Developments of new concept analytical instruments for failure analyses of sub-100 nm devices

We have developed analytical instruments based on new concepts for failure analyses of devices of 100 nm dimensions or less. They are a sputtered neutral mass spectrometer with focused ion beam for highly sensitive element analysis in microarea (10¹⁸ atoms/cm³ in 30 nm area), transmission electron microscope (TEM) with electron energy loss spectrometer for chemical bond analysis in less than 2 nm area, Nanoprober for electrical characteristics inspection in actual circuits, computed tomography-TEM for three-dimensional observation of crystalline defect with 1 nm spatial resolution, atmospheric pressure ionization mass spectrometer for trace impurities ppq (parts per quadrillion) analysis in gases, and glow discharge optical emission spectrometer for rapid and precise composition analysis. Using these instruments, it was found that the formation of SiO₂ or TiO_x film by water from titanic acid (TiO_x·H₂O) is the cause of the high resistivity in a contact (CVD-W/CVD-TiN/Ti/Si) and vaporization of silicon dioxide by phosphorus trifluoride (PF₃) is the cause of voids in interlayer dielectric film borophosphosilicate glass.     

Melt crystallization of poly(ethylene terephthalate): Comparing addition of graphene vs. carbon nanotubes

Poly(ethylene terephthalate) (PET)-based nanocomposites with graphene or multi-wall carbon nanotubes (MWCNT) were prepared by melt mixing. Aspect ratio, A_f, and interparticle distance, λ, of graphene in the nanocomposites were obtained from melt rheology and transmission electron microscopy respectively. λ of PET/graphene nanocomposites was much smaller than λ in PET/MWCNT. For PET/graphene with highest A_f, λ became <1 μm at more than 0.5 wt% graphene. Non-isothermal crystallization behavior from the melt was investigated by differential scanning calorimetry. The crystallization temperatures suggest that the nucleation effect of graphene was stronger than that of MWCNT. The half crystallization time of PET/graphene became longer than PET/MWCNT with increasing graphene loading, suggesting that confinement by graphene suppressed the crystal growth rate. XRD analysis indicated that smaller crystals formed in PET/graphene than in PET/MWCNT. From Raman spectroscopy, the π–π interaction between PET and graphene was stronger than that between PET and MWCNT. This stronger interaction in PET/graphene appears to result in formation of crystals with higher perfection.     

A study on physical and mechanical properties for soft to firm clays in Yangon area – Properties of clays deposit at the sedimentary basins in Myanmar

Recently, a great deal of foreign investment has been entered into construction of the social infrastructure of Myanmar. Many construction projects are therefore on-going, and these are especially planned in the Yangon area. While these construction booms are increasing, existing studies on the geotechnical problems in the Yangon area such as problematic soils like soft clays are limited at present. Information on soil properties has also not been shared and has been confined to individual projects. In this paper, the boring and laboratory tests carried out in the Yangon area are selected and focused upon among the tests carried out in Myanmar. Laboratory test results for clay deposits in the Yangon area are analyzed and the differences in soil properties between different sedimentary basins and sub-areas divided by the Tertiary sediment ridge that runs from north to south at the center of Yangon are clarified together with a comparison to the clays found in other countries, which have been previously investigated.     

Investigation of transient response motion of differential planetary gear train during reverse rotation and starting by using high-speed camera monitoring

Forschung im Ingenieurwesen - Planetary gear trains (PGTs) have been used in various applications, including hybrid and electric vehicles, owing to their advantages such as compactness, light...     

Fabrication of hierarchically porous spherical particles by assembling mesoporous silica nanoparticles via spray drying

A new type of hierarchically porous materials is fabricated by assembling mesoporous nanoparticles via spray drying. Well-dispersed mesostructured silica nanoparticles (MSN), whose particle size distribution was narrow in the range of 20 nm and 50 nm, were prepared by a thermal deposition method. By spray drying a MSN suspension, MSN were assembled into spherical secondary particles. After calcination, the spherical particles have two types of mesopores, mesopores of 3 nm in size inside of calcined MSN and larger inter-nanoparticle mesopores of about 15-20 nm. This hierarchical pore system should provide nanospaces for efficient mass transport of guest species with different sizes.     

A long-term follow-up study of serial magnetic resonance images in patients with delayed encephalopathy after acute carbon monoxide poisoning

We report a case of vasculitis in a 67-year-old woman who successively developed over a four-month period clinical manifestations suggestive of rheumatoid arthritis, lupus, sicca, syndrome and finally giant cell arteritis. All her symptoms resolved promptly upon discontinuation of enalapril and none recurred over the five-year follow-up period. The only residual manifestation is Jaccoud's arthropathy of the hands.     

Neuroblastoma in an adult with a high serum level of carbohydrate antigen, CA125: report of a case

OBJECTIVE: The clinical characteristics and outcomes of endometrial cancer patients 45 years of age and younger were compared with those of patients older than 45 years of age. METHODS: We performed a cross-sectional study of 301 consecutive endometrial cancer patients referred to our center from 1989 to 1994. Of the 289 patients eligible for study, 40 were 45 years of age or younger (group A) and 249 were older than 45 years of age (group B). RESULTS: The majority of patients in both groups presented with stage I disease. Of the women with stage I disease, patients in group A were more likely than those in group B to have low-grade disease localized to the endometrium (P < .001; relative prevalence 3.39; confidence interval [CI] 1.88, 6.12). However, the distribution of stages I to IV overall was the same for the two groups (P = .269). Although univariate analysis revealed that 11% of the patients in group A and 2% in group B had synchronous ovarian malignancies (P = .007; relative prevalence 5.42; CI 1.39, 21.14), multivariate logistic regression found that nulliparity, not age, was an independent risk factor for synchronous ovarian malignancy (P = .017; relative prevalence 6.15; CI 1.52, 25.61). There were no statistically significant differences by age in the prevalence of high-risk endometrial histology (serous and clear cell carcinoma) or in survival. CONCLUSION: The overall distribution of tumor stage and survival were the same for the younger and older women; this finding contradicts previous reports that suggest that young women with endometrial cancer are at lower risk. Additionally, nulliparity, which occurs with a higher prevalence in younger women who develop endometrial cancer, is associated statistically with the development of synchronous ovarian malignancies.