High-performance MIM capacitor using ALD high-k HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectrics

For the first time, we successfully fabricated and demonstrated high performance metal-insulator-metal (MIM) capacitors with HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectric using atomic layer deposition (ALD) technique. Our data indicates that the laminate MIM capacitor can provide high capacitance density of 12.8 fF//spl mu/m/sup 2/ from 10 kHz up to 20 GHz, very low leakage current of 3.2 /spl times/ 10/sup -8/ A/cm/sup 2/ at 3.3 V, small linear voltage coefficient of capacitance of 240 ppm/V together with quadratic one of 1830 ppm/V/sup 2/, temperature coefficient of capacitance of 182 ppm//spl deg/C, and high breakdown field of /spl sim/6 MV/cm as well as promising reliability. As a result, the HfO/sub 2/-Al/sub 2/O/sub 3/ laminate is a very promising candidate for next generation MIM capacitor for radio frequency and mixed signal integrated circuit applications.     

Hydrogen annealing effect on DC and low-frequency noise characteristics in CMOS FinFETs

The hydrogen annealing process has been used to improve surface roughness of the Si-fin in CMOS FinFETs for the first time. Hydrogen annealing was performed after Si-fin etch and before gate oxidation. As a result, increased saturation current with a lowered threshold voltage and a decreased low-frequency noise level over the entire range of drain current have been attained. The low-frequency noise characteristics indicate that the oxide trap density is reduced by a factor of 3 due to annealing. These results suggest that hydrogen annealing is very effective for improving device performance and for attaining a high-quality surface of the etched Si-fin.     

Optimal Control of the Primary Drying Stage of Freeze Drying of Solutions in Vials Using Variational Calculus

The problem of operating freeze drying of pharmaceutical products in vials placed in trays of a freeze dryer to remove free water (in frozen state) at a minimum time was formulated as an optimal control problem. Two different types of freeze dryer designs were considered. In type I freeze dryer design, upper and lower plate temperatures were controlled together, while in type II freeze dryer design, upper and lower plate temperatures were controlled independently. The heat input to the material being dried and the drying chamber pressure were considered as control variables. Constraints were placed on the system state variables by the melting and scorch temperatures during primary drying stage. Necessary conditions of optimality for the primary drying stage of freeze drying process in vials are derived and presented. Furthermore, an approach for constructing the optimal control policies that would minimize the drying time for the primary drying stage was given. In order to analyze optimal control policy for the primary drying stage of the freeze-drying process in vials, a rigorous multi-dimensional unsteady state mathematical model was used. The theoretical approach presented in this work was applied in the freeze drying of skim milk. Significant reductions in the drying times of primary drying stage of freeze drying process in vials were obtained, as compared to the drying times obtained from conventional operational policies.     

Serially concatenated space-time codes with iterative decoding and performance limits of block-fading channels

This work considers space-time channel coding for systems with multiple-transmit and a single-receive antenna, over space uncorrelated block-fading (quasi-static) channels. Analysis of the outage probability over such channels reveals the existence of a threshold phenomenon. The outage probability can be made arbitrary small by increasing the number of transmit antennas, only if the E/sub b//N/sub 0/ is above a threshold which depends on the coding rate. Furthermore, it is shown that when the number of transmit antennas is increased, the /spl epsi/-capacity of a block-fading Rayleigh channel tends to the Shannon capacity of an additive white Gaussian noise channel. This paper also presents space-time codes constructed as a serial concatenation of component convolutional codes separated by an interleaver. These schemes provide full transmit diversity and are suitable for iterative decoding. The rate of these schemes is less than 1 bit/s/Hz, but can be made arbitrary close to 1 bit/s/Hz by the use of Wyner-Ash codes as outer components. Comparison of these schemes with structures from literature shows that performance gains can be obtained at the expense of a small decrease in rate. Computer simulation results over block-fading Rayleigh channels show that the frame-error rate of several of these schemes is within 2-3 dB from the theoretical outage probability.     

Bio-layer management in anaerobic membrane bioreactors for wastewater treatment.

Membrane separation technology represents an alternative way to achieve biomass retention in anaerobic bioreactors for wastewater treatment. Due to high biomass concentrations of anaerobic reactors, cake formation is likely to represent a major cause of flux decline. In the presented research, experiments are performed on the effect of biomass concentration and level of gas sparging on the hydraulic capacity of a submerged anaerobic membrane bioreactor. Both parameters significantly affected the hydraulic capacity, with biomass exerting the most pronounced effect. After 50 days of continuous operation the critical flux remained virtually unchanged, despite an increase in membrane resistance, suggesting that biomass characteristics and hydraulic conditions determine the bio-layer formation rather than the membrane's fouling level. The concept of bio-layer management is introduced to describe the programmed combination of actions performed in order to control the formation of biomass layer over membranes.     

High-resolution photonics-based interference suppression filter with wide passband

A new topology for a photonic signal processor, which overcomes the basic recursive frequency response problem that limits the passband range, is presented. The structure is based on a new multiple-wavelength offset-cavity structure that is cascaded with a series of unbalanced delay line structures. This not only can synthesize a very narrow notch response with good shape factor but also permits a multifold extension of the free spectral range (FSR) and passband width. Results on the interference mitigation filter demonstrate a stopband of 1% of center frequency and a fourfold increase in the FSR and passband width, while also having a very small shape factor, in excellent agreement with predictions.     

Segmented polymer networks containing amino‐dendrimers

Polymer networks in which poly(propylene imine) dendrimers (Astramol?) are connected to each other by linear polytetrahydrofuran (polyTHF) segments, were prepared by two methods. The first method was a one‐step procedure in which bifunctionally living polyTHF, obtained by initiation of the THF polymerization with trifluoromethane sulfonic anhydride (triflic anhydride), was reacted with an amino‐dendrimer. This reaction was very fast but did not allow formation of the end products. The second method was a two‐step procedure. In a first step, living polyTHF, prepared with acryloyloxybutyl triflate as initiator, was grafted on an amino‐dendrimer, to form a star‐like, acrylate‐terminated polyTHF multi‐macromonomer with the dendrimer as core. In a second step, networks were obtained by Michael addition between the acrylate end‐groups and unreacted amino‐groups of the dendrimer. This cross‐linking reaction occurred spontaneously upon heating of the solution of the multi‐macromonomer with gelation times varying from a few minutes to a few hours, depending on the temperature and the composition of the prepolymers. With this method it was possible to prepare networks in the form of coatings or films. © 2003 Society of Chemical Industry