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31.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
32.
Haan-Go Choi Principe J.C. Hutchison A.A. Wozniak J.A. 《IEEE transactions on bio-medical engineering》1994,41(3):257-266
Analysis of respiratory electromyographic (EMG) signals in the study of respiratory control requires the detection of burst activity from background (signal segmentation), and focuses upon the determination of onset and cessation points of the burst activity (boundary estimation). The authors describe a new automated multiresolution technique for signal segmentation and boundary estimation. During signal segmentation, a new transitional segment is defined which contains the boundary between background a burst activity. Boundary estimation is then performed within this transitional segment. Boundary candidates are selected and a probability is attributed to each candidate, using an artificial neural network. The final boundary for a given transitional segment is the boundary estimate with the maximum a posteriori probability. This new method has proved accurate when compared to boundaries chosen by two investigators 相似文献
33.
The flexural strength and fracture toughness of 30 vol% SiC whisker-reinforced Si3N4 material were determined as a function of temperature from 25 to 1400°C in an air environment. It was found that both strength and toughness of the composite material were almost the same as those of the monolithic counterpart. The room-temperature strength was retained up to 1100°C; however, appreciable strength degradation started at 1200°C and reached a maximum at 1400°C due to stable crack growth. In contrast, the fracture toughness of the two materials was independent of temperature with an average value of 5.66 MPam1/2. It was also observed that the composite material exhibited no rising R-curve behaviour at room temperature, as was the case for the monolithic material. These results indicate that SiC whisker addition to the Si3N4 matrix did not provide any favourable effects on strength, toughness and R-curve behaviour. 相似文献
34.
Negative Poisson's ratio polymeric cellular solids (re-entrant foams) were studied to ascertain the optimal processing procedures which give rise to the smallest value of Poisson's ratio. The non-linear stress-strain relationship was determined for both conventional and re-entrant foams; it depended upon the permanent volumetric compression achieved during the processing procedure. Poisson's ratio of re-entrant foam measured as a function of strain was found to have a relative minimum at small strains. The toughness of re-entrant foam increased with permanent volumetric compression, and hence with density. 相似文献
35.
The secondary effluent from municipal plants in Korea generally represents higher BOD with lower SS. Therefore, more soluble forms of organics and NH4-N need to be removed to improve its effluent for reuse. In this study reuse possibility of secondary effluent and CSO (combined sewer overflow) using BAF (biological aerated filter) was evaluated. The tertiary application with 1.2 h EBCT, SS, BOD and COD showed stable concentrations less than 1.3, 1.3 and 6.2 mg/L, respectively. Nitrogen could be nitrified even at 7 degrees suggesting BAF can be used for a water reuse method as well as an effective add-on facility in cold regions. However, BAF was not stable with CSO application at increased flow rates suggesting CSO must be equalised prior to application. Disinfection was necessary even during normal weather conditions. 相似文献
36.
Xinyu Zhu Wing-Kit Choi Shin-Tson Wu 《Electron Devices, IEEE Transactions on》2002,49(11):1863-1867
A simple method is demonstrated for measuring the cell gap of reflective twisted nematic (RTN) liquid crystal (LC) cells. This method utilizes a single laser beam and crossed polarizer configuration such that Fabry-Perot effect and surface reflection are eliminated. Experimental results agree well with theory. 相似文献
37.
38.
A survey of heterosexually active college students gathered information about condom use, self-efficacy (SE), outcome expectancies, sexual attitudes, peer group influences, AIDS knowledge, and a perceived vulnerability to AIDS. On the basis of A. Bandura's (1986) social-cognitive theory, a structural model with SE as the central mediator was formulated and evaluated with LISREL. This model explained 46% of the variance in condom use from judgments of SE and effects attributable to peers and 53% of the variance in SE from outcome expectancies and peer group influences. Sexual attitudes, AIDS knowledge, and perceived vulnerability did not predict condom use. Most students were well-informed about HIV transmission but reported not feeling at risk, even though many engaged in risky sexual behavior. (PsycINFO Database Record (c) 2010 APA, all rights reserved) 相似文献
39.
40.
In this paper, a mixed approach for probabilistic structural durability design of mechanical systems is proposed. In this approach, a deterministic design optimization that considers structural crack initiation and crack propagation lives at critical points of the structural component as design constraints is performed first. After an optimal design is obtained, a reliability analysis is performed to ascertain if the deterministic optimal design is reliable. If the probability of the failure of the deterministic optimal design is found to be acceptable, a reliability-based design approach that employs a set of interactive design steps, such as trade-off analysis and what-if study, is used to obtain a near-optimal design that is reliable with an affordable computational cost. A 3-D tracked vehicle roadarm is employed to demonstrate the feasibility of the proposed approach. 相似文献