Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS

This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC₂H₅)₄ (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO₂-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm² at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV.     

Command governor for constrained switched systems with scheduled model transition dwell times

In this paper, a switched control architecture for constrained control systems is presented. The strategy is based on command governor ideas that are here specialized to ‘optimally’ schedule switching events on the plant dynamics for improving control performance at the expense of low computational burdens. The significance of the method mainly lies in its capability to avoid constraints violation and loss of stability regardless of any configuration change occurrence in the plant/constraint structure. To this end, the concept of model transition dwell time is used within the proposed control framework to formally define the minimum time necessary to enable a switching event under guaranteed conditions on the overall stability and constraint fulfilment. Simulation results on a simple linear system and on a Cessna 182 aircraft model show the effectiveness of the proposed strategy. Copyright © 2017 John Wiley & Sons, Ltd.     

Mapping arctic landfast ice extent using L-band synthetic aperture radar interferometry

In recent years methods have been developed to extract the seaward landfast ice edge from series of remote sensing images, with most of them relying on incoherent change detection in optical, infrared, or radar amplitude imagery. While such approaches provide valuable results, some still lack the required level of robustness and all lack the ability to fully automate the detection and mapping of landfast ice over large areas and long time spans. This paper introduces an alternative approach to mapping landfast ice extent that is based on coherent processing of interferometric L-band Synthetic Aperture Radar (SAR) data. The approach is based on a combined interpretation of interferometric phase pattern and interferometric coherence images to extract the extent and stability of landfast ice. Due to the low complexity of the base imagery used for landfast ice extraction, significant improvements in automation and reduction of required manual interactions by operators can be achieved. A performance analysis shows that L-band interferometric SAR (InSAR) data enable the mapping of landfast ice with high robustness and accuracy for a wide range of environmental conditions.     

Solvatochromic betaine dyes as optochemical sensor materials: detection of polar and non-polar vapors

Solvatochromic effects in the UV/VIS spectra of dyes can be applied to the monitoring of solvents in the gaseous phase. Within the class of solvatochromic dyes Reichhardt's betaine reveals an outstanding hypsochromic effect on protic solvents with a band shift of up to 350 nm. For vapor detection, the sensor behavior was optimized according to the linearity of the response signal, the sensitivity and a minimum influence of humidity by hydrophobizing siloxanes as additives. Furthermore, the dyes were immobilized under mild conditions by a sol–gel process which generates a high porosity for easy analyte access. The detection principle could be further extended to aprotic, polar solvents by embedding the dyes in protic matrices that form hydrogen bonds to the betaine oxygen. Then, the analyte disturbs the hydrogen bonds resulting in a bathochromic band shift resembling a back titration. Finally, the betaine phenol blue even allows the detection of halogenated hydrocarbons that lack a pronounced functionality but nonetheless a hyperchromic effect occurs during analyte exposition. Mechanistic aspects of these solvent absorption processes were traced by mass-sensitive measurements.     

Physical workload of flight attendants when pushing and pulling trolleys aboard aircraft

The musculoskeletal loads from moving trolleys aboard aircraft were assessed by observation of trolley handling on planes and by physical workload analyses of pushing and pulling of trolleys in a laboratory set up. Trolley handling by a total of 15 female flight attendants was observed on 10 short- and medium-distance flights in different types of aircraft. About 25 selected flight attendants (22 females; 3 males) of five German airlines took part in the laboratory study, which comprised three-dimensional (3D) measurements of posture and hand forces during pushing and pulling of trolleys in a variety of configurations. From the on-flight observations performed, between 150 and 250 trolley movements can be projected for a work shift. The greatest physical workload is to be expected at the beginning of service: The trolleys are fully laden then, and the cabin floor can still be inclined up to 8°, as the aircraft is still climbing, particularly on short-distance flights. The laboratory investigation revealed that the musculoskeletal workload from pushing and pulling depends essentially on the trolley load and on the gradient of the cabin floor. In addition, the degree of stressing depends significantly on the trolley type, mode of handling and personal dexterity. The up/down force component perpendicular to the direction of motion often achieved considerable amplitudes-in some cases equal to or exceeding the force in the direction of movement. The posture analysis demonstrated that pulling forced the flight attendants to adopt ergonomically unfavourable postures such as pronounced flexion of the back, particularly among female subjects. The highest values for flexion of the back occurred while pulling the half-size trolley. The results demonstrate that female flight attendants are likely to overload themselves if they frequently have to move heavily laden trolleys unaided on an inclined cabin floor.

Relevance to industry

On short distance flights, flight attendants have been complaining increasingly of high physical workload from manoeuvring trolleys. On the basis of the presented data airline companies may improve the trolley handling skills of their flight attendances by practical trainings and may ergonomically optimize the general service procedures aboard aircrafts.     

Proteomics in ocular fluids

The focus of this article is to review recent techniques in proteomic analysis of ocular fluids. These fluids include tears, aqueous humor, and vitreous, they will also be compared to serum analysis. Furthermore, we attempt to summarize some disease correlated biomarkers in ocular fluids that were discovered through different proteomic techniques in eye diseases like dry eye, glaucoma, age-related macular degeneration, uveitis, or diabetic retinopathy. This review is trying to point out the importance of these biomarkers for clinical applications.     

Self-consistent-phonon,random phase,and transfer-integral methods for a linear chain with anharmonic potential

The transfer-integral (TI) method, developed especially for hard-core potentials, is tested with anx ² + ₃x³ + ₄x⁴ potential by a comparison with other methods: In the harmonic approximation the improvement of the TI method over the self-consistent phonon (SCP) method is about as great as that of the SCP method over the random phase approximation (RPA).     

Maximum margin Bayesian network classifiers

We present a maximum margin parameter learning algorithm for Bayesian network classifiers using a conjugate gradient (CG) method for optimization. In contrast to previous approaches, we maintain the normalization constraints on the parameters of the Bayesian network during optimization, i.e., the probabilistic interpretation of the model is not lost. This enables us to handle missing features in discriminatively optimized Bayesian networks. In experiments, we compare the classification performance of maximum margin parameter learning to conditional likelihood and maximum likelihood learning approaches. Discriminative parameter learning significantly outperforms generative maximum likelihood estimation for naive Bayes and tree augmented naive Bayes structures on all considered data sets. Furthermore, maximizing the margin dominates the conditional likelihood approach in terms of classification performance in most cases. We provide results for a recently proposed maximum margin optimization approach based on convex relaxation. While the classification results are highly similar, our CG-based optimization is computationally up to orders of magnitude faster. Margin-optimized Bayesian network classifiers achieve classification performance comparable to support vector machines (SVMs) using fewer parameters. Moreover, we show that unanticipated missing feature values during classification can be easily processed by discriminatively optimized Bayesian network classifiers, a case where discriminative classifiers usually require mechanisms to complete unknown feature values in the data first.     

Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensors

In diaphragm-based micromachined calorimetric flow sensors, convective heat transfer through the test fluid competes with the spurious heat shunt induced by the thin-film diaphragm where heating and temperature sensing elements are embedded. Consequently, accurate knowledge of thermal conductivity, thermal diffusivity, and emissivity of the diaphragm is mandatory for design, simulation, optimization, and characterization of such devices. However, these parameters can differ considerably from those stated for bulk material and they typically depend on the production process. We developed a novel technique to extract the thermal thin-film properties directly from measurements carried out on calorimetric flow sensors. Here, the heat transfer frequency response from the heater to the spatially separated temperature sensors is measured and compared to a theoretically obtained relationship arising from an extensive two-dimensional analytical model. The model covers the heat generation by the resistive heater, the heat conduction within the diaphragm, the radiation loss at the diaphragm’s surface, and the heat sink caused by the supporting silicon frame. This contribution summarizes the analytical heat transfer analysis in the microstructure and its verification by a computer numerical model, the measurement setup, and the associated thermal parameter extraction procedure. Furthermore, we report on measurement results for the thermal conductivity, thermal diffusivity, and effective emissivity obtained from calorimetric flow sensor specimens featuring dielectric thin-film diaphragms made of plasma enhanced chemical vapor deposition silicon nitride.