dominant viral variants of SARS-CoV-2.     

Fracture toughness characterization of a PC/ABS blend under different strain rates by various J-integral methods

A published, nonconventional J-integral method, based on the hysteresis energy and the ASTM E813 methods, has been employed to test the fracture toughness of a polycarbonate (PC)/acrylonitrile-butadiene-styrene (ABS) blend. The critical J values (J_Ic) at crosshead speeds ranging from 0.5 to 20 mm/min obtained from the hysteresis energy method are ∼10 to 20% higher than those obtained from the E813–81 method and ∼50 to 70% lower than those obtained from the E813–87 method. However, the hysteresis energy method results in comparable J_Ic values with a modified ASTM E813–87 method when the 0.2 mm offset line is replaced with a 0.1 mm offset line. The critical displacements in terms of the onset of crack initiation, determined from the plots of hysteresis energy vs. displacement, hysteresis ratio vs. displacement, and the true crack growth length vs. displacement, are fairly close in value. This indicates the critical crack initiation and the corresponding J_Ic obtained from this hysteresis energy method indeed represent the actual physical event of the onset of crack initiation.     

BCB-bridged distributed wideband SPST switch using 0.25-/spl mu/m In/sub 0.5/Al/sub 0.5/As--In/sub 0.5/Ga/sub 0.5/As metamorphic HEMTs

In/sub 0.5/Al/sub 0.5/As--In/sub 0.5/Ga/sub 0.5/As metamorphic high-electron mobility transistor (mHEMT) dc-30 GHz distributed single-pole-single through (SPST) switches were designed and fabricated using the low-/spl kappa/ benzocyclobutene (BCB) bridged technology. The current gain cutoff frequency, and the electron transit time of In/sub 0.5/Al/sub 0.5/As--In/sub 0.5/Ga/sub 0.5/As mHEMTs have been investigated. By analyzing the extrinsic total delay time, the effective velocity of electrons can be estimated, and the average velocity is 2.3/spl times/10/sup 7/cm/s. The dc-30 GHz distributed wideband SPST switch exhibits an insertion loss of less than 5.5 dB, and an isolation larger than 30 dB, which is the first demonstration of the high-isolation of InAlAs-InGaAs mHEMTs monolithic switch. As to the power performance, this switch can handle the power up to 12 dBm at 2.4 GHz. After over 250 h of 85-85 (temperature =85/spl deg/C, humidity =85%) environmental evaluation, this BCB passivated and bridged microwave and monolithic integrated circuit switch demonstrates reliable RF characteristics without any significant performance change, which proves that this process using the low-/spl kappa/ BCB layer is attractive for millimeter-wave circuit applications.