High-aspect-ratio microstructures fabricated by X-ray lithography of polymethylsilsesquioxane-based spin-on glass thick films

 In this paper, a process for 200 μm high-aspect-ratio micro-optical (HARM) structures fabricated by deep X-ray lithography (DXRL) of polymethylislesuioane-based spin-on glass (SOG) thick films is presented. The SOG material used in the whole procedures is polymethylsilsesquioxane (GR650), which is a kind of sol-gel derived material and can be cured at a reasonable low temperature (75 °C). A technique to cast thick GR650 films was established in the overall process. After consolidation, the GR650 thick films were machined to reach 200 μm uniformly. Then, as negative resists, the GR650 thick films were patterned directly by DXRL. X-ray irradiated regions can be selectively retained with high structural resolution by development in an organic solvent, such as methanol. Parameter screening was done to find minimum and maximum doses needed for patterning/cross-linking, to vary development time, and to explore different film thickness. The whole process is a novel of technique to create HARM structures based on SOG materials without using molds. This technique can be extended to considerably larger structural heights. Surface and bulk compositions of the irradiated films were measured by XPS and Fourier transform infrared spectroscopy. Surface quality by roughness testing system (WYKO RST) was investigated to fabricate the microstructure with a high-accuracy surface. Received: 31 October 2001/Accepted: 23 January 2002 This work was partially supported by NSF/LEQSF (2001-04)-RII-02 grant “Micro/Nanodevices for Physical, Chemical and biological Sensors”.     

江苏电网EMS中网络通信的应用

首先叙述了网络通信方式相比于传统远动方式的巨大优势；然后从江苏电网的实际情况出发，对网络通信涉及的各个层次进行了分析，其中重点探讨了与能量管理系统(EMS)联系最为紧密的应用层协议的选择；最后，以江苏省目前的网络通信建设状况为依据，进一步验证了网络通信方式的优越性，并在肯定现有成绩的基础上，提出了对今后发展的建议和对未来的展望。     

城市居住区详细规划中的生态设计

首先提出在居住区规划中进行生态设计的理念及这一设计要依据的原則和生态学原理,然后概括出其涉及的主要内容与具体设计方法.     

分层分布式区域电能质量监测系统设计

电能质量直接关系到电力系统的安全运行和用户的用电安全与经济。在阐述电能质量监测的重要性的基础上 ,设计了一个分层分布式的电能质量监测系统 ,该系统结构合理、功能完善。采用高速的DSP芯片设计的监测前置单元保证了数据采集的速度和可靠性。整个系统还需要在应用过程中逐步完善     

络合剂对胶束三元络合物显色体系的影响1──锆(Ⅳ)-m-NPF-CTMAB 显色体系及其应用

在０．２４～０．４２ｍｏｌ／ＬＨＣｌ介质中，研究了１７种络合剂对锆（Ⅳ）－ｍ－ＮＰＦ－ＣＴＭＡＢ显色反应的影响。除乳酸、甘露醇、α－羟基异丁酸、氧代戊二酸和柠檬酸外，其余络合剂都使体系的吸光度降低。有乳酸和甘露醇存在下，有色络合物的表观摩尔吸光系数为１．３０×１０５Ｌ·ｍｏｌ－１·ｃｍ－１。Ｚｒ（Ⅳ）在０～１０μｇ／２５ｍＬ符合比尔定律。方法用于铝合金中微量锆的测定，结果满意。     

多孔硅红外光激发上转换兰光特性

采用电化学腐蚀法制备多孔硅（ＰＳ），测量了ＰＳ在近红外光（８００ｎｍ）激发下的光致发光（ＰＬ）谱和光致发光激发（ＰＬＥ）谱，结果表明ＰＳ具有良好的上转换荧光特性，并随着存放时间的延长，在一定期了内峰值强度有明显的增强，这种非线性光这响应的增强，被认为与空间量子限制效应作用下局域束缚激子被激发有关，硅片初始电阻率赵低发光强度越大。     

SMBus协议分析及其在双MCU通讯中的应用

SMBus是一种高效率的同步串行总线。本文在分析其通讯协议的基础上．认为采用SMBus通讯协议作为双MCU间的通讯协议可以达到既节省引脚又减少时钟周期的效果。最后．以C8051F310为例，给出了具体实现方案和程序流程。     

Investigation of the firing voltage in a shadow‐mask PDP

Abstract— A numerical method was used to investigate the firing characteristics of the discharge cell in an AC shadow‐mask PDP (SM‐PDP). The firing voltages for the various discharge paths in the addressing and sustaining periods were calculated, and the effects of the metal barrier rib and the dielectric layer in the discharge cell on the firing characteristics were studied. Furthermore, the advantages of the SM‐PDP in terms of the firing characteristics will be discussed.     

对一类逆变器的数学模型和等效结构图的探讨

本文在特定条件下，通过对阶跃输入下ＦｖＲＯ１５Ｇ７Ｓ－４ＥＸ输出响应特性的分析和实际观测，提出了它的传递函数的数学模型和等效结构图。