Investigation on the critical velocity for liquid loss in immersion lithography

Immersion lithography seeks to extend the resolution of optical lithography by filling the gap between the final optical element and the wafer with a liquid characterized by a high index of refraction. The semiconductor industry demands high throughput, leading to relatively large wafer scanning velocities and accelerations. For higher scanning velocities, an issue that has been identified is the deposition of the immersion liquid while confining a relatively small amount of liquid to the under-lens region. Liquid loss occurs at the receding contact line that forms when a substrate is withdrawn from a liquid, which potentially leads to defects on printed patterns. There has been substantial prior work relative to understanding and building semi-empirical correlations and numerical models to investigate this behavior of the receding three-phase contact line. In the current work, a new liquid injection and collection model with analytic solutions is presented and compared with experimental results, in which the critical velocity for liquid loss is mainly a function of the vacuum degree, the injection flow rate, the properties of the immersion liquid. This correlation allows the critical velocity to be predicted with a given gap height between wafer and lens using only a measurement of the injection speed and knowledge of the fluid properties. Experimentally, glycerin–water mixtures of varying viscosities and different injection flow rates were tested, with variable outlet vacuum degree and inlet speed, showing a mean average error within 12%. This correlation represents a useful tool that can serve to approximately guide the development of fluid control for immersion systems as well as to evaluate alternative immersion fluid candidates to minimize liquid deposition while maximizing throughput.     

集成电路工艺模拟软件SSUPREM4的校验

本文对知名的集成电路工艺模拟软件ＳＳＵＰＲＥＭ４进行了较仔细的校验,用ＳＳＵＰＲＥＭ４模拟了氧化、扩散工艺,并同实验值进行了比较,模拟值和实验值的偏差在１０％以内,与集成电路器件模拟软件Ｓ－ＰＩＳＣＥＳ联用校验了ＳＳＵＰＲＥＭ４的工序模拟结果,校验结果有较大参考价值。     

动目标检测(MTD)点迹处理技术

动目标检测技术(MTD)已广泛用于雷达信号处理中。本文在分析大量的MTD输出点迹的基础上,提出了点迹过滤、凝聚和精确参数估值的方法和准则。其技术可推广应用于新体制雷达和现役雷达的改造。     

DS-CDMA系统正交码调制的抗多址干扰性能及其改进

本文推导非同步 Ｃ Ｄ Ｍ Ａ 系统多址干扰表达式,计算正交码调制码组相关性对多址干扰的影响。提出一种改进型 Ｗ ａｌｓｈ＋ Ｇ Ｍ Ｗ 正交码组,分析比较 Ｗ ａｌｓｈ 正交码组和 Ｗ ａｌｓｈ＋ Ｇ Ｍ Ｗ 正交码组应用于非同步 Ｃ Ｄ Ｍ Ａ 系统的性能。计算机模拟结果表明应用改进型正交码组时系统性能获得改善。     

广义极限平衡理论在地基与边坡稳定分析中的应用

本文提出了复杂介质广义极限平衡理论，并应用于分析各种复杂地基的极限承载力，各种复杂边坡的稳定安全条件，同时定量地研究了各向异性等因素对地基、边坡稳定性的影响。     

A 2.1-6 GHz SiGe BiCMOS low-noise amplifier design for a multi-mode wideband receiver

正A wideband low-noise amplifier(LNA) with ESD protection for a multi-mode receiver is presented.The LNA is fabricated in a 0.18-μm SiGe BiCMOS process,covering the 2.1 to 6 GHz frequency band.After optimized noise modeling and circuit design,the measured results show that the LNA has a 12 dB gain over the entire bandwidth, the input third intercept point(IIP3) is -8 dBm at 6 GHz,and the noise figure is from 2.3 to 3.8 dB in the operating band.The overall power consumption is 8 mW at 2.5 V voltage supply.     

Successive multiuser detection and interference cancelation for contention based OFDMA ranging channel [transactions letters]

In this letter, we propose a successive multiuser detector (SMUD) for contention based OFDMA ranging channel compliant to the IEEE 802.16 (WiMAX) standard. A ranging channel consists of a set of subcarriers in specific time slots shared by multiple users, so the multiple access interference (MAI) limits the performance of ranging detectors. Different from existing methods that treat the MAI as noise, the proposed SMUD successively detects the channel paths of active ranging signals and cancels their interference for further detection. This approach significantly suppresses the MAI and improves both user detection and parameter estimation performance.     

一种ARP攻击检测与定位方法

当前,局域网中频繁发生的ARP攻击活动令网络管理者防不胜防。文中探讨了ARP协议和ARP攻击原理,针对ARP攻击数据包的特征,提出了一种基于交换机镜像端口的检测和定位方法。该方法包括抓包、包结构分析和确定映射对比、伪造包判断和定位等几个步骤。利用WinPcap开发包实现了该方法,并在2种不同的局域网环境中对进行了测试,结果表明该方法能够检测到大多数ARP攻击并对攻击主机进行定位,具有一定的实用价值。     

HomePNA通信中的技术与应用

正如局域网 (LAN)是为了满足企业内多用户互连和资源共享 ,为满足家庭中多种数字设备互连和资源共享 ,家庭电话线网设备 (HomePNA)应运而生。文章叙述了HomePNA通信中所需的技术与应用。     

A Hollow‐Core,Magnetic, and Mesoporous Double‐Shell Nanostructure: In Situ Decomposition/Reduction Synthesis,Bioimaging, and Drug‐Delivery Properties

A novel in situ decomposition/reduction approach is developed to manu­facture hollow core, magnetic, and mesoporous double‐shell nanostructures (HMMNSs) via in situ decomposition and reduction of a β‐FeOOH nanorod core and organosilicate‐incorporated silica‐shell precursor. The formed HMMNSs are then aminated by silanization for further covalent conjugation to rhodamine B isothiocyanate (RBITC) and poly(ethylene glycol) (PEG) chains. The resultant RBITC‐grafted and PEGylated nanocomposites (HMMNS–R/Ps) have excellent blood compatibility and very low cytotoxicity towards HeLa and MCF‐7 cells, and can be taken up by cancer cells effectively in a dose‐dependent manner, as confirmed by in vitro flow cytometry, confocal luminescence imaging, and magnetic resonance imaging (MRI) studies. In vivo MRI studies coupled with Prussian blue staining of slides from different organs show that the nanocomposites preferentially accumulate in liver and spleen after intravenous injection, which suggests a potential application of the nanocomposites as MRI contrast agents. Importantly, the HMMNS–R/P nanocomposites show high loading capacity for water‐insoluble anticancer drugs (docetaxel or camptothecin) owing to the presence of a large inner cavity and enhanced surface area and pore volume. Furthermore, the drug‐loaded nanocomposites exhibit greater cytotoxicity than the corresponding free drugs. These results confirm that the HMMNS–R/P nanocomposites are promising candidates for simultaneous bioimaging and drug delivery.