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71.
Sutomo W. Xuefeng Wang Bullen D. Braden S.K. Chang Liu 《Journal of microelectromechanical systems》2003,12(1):64-69
Parylene is an emerging material for MEMS. It is an organic material that is grown by using the chemical vapor deposition method at room temperature. The deposition thickness is commonly controlled by the amount of solid-phase dimer loaded in a sublimation chamber. In a conventional deposition machine, the end point of the process is designated by the moment the dimer is exhausted. However, this end-of-process criterion does not offer precise, repeatable control of film thickness. We present the results of the development of an in situ end-point detector for a Parylene chemical vapor deposition process. The detector is based on the thermal transfer principle and can be implemented on commercial parylene deposition systems with minimal system modification. Such a sensor enables a user to stop the deposition when a targeted thickness is reached. The end point detector is very simple to implement on existing parylene deposition systems. A series of such sensors with different target deposition thickness would allow extraction of the actual deposition rate within a deposition run. 相似文献
72.
73.
Piezoelectric Nanogenerators for Self-Powered Nanodevices 总被引:1,自引:0,他引:1
A novel approach converts nanoscale mechanical energy into electric energy for self-powering nanodevices.In our own work, we've used piezoelectric zinc-oxide nanowire (ZnO NW) arrays to demonstrate a novel approach for converting nanoscale mechanical energy into electric energy. Here, we review the fundamental principle behind the nanogenerator, present an approach for improving its performance, and discuss some of the challenges we face in pushing this technology to reach its potential. 相似文献
74.
Hydrothermal Synthesis of Magnesium Aluminate Platelets 总被引:1,自引:0,他引:1
Zhi-Zhan Chen Er-Wei Shi Hua-Wei Zhang Yong Zhang Xiang-Biao Li Xue-Chao Liu Bing Xiao 《Journal of the American Ceramic Society》2006,89(12):3635-3637
Magnesium aluminate (MgAl2 O4 ) platelets were first synthesized by hydrothermal treatment of γ-AlO(OH) in a magnesium nitrate aqueous solution at 400°C. The platelets are 100–200 nm in width and 25 nm in thickness. The influence of temperature, the anions of the magnesium salt, the amount of magnesium salt, and precursor pH on the formation of such structure was investigated. The experimental results indicated that the anions of the magnesium salt and precursor pH could have a significant influence on the growth of MgAl2 O4 . MgAl2 O4 formation followed the in situ transformation mechanism, which was the reason why the MgAl2 O4 crystallites had a platelet morphology. 相似文献
75.
76.
本文介绍了用αβ谱仪系统同时测量αβ谱、实现Rn/Th子体补偿、确定超铀α核素气溶胶体积活度及人工放射性气溶胶总β体积活度的技术途径。利用RaA、RaC′a峰的二段时间计数可确定空气中RaA、RaB、RaC的气溶胶体积活度,相应的,也能给出RaB、RaC对总β计数的贡献。根据一般环境条件下的平衡比,用ThC′的。计数修正Th子体对αβ测量的影响。 ̄[239]pu或/和 ̄[241]Am人工核素的α计数,可通过两段时间分别扣除RaA、RaC′拖尾的方法确定;β计数分别扣除Rn/Th子体β贡献即可确定。在本文规定的测量条件下,对室内天然Rn子体水平在15Bq/m ̄3以下,超铀α核素气溶胶体积活度的测量下限可达到0.1Bq/m ̄3;即使在75Bq/m ̄3环境下,人工核素总β的测量下限也可达lBq/m ̄3以下。 相似文献
77.
AIM: To study the effect of the angiotensin-converting enzyme (ACE) inhibitors perindopril (Per) and enalaprilat (Ena) on the reactivity of the endothelium in normal rats. METHODS: Male rats were treated intragastrically with Per (2 mg.kg-1.d-1) or placebo (n = 18) for 6 wk. Aorta was isolated for experiment. Another set of isolated aortic rings with and without endothelium were incubated with Ena (0.1 mumol.L-1) for 30 min. Responses to acetylcholine, serotonin, phenylephrine, sodium nitroprusside (SN), and nitroglycerin (Nit) were observed. RESULTS: Endothelium-dependent relaxation to acetylcholine was augmented in aortic rings from rats treated with Per in comparison with control. The IC50 value (95% confidence limits) decreased from 3.8 (0.56-26.1) mumol.L-1 (control group) to 0.98 (0.28-3.41) mumol.L-1 (Per-treated group). The maximal relaxation was augmented from 62 +/- 9% to 78 +/- 10% (P < 0.01). However, the responses to the endothelium-independent vasodilators, SN and Nit, were similar. Serotonin- and phenylephrine-induced contractions were decreased, which were influenced by basal release of endothelium-derived relaxing factor (EDRF). EC50 values was 6.1 (2.6-14.4) nmol.L-1 vs 8.3 (3.6-18.8) nmol.L-1 in comparison with control group and Per-treated group. The maximal contraction was decreased from 2.42 +/- 0.29 g (control group) to 1.96 +/- 0.25 g (treated group) (P < 0.01). Similar results were found in incubation with Ena. CONCLUSION: Ena and Per enhanced the basic release of EDRF from vascular endothelium. 相似文献
78.
The effect of salt addition, in the form of a fluxing agent containing equivalent amounts of NaCl and KCl, on the microstructure and mechanical properties of 359/SiC/10p composite has been investigated. Both microstructure and properties are affected, with the removal of magnesium and strontium and the introduction of sodium and potassium being responsible for the degradation in properties. Thermodynamic calculations have been carried out to account for the effect of salt addition in terms of the surface adsorption of sodium and potassium impurities and the consequent changes in the surface-interface tension of their binary alloys. Mechanisms for the degradation of properties have been discussed. 相似文献
79.
M Liu 《Canadian Metallurgical Quarterly》1994,50(4):2925-2928
80.