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871.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
872.
This paper presents the experimental evaluation of an advanced fuzzy logic PSS on the analog network simulator at the Research Laboratory of Kyushu Electric Power Co., Inc. The proposed power system stabilizer (PSS) is set up by using a personal computer with A/D and D/A conversion interfaces. The personal computer based PSS was set on the analog network simulator to evaluate the effectiveness of the advanced fuzzy logic control scheme, and to provide sufficient data for the actual installation of the proposed PSS on hydro-units in the Kyushu Electric Power System. This paper also describes the actual installation of the proposed PSS on hydro-units in the Kyushu Electric Power System for the long term evaluation of the proposed PSS using its prototypes 相似文献
873.
U. Prakash K. Muraleedharan R. A. Buckley H. Jones P. A. Shenton 《Journal of Materials Science》1996,31(6):1569-1573
Substitutions (0–16 at%) of titanium for iron in Fe3Al-based alloys rapidly solidified by chill-block melt-spinning stabilize the D03 and B2 ordered structures. Rapid solidification results in total suppression of D03 order in binary alloys, whereas alloys containing titanium have D03 structure. D03 and B2 antiphase domain size, lattice parameter and hardness increase with increasing titanium content of the alloy. The deformation mode changes from single (unit) bcc dislocation in binary alloys to two-fold superdislocation configuration in D03Fe3Al-Ti alloys. Mechanical antiphase boundaries are generated by the movement of these imperfect configurations. All the alloys exhibited cleavage tensile failure. The mechanical properties are correlated with the observed structural changes. 相似文献
874.
Iron pyrite films prepared by sulfur vapor transport 总被引:4,自引:0,他引:4
Iron films deposited via thermal evaporation, with a thickness between 100 and 250 nm, were converted into FeS2 by open sulfur transport using nitrogen as a gas vector. The films thus obtained constituted a single pyrite phase and were optically highly absorbing. The sulfurization process was optimized. As a result, sample temperature and conversion time were found to be the major determining parameters. The films were characterized using several methods. The crystallinity and phase identification were determined by X-ray diffractometry. Scanning electron microscopy showed a homogeneous surface of both iron and pyrite layers. Optical transmission measurements confirmed the highly absorbing character of FeS2 and allowed the determination of direct (1.35 eV) and indirect (0.82 eV) transitions. 相似文献
875.
Composite materials of steel sheets joined by interlayers of zinc or lead- tin, show very good impact and corrosion resistance properties. Resistance spot-weld characteristics of these composite materials made of steel sheets and non-ferrous metals have been tested. Spot welds of composites with both zinc and lead- tin interlayers present good behaviour in peeling tests. Shear tests of the welds also show very high strength, probably as a consequence of simultaneous brazing because of the alloyed layer of non-ferrous material around the weld spot. This good welding behaviour enhances the possibilities of application of this composite. 相似文献
876.
This paper addresses the aging behaviour of NiCr/CuNiMn/NiCr triple layers on Al2O3 ceramics at temperatures up to 200°C for film thicknesses d0.5 μm. Investigations of the film structure and the increase of resistance and its temperature coefficient during the annealing process and studies of the dependence of this aging drift on both the film thickness and the storage temperature have been carried out. Furthermore, the film stress and the effect of substrate bending on resistance have been measured. The results can be explained by the irregular film structure (columns and small bridges between them), which causes stress and current concentrations as well as local creeping, cracking and oxidation processes in the micro-bridges. They are compared with such for structurally homogeneous films on silicon wafers. 相似文献
877.
Kawashima H. Sunaga K. 《IEEE transactions on ultrasonics, ferroelectrics, and frequency control》1996,43(5):832-837
An exact solution of a partial differential equation including elastic compliance constant s'56, with respect to stress function ψ has been found for torsional modes of vibration of an arbitrary (singly, doubly, triply) rotated beam with a pair of parallel free edges. The solution is obtained by relaxing the condition that the edge planes are perpendicular to the main faces of the beam. That is, the edges are off perpendicular by the angle Θ=arctan(-s'56 /8'55). The exact solution can reduce the difference of the calculated and measured values for a thickness-to-width ratio which gives the first-order temperature coefficient α=0. Also, a comparatively large inclination of the edge cuts is required to reduce the unwanted complicated mode shapes to simple ones 相似文献
878.
Cryogenic detectors with superconducting tunnel junctions can provide an energy resolution improved by at least one order of magnitude compared with standard semiconductor detectors. While the detection principle was already demonstrated many years ago, the past years were dedicated to the transition from the laboratory sample to practical detectors. Our most favored detector design gives rise to tunnel junctions with electrodes of unequal energy gaps. In such hetero tunnel junctions bias conditions can be established which cause a negative signal current. We report the experimental verification of this effect, and we discuss the yield of charge signal of cryogenic detectors based upon superconducting tunnel junctions. 相似文献
879.
The Center for NDE, Iowa State University, has developed a laboratory prototype Golay code pulse compression system and tested
it on a variety of materials. The performance of the system was evaluated in terms of signal-to-noise ratio enhancement (SNRE),
resolution, and computation speed. The system's error sources also were discussed. The Golay code pulse compression was simulated
on a computer and demonstrated the effective noise suppression. In addition, an equivalent pulse of the Golay code (delta-like
pulse) was derived theoretically using a simple ultrasonic inspection model, which demonstrated its equivalence on the output
correlated signal. Overall, the pulse compression technique extended the detection range for a given peak power and considerably
reduced the system'swhite noise, hence providing enhanced signal-to-noise ratios (SNRs). An average of 30 dB improvement in SNR was obtained from highly
energy-absorbent materials such as rubber, plastics, corks (insulation materials), and thick composites using the Golay codes
of up to 512 bits. However, the technique did not effectively reduce coherent scattering noises from the coarse grain boundaries
in cast stainless steels, Inconel weld metal, and material lay-ups in thin composites. Furthermore, it was found that, depending
upon the system's hardware capabilities, the overall performance could be degraded considerably. 相似文献
880.
The major envelope protein, p35, of vaccinia virus (VV; strain LIVP) was purified by extraction from virions with the non-ionic detergent Nonidet P-40. The protein was cleaved with CNBr. Four homogeneous peptides were isolated and their N-terminal amino-acid (aa) sequences determined. A computer search of a protein sequence databank revealed complete identity of the determined sequences with aa 44-63, 144-149, 154-165 and 224-238 of ORF H3 of the HindIII-H fragment of the VV genome [Rosel et al., J. Virol. 60 (1989) 436-446]. Earlier, Gordon et al. [Virology 167 (1988) 361-369] determined that the p35 surface protein of VV strain IHD-W is encoded by the H6 gene. Muravlev et al. [Biopolymery i kletka 6 (1990) 83-89 (Russian)] deduced from their data that gene A2 encodes this prominent antigen. Taking into account this ambiguity, we cloned the genes H3, H6 and A2 in expression vectors, prepared the specific antisera against the expression products and conducted the immunochemical analysis of the recombinant and native VV-specific proteins. It has been established that the H6 codes for an early protein that is found only in the infected cell extracts, but is absent in mature virions. The immunodominant protein p35 of VV strain LIVP is encoded by the gene H3. The gene A2 protein product is present mainly in the infected cell extract, but the antiserum against the A2 product shows a rather weak interaction with the 35-kDa fraction of structural VV proteins resolved by electrophoresis. 相似文献