Carbon hard masks for etching sub-90 nm structures

Carbon hard mask structures have been used to etch a variety of materials typically used in sub 90 nm DRAM manufacture. The results indicate that carbon hard masks can be used very effectively to structure oxide, nitride and metal films giving the CD performance required for the technologies being investigated.     

Widely Tunable Morphologies in Block Copolymer Thin Films Through Solvent Vapor Annealing Using Mixtures of Selective Solvents

Thin films of block copolymers are extremely attractive for nanofabrication because of their ability to form uniform and periodic nanoscale structures by microphase separation. One shortcoming of this approach is that to date the design of a desired equilibrium structure requires synthesis of a block copolymer de novo within the corresponding volume ratio of the blocks. In this work, solvent vapor annealing in supported thin films of poly(2‐hydroxyethyl methacrylate)‐block‐poly(methyl methacrylate) [PHEMA‐b‐PMMA] by means of grazing incidence small angle X‐ray scattering (GISAXS) is investigated. A spin‐coated thin film of a lamellar block copolymer is solvent vapor annealed to induce microphase separation and improve the long‐range order of the self‐assembled pattern. Annealing in a mixture of solvent vapors using a controlled volume ratio of solvents, which are chosen to be preferential for each block, enables selective formation of ordered lamellae, gyroid, hexagonal, or spherical morphologies from a single‐block copolymer with a fixed volume fraction. The selected microstructure is then kinetically trapped in the dry film by rapid drying. This paper describes what is thought to be the first reported case where in situ methods are used to study the transition of block copolymer films from one initial disordered morphology to four different ordered morphologies, covering much of the theoretical diblock copolymer phase diagram.     

Investigation of the impact of the rear‐dielectric/silver back reflector design on the optical performance of thin‐film silicon solar cells by means of detached reflectors

Thin‐film silicon solar cells often rely on a metal back reflector separated from the silicon layers by a thin rear dielectric as a back reflector (BR) design. In this work, we aim to obtain a better insight into the influence of the rear‐dielectric/Ag BR design on the optical performance of hydrogenated microcrystalline silicon (µc‐Si:H) solar cells. To allow the application of a large variety of rear dielectrics combined with Ag BRs of diverse topographies, the solar cell is equipped with a local electrical contact scheme that enables the use of non‐conductive rear dielectrics such as air or transparent liquids of various refractive indices n. With this approach, detached Ag BRs having the desire surface texture can be placed behind the same solar cell, yielding a direct and precise evaluation of their impact on the optical cell performance. The experiments show that both the external quantum efficiency and the device absorptance are improved with decreasing n and increasing roughness of the BR. Calculations of the angular intensity distribution of the scattered light in the µc‐Si:H are presented. They allow for establishing a consistent picture of the light trapping in the solar cell. Copyright © 2013 John Wiley & Sons, Ltd.     

Mixed Mode VLSI Implementation of a Neural Associative Memory

A mixed mode digital/analog special purpose VLSI hardware implementation of an associative memory with neural architecture is presented. The memory concept is based on a matrix architecture with binary storage elements holding the connection weights. To enhance the processing speed analog circuit techniques are applied to implement the algorithm for the association. To keep the memory density as high as possible two design strategies are considered. First, the number of transistors per storage element is kept to a minimum. In this paper a circuit technique that uses a single 6-transistor cell for weight storage and analog signal processing is proposed. Second, the device precision has been chosen to a moderate level to save area as much as possible. Since device mismatch limits the performance of analog circuits, the impact of device precision on the circuit performance is explicitly discussed. It is shown that the device precision limits the number of rows activated in parallel. Since the input vector as well as the output vector are considered to be sparsely coded it is concluded, that even for large matrices the proposed circuit technique is appropriate and ultra large scale integration with a large number of connection weights is feasible.     

Solving the trade-off between fairness and throughput: Token bucket and leaky bucket-based weighted fair queueing schedulers

In this article, we present two efficient weighted fair queueing (WFQ) scheduling algorithms leaned on the well-known token bucket and leaky bucket shaping/policing algorithms. The performance of the presented algorithms is compared to those of the state-of-the-art WFQ approximations such as weighted round robin (WRR) and the recently proposed bin sort fair queueing (BSFQ). Our simulation results show that the proposed algorithms provide a better fairness at a lower implementation complexity while simultaneously achieving a comparable network utilization.     

Superconducting Quantum Metamaterials from High Pressure Melt Infiltration of Metals into Block Copolymer Double Gyroid Derived Ceramic Templates

Mesoscale order can lead to emergent properties including phononic bandgaps or topologically protected states. Block copolymers offer a route to mesoscale periodic architectures, but their use as structure directing agents for metallic materials has not been fully realized. A versatile approach to mesostructured metals via bulk block copolymer self-assembly derived ceramic templates, is demonstrated. Molten indium is infiltrated into mesoporous, double gyroidal silicon nitride templates under high pressure to yield bulk, 3D periodic nanocomposites as free-standing monoliths which exhibit emergent quantum-scale phenomena. Vortices are artificially introduced when double gyroidal indium metal behaves as a type II superconductor, with evidence of strong pinning centers arrayed on the order of the double gyroid lattice size. Sample behavior is reproducible over months, showing high stability. High pressure infiltration of bulk block copolymer self-assembly based ceramic templates is an enabling tool for studying high-quality metals with previously inaccessible architectures, and paves the way for the emerging field of block-copolymer derived quantum metamaterials.     

Plasmonic‐Induced Photon Recycling in Metal Halide Perovskite Solar Cells

Organic–inorganic metal halide perovskite solar cells have emerged in the past few years to promise highly efficient photovoltaic devices at low costs. Here, temperature‐sensitive core–shell Ag@TiO₂ nanoparticles are successfully incorporated into perovskite solar cells through a low‐temperature processing route, boosting the measured device efficiencies up to 16.3%. Experimental evidence is shown and a theoretical model is developed which predicts that the presence of highly polarizable nanoparticles enhances the radiative decay of excitons and increases the reabsorption of emitted radiation, representing a novel photon recycling scheme. The work elucidates the complicated subtle interactions between light and matter in plasmonic photovoltaic composites. Photonic and plasmonic schemes such as this may help to move highly efficient perovskite solar cells closer to the theoretical limiting efficiencies.     

Supramolecular Assembly of Aminoethylene‐Lipopeptide PMO Conjugates into RNA Splice‐Switching Nanomicelles

Phosphorodiamidate morpholino oligomers (PMOs) are oligonucleotide analogs that can be used for therapeutic modulation of pre‐mRNA splicing. Similar to other classes of nucleic acid‐based therapeutics, PMOs require delivery systems for efficient transport to the intracellular target sites. Here, artificial peptides based on the oligo(ethylenamino) acid succinyl‐tetraethylenpentamine (Stp), hydrophobic modifications, and an azide group are presented, which are used for strain‐promoted azide‐alkyne cycloaddition conjugation with splice‐switching PMOs. By systematically varying the lead structure and formulation, it is determined that the type of contained fatty acid and supramolecular assembly have a critical impact on the delivery efficacy. A compound containing linolenic acid with three cis double bonds exhibits the highest splice‐switching activity and significantly increases functional protein expression in pLuc/705 reporter cells in vitro and after local administration in vivo. Structural and mechanistic studies reveal that the lipopeptide PMO conjugates form nanoparticles, which accelerate cellular uptake and that the content of unsaturated fatty acids enhances endosomal escape. In an in vitro Duchenne muscular dystrophy exon skipping model using H2K‐mdx52 dystrophic skeletal myotubes, the highly potent PMO conjugates mediate significant splice‐switching at very low nanomolar concentrations. The presented aminoethylene‐lipopeptides are thus a promising platform for the generation of PMO‐therapeutics with a favorable activity/toxicity profile.     

Polymer Fiber Probes Enable Optical Control of Spinal Cord and Muscle Function In Vivo

Restoration of motor and sensory functions in paralyzed patients requires the development of tools for simultaneous recording and stimulation of neural activity in the spinal cord. In addition to its complex neurophysiology, the spinal cord presents technical challenges stemming from its flexible fibrous structure and repeated elastic deformation during normal motion. To address these engineering constraints, we developed highly flexible fiber probes, consisting entirely of polymers, for combined optical stimulation and recording of neural activity. The fabricated fiber probes exhibit low‐loss light transmission even under repeated extreme bending deformations. Using our fiber probes, we demonstrate simultaneous recording and optogenetic stimulation of neural activity in the spinal cord of transgenic mice expressing the light sensitive protein channelrhodopsin 2 (ChR2). Furthermore, optical stimulation of the spinal cord with the polymer fiber probes induces on‐demand limb movements that correlate with electromyographical (EMG) activity.     

Spontaneous Current Oscillations during Hard Anodization of Aluminum under Potentiostatic Conditions

Nanoporous anodic aluminum oxide is prepared by hard anodization of aluminum under potentiostatic conditions using 0.3 M H₂C₂O₄. Under unstirred electrolyte condition, spontaneous current oscillations are observed. The amplitude and period of these current oscillations are observed to increase with anodization time. As a consequence of the oscillatory behavior, the resulting anodic alumina exhibits modulated pore structures, in which the diameter contrast and the length of pore modulation increase with the amplitude and the period of current oscillations, respectively, and the current peak profile determines the internal geometry of oxide nanopores. The mechanism responsible for the oscillatory behavior is suggested to be a diffusion‐controlled anodic oxidation of aluminum.