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21.
Impact of Al in Cu alloy interconnects on electro and stress migration reliabilities 总被引:1,自引:0,他引:1
Kazuyoshi Maekawa Kenichi Mori Kazuhito Honda Koyu Asai Masayuki Kojima 《Microelectronic Engineering》2008,85(10):2137-2141
The reliability of Cu interconnects was successfully improved by applying a CuAl alloy seed. However, the effect of additive Al on the reliability is not fully understood. In order to reveal the reliability improvement mechanism, Cu films using CuAl alloy seed were investigated in detail. As stress induced voiding (SIV) as well as electromigration is caused by migration of vacancies and/or Cu atoms, the measured activation energy value of electromigration using CuAl indicates that the fast diffusion paths are Cu grain boundaries. The analysis using high lateral resolution scanning type secondary ion mass spectrometry (nano-SIMS) clarifies that additive Al in ECP-Cu film is mainly localized at grain boundaries. Furthermore, positron annihilation was used to probe vacancy-type defects in Cu films. The CuAl films before recrystallization contain larger and higher density vacancy-type defects. Whereas, the recrystallized CuAl films after annealing above 250 °C contain smaller and lower density defects. Furthermore, CuAl films with annealing above 350 °C contain less Al inside the grains. These results represent that Al atoms in Cu films with annealing above 350 °C are exhausted from inside grains to the grain boundaries, and the spewed Al atoms existing at Cu grain boundary effectively prevents the diffusion of Cu and/or vacancies. 相似文献
22.
Reversible and Precisely Controllable p/n‐Type Doping of MoTe2 Transistors through Electrothermal Doping
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Yuan‐Ming Chang Shih‐Hsien Yang Che‐Yi Lin Chang‐Hung Chen Chen‐Hsin Lien Wen‐Bin Jian Keiji Ueno Yuen‐Wuu Suen Kazuhito Tsukagoshi Yen‐Fu Lin 《Advanced materials (Deerfield Beach, Fla.)》2018,30(13)
Precisely controllable and reversible p/n‐type electronic doping of molybdenum ditelluride (MoTe2) transistors is achieved by electrothermal doping (E‐doping) processes. E‐doping includes electrothermal annealing induced by an electric field in a vacuum chamber, which results in electron (n‐type) doping and exposure to air, which induces hole (p‐type) doping. The doping arises from the interaction between oxygen molecules or water vapor and defects of tellurium at the MoTe2 surface, and allows the accurate manipulation of p/n‐type electrical doping of MoTe2 transistors. Because no dopant or special gas is used in the E‐doping processes of MoTe2, E‐doping is a simple and efficient method. Moreover, through exact manipulation of p/n‐type doping of MoTe2 transistors, quasi‐complementary metal oxide semiconductor adaptive logic circuits, such as an inverter, not or gate, and not and gate, are successfully fabricated. The simple method, E‐doping, adopted in obtaining p/n‐type doping of MoTe2 transistors undoubtedly has provided an approach to create the electronic devices with desired performance. 相似文献
23.
Chika Umino Yusuke Arao Yuma Otsuka Fumiko Kawashima Kazuhito Fujiwara 《Journal of Mechanical Science and Technology》2017,31(8):3685-3689
Rubber is an important industrial material. However, mechanical properties and deformation of the high polymer including rubber are not clear. A method of estimating the mechanical properties which can be used for the deteriorated rubber is demanded to improve the reliability of it. Improved VBO (Viscoplasticity theory based on overstress) model is a constitutive equation. We applied it for the compression stress-strain behavior of deteriorated NBR (acryloNitrile-Butadiene rubber). Furthermore, we proposed a method of estimating the mechanical properties of deteriorated NBR. In this paper, deterioration tests in water and in air were conducted. To confirm the validity of the proposed improved VBO model and estimated mechanical properties, simulations of the stress-strain curves obtained in the tests were conducted. 相似文献
24.
Takeshi Kikutani Kazuhito Nakao Wataru Takarada Hiroshi Ito 《Polymer Engineering and Science》1999,39(12):2349-2357
On-line measurement of birefringence was performed in the high-speed melt spinning process of poly(ethylene terephthalate) using an apparatus that incorporates a rotating polarizer for the measurement of the optical retardation of running filament. Particular attention was paid to the detailed measurements in the vicinity of neck-like deformation. Through the measurement at the take-up velocity of 5 km/min, development of birefringence under the strain rate up to about 1 ms?1 was investigated. To analyze the relation between applied stress and birefringence, tension and temperature profiles of the spin-line were calculated based on the experimentally obtained diameter profiles. Even though the strain rate is extremely high, a linear relationship between birefringence and a parameter calculated by dividing stress by temperature was confirmed to hold up to birefringence and stress/temperature values of about 0.017 and 10 kPa/K, respectively. 相似文献
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Saejung W Puttikhunt C Prommool T Sojikul P Tanaka R Fujiyama K Malasit P Seki T 《Journal of Bioscience and Bioengineering》2006,102(4):333-339
The dengue virus is currently the most important flavivirus causing human diseases in the tropical and subtropical regions of the world. The envelope protein domain III of dengue virus type 2 (D2EIII), which induces protective and neutralizing antibodies, was expressed as an N-terminal fusion to a hexa-histidine tag in Escherichia coli. The expression of recombinant D2EIII of 103 amino acids in the soluble form can be achieved using suitable host strains, such as Origami, at a low induction temperature of 18 degrees C. The enhanced production of the soluble protein could be attributed to the thioredoxin reductase (trxB) and glutathione reductase (gor) double mutations in the Origami genome. The soluble and refolded D2EIII proteins were recognized by different antibodies including human patient antiserum. The immunization of rats with soluble D2EIII protein elicited the production of antibodies that could recognize the D2EIII protein in the D2EIII precursor protein and in C-terminal truncated dengue envelope protein type 1-4. Thus, this protein production system is suitable for the production of authentic recombinant dengue proteins that may be used in the diagnosis of the dengue virus infection or in vaccine development. 相似文献
28.
Atsuko SHINOHARA Takehisa MATSUKAWA Momoko CHIBA Toshio KUMASAKA Jun KOBAYASHI Kenji TAKAMORI Shozo ICHINOSE Kazuhito YOKOYAMA 《中国稀土学报(英文版)》2010,(Z1):507-509
Distribution of Sm and Ce in mice was investigated after inhalation exposure to their oxide particles of 5 μm diameter and 15 mg/m3.Sm and Ce were mainly distributed in lung,their concentrations decreased with passing time,and their concentrations in lung were correlated with exposure periods.Concentrations of Ce were lower than that of Sm in each point.Sm was also distributed in the other organs and bone but Ce was scarcely detected.These results suggest that the behaviors of Sm and Ce inhaled were different,although their chemical properties are similar. 相似文献
29.
Effects of the type and amount of fatty acid (0-2.0 mmol/g-starch of lauric, myristic, palmitic, stearic, oleic, and linoleic acids) on the complex formation, thermal properties, and in-vitro digestibility of gelatinized potato starch-fatty acid mixtures were investigated. Complex index (CI) evaluated by the reduction in the iodine binding capacity of starch increased with an increase in the amount of fatty acids, and reached a plateau depending on the type of fatty acid. The maximum CI value was higher in the order of lauric (49.9%), linoleic (47.6%), myristic (42.4%), oleic (36.7%), stearic (35.3%), and palmitic acid (30.9%). From the calorimetric study, it was demonstrated that melting temperature of the complexes was higher in the order of stearic (96.7 °C) > lauric, myristic, palmitic, and oleic (89.6-92.1 °C) > linoleic acid (78.3 °C). Melting enthalpy for complexes was roughly related to the CI value (R2 = 0.667). From the in-vitro digestibility measurement, it was found that a certain amount of fatty acid reduced the starch content hydrolyzed at a given condition. Among them, 0.50 mmol/g-starch lauric and oleic acid samples showed the largest reduction in the hydrolyzed starch content. This result was related to the extent of complex formation characterized by CI value and its helical order characterized by melting temperature. In addition, there was a possibility of the complex formation between amylose and unsaturated fatty acid during the hydrolysis of gelatinized starch. 相似文献
30.
Design of a photocatalyst for bromate decomposition: surface modification of TiO2 by pseudo-boehmite
The rate of BrO3- reduction by a commercial TiO2 photocatalyst under UV illumination in an aqueous solution was increased by lowering the pH from 7 to 5. The effect is attributable to an enhancement of the electrical interaction between BrO3- and the positively charged surfaces of the TiO2 photocatalyst. The surface charge can be controlled by a surface modification of the TiO2 photocatalyst without controlling the pH of the water. In fact, the isoelectric point of surface-modified TiO2 was higher than that of the unloaded TiO2 photocatalyst, resulting in an increase in the rate of the photocatalytic reduction of BrO3- at a neutral pH. This increase is explained by an increase in the amount of adsorbed BrO3- on the photocatalyst surface. 相似文献