Optimization of photomask design for reducing aberration-induced placement error

In semiconductor manufacturing, the accurate placement of circuit components ensures the proper functioning of microelectronic circuits. This is often subject to photolithography, an optical technique that transfers circuit patterns from photomasks to silicon wafers. Sources of placement error include aberration and misalignment between different levels, and we focus on the former. Aberration is an optical phenomenon that often degrades imaging system performance. Since aberration differs from one imaging system to another, a photomask design that minimizes the aberration-induced placement error is desired. In this paper, we discuss the optimization process of a general one-dimensional mask pattern under a general illumination condition. The constraint is a known population mean of the root mean square aberrations for the imaging systems under consideration. To apply the theory, we search for the optimal parameters for two common mask designs: alternating phase-shifting masks (PSMs) and attenuated PSMs. The theoretical results are compared with those from a Monte Carlo analysis on a large set of imaging systems. These results are indicative to mask manufacturers and circuit designers of increasing manufacturability of circuits.     

A logic-based approach to rule induction in expert systems

Rule induction is an important part of learning in expert systems. Rules can help managers make more effective decisions and gain insight into the relationships between decision variables. We present a logic-based approach to rule induction in expert systems which is simple, robust and consistent. We also derive bounds on levels of certainty for combining rules. We apply our approach to the development of rules for the entry decisions of new products. We then discuss how the logic-based approach of rule induction can be used to create a decision support system and the methodology to create such a system.     

A PDES/STEP-based information model for computer-aided process planning

Computer Aided Process Planning (CAPP) constitutes one of the most essential elements in Computer Integrated Manufacturing (CIM). Although many CAPP systems have been reported in literature during the last two decades, few of them are compatible enough to integrate easily with other systems in the CIM environment. One major reason is the lack of an effective method to represent the information required by CAPP, and to unify such information with the information of other systems in the CIM environment. Indeed, this problem has received relatively inadequate attention in the recent research of CAPP systems. In this paper, an information model for CAPP is developed by using the object-oriented modeling and the Product Data Exchange Step/STandard of Exchange Product data (PDES/STEP) techniques. The model consists of the part information model, the process plan information model, and the production resource information model. The EXPRESS language or the EXPRESS-G diagram is used to represent these models. Indeed, the proposed information model will greatly improve the CAPP system's capability of effective integration with other systems in the CIM environment, and, ultimately, to facilitate the implementation of the whole CIM strategy in manufacturing enterprises.     

外延SCNN电光薄膜生长及研究

用激光脉冲沉积(PLD)法在MgO(001)衬底上成功地生长、制备出了外延铌酸锶钡钠(SCNN)电光薄膜.对生长制备出的SCNN电光薄膜用X射线衍射对其微观结构进行了测量研究;X射线衍射结果显示生长在MgO(001)衬底上的SCNN电光薄膜是外延膜;对生长在MgO(001)衬底上的外延SCNN电光薄膜在200～900nm光谱范围的透射光谱进行了测量研究,通过对薄膜透射光谱的振荡曲线分析计算得到了SCNN电光薄膜的光学常数,结果发现外延SCNN电光薄膜的折射率符合单电子模型.     

The Revival of Traditional Water Buffalo Cheese Consumption: Class,Heritage and Modernity in Contemporary China

This article provides an ethnography and analysis of the revival of the tradition of indigenous water buffalo cheese and milk product consumption in Shunde, Guangdong. Contrary to the widely held belief that dairy products are not part of the traditional Chinese diet, water buffalo cheese and milk products have been part of the food systems of Guangdong for centuries. But in the past 30 years, these indigenous milk products have been reinvented as a kind of culinary heritage, supplemented by new forms and practices. The popularity of water buffalo milk products in Shunde today has come about as a result of marketing by various agents, including cheese makers, milk merchants, chefs and the government in post-Mao China. Furthermore, the culture of milk consumption in Shunde today has been shaped by both the forces of post-reform economic development, international cultural institutions, the changing perceptions of members of different social classes, and modernity. The reinvented tradition of milk products provides people of different social classes with new ways of consuming milk products and of conducting social interactions.     

Development and Testing of an Energy Storage Material/Phase Change Material Enhanced Heat Sink

A concept of using energy storage material (ESM) or phase change material (PCM) to enhance the heat transfer dissipation by a conventional compact fin-based heat sink is demonstrated. An actual design is developed, fabricated, and tested to demonstrate the heat transfer enhancement. The heat sink is light weight (made with Aluminum) and miniature in size with a total fin length of 26 mm. Test results demonstrated that under a high peak load (4.4 W/cm²) and low duty power cycle (30/55 on/off ratio with a period of 85 sec), the peak temperature at the heating surface with the ESM/PCM heat sink is 5°C lower than that of a conventional heat sink. At the tip of the fin, the peak temperature with the ESM/PCM heat sink is 3°C lower than that of a conventional heat sink. When the external heat transfer coefficient increases (with increase air velocity), the impact of the PCM/ESM on the heat transfer performance is less. A numerical model, based on COMSOL, is developed to provide a theoretical understanding of the experimental observation.     

Environmental Factors,Toxicants and Systemic Lupus Erythematosus

Systemic lupus erythematosus (SLE) is an immune-complex-mediated multi-systemic autoimmune condition of multifactorial etiology, which mainly affects young women. It is currently believed that the onset of SLE and lupus flares are triggered by various environmental factors in genetically susceptible individuals. Various environmental agents and toxicants, such as cigarette smoke, alcohol, occupationally- and non-occupationally-related chemicals, ultraviolet light, infections, sex hormones and certain medications and vaccines, have been implicated to induce SLE onset or flares in a number case series, case-control and population-based cohort studies and very few randomized controlled trials. Here, we will describe some of these recognized environmental lupus triggering and perpetuating factors and explain how these factors potentially bias the immune system towards autoimmunity through their interactions with genetic and epigenetic alterations. Further in-depth exploration of how potentially important environmental factors mechanistically interact with the immune system and the genome, which trigger the onset of SLE and lupus flares, will certainly be one of the plausible steps to prevent the onset and to decelerate the progress of the disease.     

Deep-level Transient Spectroscopy of GaAs/AlGaAs Multi-Quantum Wells Grown on (100) and (311)B GaAs Substrates

Si-doped GaAs/AlGaAs multi-quantum wells structures grown by molecular beam epitaxy on (100) and (311)B GaAs substrates have been studied by using conventional deep-level transient spectroscopy (DLTS) and high-resolution Laplace DLTS techniques. One dominant electron-emitting level is observed in the quantum wells structure grown on (100) plane whose activation energy varies from 0.47 to 1.3 eV as junction electric field varies from zero field (edge of the depletion region) to 4.7 × 10⁶ V/m. Two defect states with activation energies of 0.24 and 0.80 eV are detected in the structures grown on (311)B plane. The E_c-0.24 eV trap shows that its capture cross-section is strongly temperature dependent, whilst the other two traps show no such dependence. The value of the capture barrier energy of the trap at E_c-0.24 eV is 0.39 eV.     

Optimized centre-feed clarifier design for the Tai Po Sewage Treatment Works,Hong Kong

Stability of sludge blanket is a critical factor controlling the performance of clarifiers. A three-dimensional computational fluid dynamics (CFD) model was applied to optimize the clarifier design at the Tai Po Sewage Treatment Works, Hong Kong. Validated by field data, the CFD model evaluated the key clarifier design elements including side-water depth, centre-feed inlet, flocculation well and returned activated sludge (RAS) flow. Based on field observations and modelling results, the new design aims at eliminating the strong turbulence typical of centre-feed inlets in the clarifier, thus creating a better flocculation environment, and reducing disturbance to the sludge blanket. The modelling results also demonstrated a marked improvement in clarifier performance after the increase in clarifier depth and hence sludge storage capacity. The increased storage capacity reduces the risk of high sludge blanket levels upsetting the clarified effluent quality under high flow or solids loading conditions.     

Test consideration for nanometer-scale CMOS circuits

The exponential increase in leakage, the device parameter variations, and the aggressive power management techniques will severely impact IC testing methods. Test technology faces new challenges as faults with increasingly complex behavior become predominant. Design approaches aimed at fixing some of the undesirable effects of nanometric technologies could jeopardize current test approaches. In this article, we explore test considerations for scaled CMOS circuits in the nanometer regime and describe possible solutions to many of these challenges, including statistical timing and delay test, I/sub DDQ/ test under exponentially increasing leakage, and power or thermal management architectures.