Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS

This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC₂H₅)₄ (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO₂-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm² at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV.     

Continuous-time quantum Monte Carlo impurity solvers

Continuous-time quantum Monte Carlo impurity solvers are algorithms that sample the partition function of an impurity model using diagrammatic Monte Carlo techniques. The present paper describes codes that implement the interaction expansion algorithm originally developed by Rubtsov, Savkin, and Lichtenstein, as well as the hybridization expansion method developed by Werner, Millis, Troyer, et al. These impurity solvers are part of the ALPS-DMFT application package and are accompanied by an implementation of dynamical mean-field self-consistency equations for (single orbital single site) dynamical mean-field problems with arbitrary densities of states.

Program summary

Program title: dmftCatalogue identifier: AEIL_v1_0Program summary URL:http://cpc.cs.qub.ac.uk/summaries/AEIL_v1_0.htmlProgram obtainable from: CPC Program Library, Queen's University, Belfast, N. IrelandLicensing provisions: ALPS LIBRARY LICENSE version 1.1No. of lines in distributed program, including test data, etc.: 899 806No. of bytes in distributed program, including test data, etc.: 32 153 916Distribution format: tar.gzProgramming language: C++Operating system: The ALPS libraries have been tested on the following platforms and compilers:

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  Linux with GNU Compiler Collection (g++ version 3.1 and higher), and Intel C++ Compiler (icc version 7.0 and higher)

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  MacOS X with GNU Compiler (g++ Apple-version 3.1, 3.3 and 4.0)

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  IBM AIX with Visual Age C++ (xlC version 6.0) and GNU (g++ version 3.1 and higher) compilers

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  Compaq Tru64 UNIX with Compq C++ Compiler (cxx)

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  SGI IRIX with MIPSpro C++ Compiler (CC)

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  HP-UX with HP C++ Compiler (aCC)

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  Windows with Cygwin or coLinux platforms and GNU Compiler Collection (g++ version 3.1 and higher)

RAM: 10 MB–1 GBClassification: 7.3External routines: ALPS [1], BLAS/LAPACK, HDF5Nature of problem: (See [2].) Quantum impurity models describe an atom or molecule embedded in a host material with which it can exchange electrons. They are basic to nanoscience as representations of quantum dots and molecular conductors and play an increasingly important role in the theory of “correlated electron” materials as auxiliary problems whose solution gives the “dynamical mean field” approximation to the self-energy and local correlation functions.Solution method: Quantum impurity models require a method of solution which provides access to both high and low energy scales and is effective for wide classes of physically realistic models. The continuous-time quantum Monte Carlo algorithms for which we present implementations here meet this challenge. Continuous-time quantum impurity methods are based on partition function expansions of quantum impurity models that are stochastically sampled to all orders using diagrammatic quantum Monte Carlo techniques. For a review of quantum impurity models and their applications and of continuous-time quantum Monte Carlo methods for impurity models we refer the reader to [2].Additional comments: Use of dmft requires citation of this paper. Use of any ALPS program requires citation of the ALPS [1] paper.Running time: 60 s–8 h per iteration.References:

• [1] 

  A. Albuquerque, F. Alet, P. Corboz, et al., J. Magn. Magn. Mater. 310 (2007) 1187.

• [2] 

  http://arxiv.org/abs/1012.4474, Rev. Mod. Phys., in press.

     

Relating the X-band opacity of a tropical tree canopy to sapflow, rain interception and dew formation

During summer and autumn 2007, a 11 GHz microwave radiometer was deployed in an experimental tree plantation in Sardinilla, Panama. The opacity of the tree canopy was derived from incoming brightness temperatures received on the ground. A collocated eddy-covariance flux tower measured water vapor fluxes and meteorological variables above the canopy. In addition, xylem sapflow of trees was measured within the flux tower footprint. We observed considerable diurnal differences between measured canopy opacities and modeled theoretical opacities that were closely linked to xylem sapflow. It is speculated that dielectric changes in the leaves induced by the sapflow are causing the observed diurnal changes. In addition, canopy intercepted rain and dew formation also modulated the diurnal opacity cycle. With an enhanced canopy opacity model accounting for water deposited on the leaves, we quantified the influence of canopy stored water (i.e. intercepted water and dew) on the opacity. A time series of dew formation and rain interception was directly monitored during a period of two weeks. We found that during light rainfall up to 60% of the rain amount is intercepted by the canopy whereas during periods of intense rainfall only 4% were intercepted. On average, 0.17 mm of dew was formed during the night. Dew evaporation contributed 5% to the total water vapor flux measured above the canopy.     

Sharpening Wald-type inference in robust regression for small samples

The datasets used in statistical analyses are often small in the sense that the number of observations n is less than 5 times the number of parameters p to be estimated. In contrast, methods of robust regression are usually optimized in terms of asymptotics with an emphasis on efficiency and maximal bias of estimated coefficients. Inference, i.e., determination of confidence and prediction intervals, is proposed as complementary criteria. An analysis of MM-estimators leads to the development of a new scale estimate, the Design Adaptive Scale Estimate, and to an extension of the MM-estimate, the SMDM-estimate, as well as a suitable ψ-function. A simulation study shows and a real data example illustrates that the SMDM-estimate has better performance for small n/p and that the use the new scale estimate and of a slowly redescending ψ-function is crucial for adequate inference.     

PIN OLEDs — Improved structures and materials to enhance device lifetime

Abstract— Currently, three issues are identified that decide upon the commercial success of organic light‐emitting diodes (OLEDs), both in display and lighting applications: power efficiency, lifetime, and price competitiveness. PIN OLEDs are widely seen as the preferred way to maximize power efficiency. Here, it is reported that this concept also delivers the world longest lifetimes. For a highly efficient deep‐red PIN OLED, a half‐lifetime of 25,000 hours for a starting brightness of 10,000 cd/m² and a minimal voltage increase over lifetime is reported. This value corresponds to more than 1 × 10⁶ hours at 1000 cd/m² using an exponent of n = 1.7, which was measured by driving the OLEDs at different starting luminances. Because there is no initial luminance drop, these PIN OLEDs also exhibit a very high 80% lifetime (>300,000 hours at 1000 cd/m²). New record lifetime values for blue and green will be reported as well. Additionally, further topics that have impact on the production yield and cost such as the newly developed air‐stable organic n‐doping material NDN‐26 and top‐emitting structures will be discussed.     

Verification of a Radio-Based Signaling System Using the STATEMATE Verification Environment

With the trend to partially move safety-related features from courtyards into on-board control software, new challenges arise in supporting such designs by formal verification capabilities, essentially entailing the need for a model-based design process. This paper reports on the usage of the STATEMATE Verification Environment to model and verify a radio-based signaling system, a trial case study offered by the German train system company DB. It shows, that industrially sized applications can be modeled and verified with a verification tool to be offered as a commercial product by I-Logix, Inc.     

Electrokinetic microslit experiments to analyse the charge formation at solid/liquid interfaces

Electrokinetic effects play an important role in microfluidics and nanofluidics. Although the related phenomena are often utilized to control fluid flow and sample transport in lab-on-a-chip devices, their dependency on the surface charges on the channel walls often remain enigmatic. This is mainly due to the lack of adequate experimental methods to analyse the electrical charging of solid/liquid interfaces of interest. To address this need, an experimental set-up—designated as microslit electrokinetic set-up (MES)—has been recently developed and applied for the investigation of charge formation processes at planar solid/liquid interfaces. The device permits to perform streaming potential and streaming current measurements across a rectangular streaming channel formed by two parallel sample carriers (20×10×3 mm³) at variable distance allowing for the determination of the surface conductivity. Utilizing the MES, charge characteristics can be determined for a wide variety of materials prepared as thin films on top of planar glass substrates. Streaming potential and streaming current data permit to investigate the mechanisms of charge formation while surface conductivity data provide information about mobile charge carriers located in different zones at the interface. The applicability of this advanced experimental approach is demonstrated with examples obtained for surfaces with different levels of complexity:

1. Preferential ion adsorption onto unpolar fluoropolymer (Teflon^® AF) films was characterized in simple electrolyte solutions; the results were quantitatively evaluated with respect to interfacial ion concentrations.
2. Interrelation of charge density and conformation of grafted poly(L-glutamic acid layers) were unravelled from the determination of pH-depended variations of surface conductivity and layer thickness.
3. The impact of spatial confinements of surface functional groups on their acid–base behaviour was studied with self-assembled monomolecular films of alkanethiols chemisorbed on gold.
4. Charging of and ion mobility within poly(acrylic acid) (PAA) brushes prepared by a Langmuir–Blodgett technique were analysed at varied pH and ionic strength.
5. Interfacial modes of adsorbed proteins were distinguished at two polymer surfaces with varied hydrophobicity/charge density.

     

Flavonolglykoside der Pflaumen der Species Prunus domestica L. und Prunus salicina Lindley

Zusammenfassung Blätter wie Früchte von 6 SortenPrunus domestica-Pflaumen enthalten hauptsächlich 3-Rutinoside, in geringerer Konzentration 3-Glucoside und 3-Galaktoside von Kämpferol und Quercetin Bowie Quercetin-3-rhamnosid. Dagegen weisen Pflaumen vonPrunus salicina (2 untersuchte Sorten) Kämpferol-3,7-bisrhamnosid und Kämpferol-3-arabinosyl-7-rhamnosid als Hauptflavonole auf. Hierdurch ist eine Unterscheidung beider Arten leicht and sicher mög-lich. Weiterhin konnten inSalicina-Pflaumen Kämpfe-rol-3-rutinosid sowie Quercetin-3-rhamnosid, -xylosid,-glucosid, -galaktosid, --l-arabinofuranosid and -rutinosid, auch Quercetin-7-rhamnosid and Kämpferol-7-glucosid nachgewiesen werden.Die Gesamtgehalte an Flavonolglykosiden lagen bei den untersuchten Pflaumensorten vonPrunus domestica (P. salicina) bei 2500–3340 (7170, 10350) ppm in Blättern and 20–52 (8, 24) in Früchten, jeweils bezogen auf Frischgewicht.

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Flavonol glycosides of plums of the species Prunus domestica L. and Prunus salicina lindley12. Phenolics of fruits

Summary Leaves and fruits from 6 cultivars ofPrunus domestica plums contain mainly 3-rutinosides; in smaller concentrations the 3-glycosides and 3-galactosides of kaempferol and quercetin as well as quercetin-3-rhamnoside are present. On the other hand, in plums ofPrunus salicina (2 examined cultivars) main flavonols are kaempferol-3,7-bisrhamnoside and kaempferol-3arabinosyl-7-rhamnoside. Due to the difference in composition, differentiation of these species will be easy and reliable. Additionally kaempferol-3-rutinoside and quercetin-3-rhamnoside, -xyloside,-glucoside, -galactoside, --l-arabinofuranoside and-rutinoside, and also quercetin-7-rhamnoside and kaempferol-7-glucoside could be detected inP. salicina plums. The total content of flavonol glycosides in the investigated plums ofPrunus domestica (P. salicina) were based on fresh weight about 2500–3340 (7170, 10350) ppm in the leaves and 20–52 (8, 24) ppm in the fruits.

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11. Mitt.: Henning W, Herrmann K (1980) Z Lebensm Unters Forsch 170:433–444

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Auszug aus der Promotionsarbeit von W. Henning: Bestimmung der in Pflaumen, Kirschen, Pfirsichen and Aprikosen vorkommenden Flavonolglykoside unter Anwendung der Hochdruckflüssigkeitschromatographie. Diss. Univ. Hannover 1980