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41.
Lutz Hofmann Tobias Fischer Thomas Werner Franz Selbmann Michael Rennau Ramona Ecke Stefan E. Schulz Thomas Geßner 《Microsystem Technologies》2016,22(7):1665-1677
This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC2H5)4 (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO2-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm2 at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV. 相似文献
42.
A new approach is introduced for turbidite modeling, leveraging the potential of computational fluid dynamics methods to simulate the flow processes that led to turbidite formation. The practical use of numerical flow simulation for the purpose of turbidite modeling so far is hindered by the need to specify parameters and initial flow conditions that are a priori unknown. The present study proposes a method to determine optimal simulation parameters via an automated optimization process. An iterative procedure matches deposit predictions from successive flow simulations against available localized reference data, as in practice may be obtained from well logs, and aims at convergence towards the best-fit scenario. The final result is a prediction of the entire deposit thickness and local grain size distribution. The optimization strategy is based on a derivative-free, surrogate-based technique. Direct numerical simulations are performed to compute the flow dynamics. A proof of concept is successfully conducted for the simple test case of a two-dimensional lock-exchange turbidity current. The optimization approach is demonstrated to accurately retrieve the initial conditions used in a reference calculation. 相似文献
43.
44.
Anatomical structure modeling from medical images 总被引:2,自引:0,他引:2
Archip N Rohling R Dessenne V Erard PJ Nolte LP 《Computer methods and programs in biomedicine》2006,82(3):203-215
Some clinical applications, such as surgical planning, require volumetric models of anatomical structures represented as a set of tetrahedra. A practical method of constructing anatomical models from medical images is presented. The method starts with a set of contours segmented from the medical images by a clinician and produces a model that has high fidelity with the contours. Unlike most modeling methods, the contours are not restricted to lie on parallel planes. The main steps are a 3D Delaunay tetrahedralization, culling of non-object tetrahedra, and refinement of the tetrahedral mesh. The result is a high-quality set of tetrahedra whose surface points are guaranteed to match the original contours. The key is to use the distance map and bit volume structures that were created along with the contours. The method is demonstrated on computed tomography, MRI and 3D ultrasound data. Models of 170,000 tetrahedra are constructed on a standard workstation in approximately 10s. A comparison with related methods is also provided. 相似文献
45.
Lutz Eichner 《Acta Informatica》1978,10(4):341-367
Summary First the problem is solved how one can decide whether an arbitrary finite semigroup H is linearly A-realizable, i.e., whether there exists a linearly realizable finite automaton having a semigroup isomorphic to H. This leads to a question about the existence of certain generating subsets of H. The determination of these subsets is rather complicated in case H-HH=Ø and very simple in case H-HH#Ø. But in the first case we are able to clear up completely the structure of the semigroups which are linearly A-realizable: These are exactly the finite right groups which have maximal subgroups of the type described by Ecker in [4]. In the second case we get only necessary structure conditions. Among other things we shall see: If a semigroup H is linearly A-realizable one can define a congruence relation on it having the property, that H is isomorphic to a semigroup of a strongly connected and linearly realizable automaton iff the so-called index of H equals the index of H/. Developing these results about semigroups we obtain at the same time many structure theorems about linearly realizable automata. 相似文献
46.
Lutz Michael Wegner 《Acta Informatica》1980,14(2):175-193
Summary Making use of the fact that two-level grammars (TLGs) may be thought of as finite specification of context-free grammars (CFGs) with infinite sets of productions, known techniques for parsing CFGs are applied to TLGs by first specifying a canonical CFG G — called skeleton grammar — obtained from the cross-reference of the TLG G. Under very natural restrictions it can be shown that for these grammar pairs (G, G) there exists a 1 — 1 correspondence between leftmost derivations in G and leftmost derivations in G. With these results a straightforward parsing algorithm for restricted TLGs is given. 相似文献
47.
Summary We investigated committee peer review for awarding long-term fellowships to post-doctoral researchers as practiced by the
Boehringer Ingelheim Fonds (B.I.F.) - a foundation for the promotion of basic research in biomedicine. Assessing the validity
of selection decisions requires a generally accepted criterion for research impact. A widely used approach is to use citation
counts as a proxy for the impact of scientific research. Therefore, a citation analysis for articles published previous to
the applicants' approval or rejection for a B.I.F. fellowship was conducted. Based on our model estimation (negative binomial
regression model), journal articles that had been published by applicants approved for a fellowship award (n = 64) prior to applying for the B.I.F. fellowship award can be expected to have 37% (straight counts of citations) and 49%
(complete counts of citations) more citations than articles that had been published by rejected applicants (n = 333). Furthermore, comparison with international scientific reference values revealed (a) that articles published by successful
and non-successful applicants are cited considerably more often than the “average” publication and (b) that excellent research
performance can be expected more of successful than non-successful applicants. The findings confirm that the foundation is
not only achieving its goal of selecting the best junior scientists for fellowship awards, but also successfully attracting
highly talented young scientists to apply for B.I.F. fellowships. 相似文献
48.
Lutz Wolfgang; Leach Chris; Barkham Michael; Lucock Mike; Stiles William B.; Evans Chris; Noble Rachael; Iveson Steve 《Canadian Metallurgical Quarterly》2005,73(5):904
This study extended client-focused research by using the nearest neighbor (NN) approach, a client-specific sampling and prediction strategy derived from research on alpine avalanches. Psychotherapy clients (N = 203) seen in routine practice settings in the United Kingdom completed a battery of intake measures and then completed symptom intensity ratings before each session. Forecasts of each client's rate of change and session-by-session variability were computed on the basis of that client's NNs (n = 10-50 in different comparisons). Alternative forecasts used linear or log-linear slopes and were compared with an alternative prediction strategy. Results showed that the NN approach was superior to the alternative model in predicting rate of change, though the advantage was less clear for predicting variability. (PsycINFO Database Record (c) 2010 APA, all rights reserved) 相似文献
49.
Easterbrook S. Lutz R. Covington R. Kelly J. Ampo Y. Hamilton D. 《IEEE transactions on pattern analysis and machine intelligence》1998,24(1):4-14
The paper describes three case studies in the lightweight application of formal methods to requirements modeling for spacecraft fault protection systems. The case studies differ from previously reported applications of formal methods in that formal methods were applied very early in the requirements engineering process to validate the evolving requirements. The results were fed back into the projects to improve the informal specifications. For each case study, we describe what methods were applied, how they were applied, how much effort was involved, and what the findings were. In all three cases, formal methods enhanced the existing verification and validation processes by testing key properties of the evolving requirements and helping to identify weaknesses. We conclude that the benefits gained from early modeling of unstable requirements more than outweigh the effort needed to maintain multiple representations 相似文献
50.
The atomic force microscope (AFM) is a powerful tool for the measurement of forces at the micro/nano scale when calibrated cantilevers are used. Besides many existing calibration techniques, the thermal calibration is one of the simplest and fastest methods for the dynamic characterization of an AFM cantilever. This method is efficient provided that the Brownian motion (thermal noise) is the most important source of excitation during the calibration process. Otherwise, the value of spring constant is underestimated. This paper investigates noise interference ranges in low stiffness AFM cantilevers taking into account thermal fluctuations and acoustic pressures as two main sources of noise. As a result, a preliminary knowledge about the conditions in which thermal fluctuations and acoustic pressures have closely the same effect on the AFM cantilever (noise interference) is provided with both theoretical and experimental arguments. Consequently, beyond the noise interference range, commercial low stiffness AFM cantilevers are calibrated in two ways: using the thermal noise (in a wide temperature range) and acoustic pressures generated by a loudspeaker. We then demonstrate that acoustic noises can also be used for an efficient characterization and calibration of low stiffness AFM cantilevers. The accuracy of the acoustic characterization is evaluated by comparison with results from the thermal calibration. 相似文献